• Steel and Composite Structures
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• v.23 no.6
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• pp.691-714
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• 2017

Rotating fluid induced vibration and instability of embedded piezoelectric nano-composite separators subjected to magnetic and electric fields is the main contribution of present work. The separator is modeled with cylindrical shell element and the structural damping effects are considered by Kelvin-Voigt model. Single-walled carbon nanotubes (SWCNTs) are used as reinforcement and effective material properties are obtained by mixture rule. The perturbation velocity potential in conjunction with the linearized Bernoulli formula is used for describing the rotating fluid motion. The orthotropic surrounding elastic medium is considered by spring, damper and shear constants. The governing equations are derived on the bases of classical shell theory (CST), first order shear deformation theory (FSDT) and sinusoidal shear deformation theory (SSDT). The nonlinear frequency and critical angular fluid velocity are calculated by differential quadrature method (DQM). The detailed parametric study is conducted, focusing on the combined effects of the external voltage, magnetic field, visco-Pasternak foundation, structural damping and volume percent of SWCNTs on the stability of structure. The numerical results are validated with other published works as well as comparing results obtained by three theories. Numerical results indicate that with increasing volume fraction of SWCNTs, the frequency and critical angular fluid velocity are increased.

• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.7-11
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• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• Korean Journal of Optics and Photonics
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• v.24 no.2
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• pp.53-57
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• 2013

A polarization selective blazed grating employing metal-slit arrays was proposed. Nano-scale metal-slits were applied to the micro-scale blazed grating to give the functionality of polarization selection. Case study was carried out for the proposed structure utilizing numerical FDTD (Finite Difference Time Domain method) simulation. Diffraction efficiency of 77.61% and polarization extinction ratio of 8.99 was achieved with arbitrary parameters and diffraction efficiency of 64.22% and polarization extinction ratio of 81.09 was achieved with other parameters to enhance extinction ratio.

• Proceedings of the Korean Magnestics Society Conference
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• 2000.09a
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• pp.251-265
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• 2000

S $m_{2}$F $e_{17}$ $N_{x}$ film magnets using a S $m_{2}$F $e_{17}$ target were prepared at $N_{2}$ gas atmosphere using a Nd-YAG laser ablation technique. The effect of nitrogen pressure, deposition temperature, pulsation time and film thickness on the structure and magnetic properties of S $m_{2}$F $e_{17}$ $N_{x}$ film were studied. Increasing the nitrogen pressure up to 5 atm. was confirmed to lead the formation of complete S $m_{2}$F $e_{17}$ $N_{x}$ compound. Optimized magnetic properties with the nitrogenation temperature ranging over 500-53$0^{\circ}C$ could be obtained by extending the nitrogenation time up to 4 hours. Relatively low coercivities of 400~600 Oe were exhibited from the S $m_{2}$F $e_{17}$ $N_{x}$ films having the thickness of 50~100 nm while 4$\pi$ $M_{s}$ of 10~12 kG could be achieved. In-plane anisotropic characteristic, which was the basic goal in this study, was achieved by controlling the nitrogenation parameters.ameters.ers.ameters.

• Bulletin of the Korean Chemical Society
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• v.28 no.11
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• pp.2083-2088
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• 2007

Biosensor based on rugate PSi interferometer for the detection of avidin has been described. Rugate PSi fabricated by applying a computer-generated pseudo-sinusoidal current waveform has been prepared for the application as a label-free biosensor based on porous silicon interferometer. The fabrication, optical characterization, and surface derivatization of a rugate PSi has been described. The method to fabricate biotinderivatized rugate PSi has been investigated. The surface and cross sectional morphology of rugate PSi are obtained with SEM. FT-IR spectroscopy is used to characterize the oxidation and functionalization reaction of rugate PSi sample. Binding of the avidin into the biotin-derivatized rugate PSi induces a change in refractive index. A red-shift of reflectivity by 18 nm in the reflectivity spectrum is observed, when the biotin-modified rugate PSi was exposed to a flow of avidin.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.21.2-21.2
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• 2009

발광다이오드는 에너지 변환 효율이 높고 친환경적인 장점으로 인하여 차세대 조명용 광원으로 각광받고 있다. 하지만 현재 발광다이오드는 낮은 광추출효율로 인하여 미래의 수요를 충족시킬 수 있을 만큼 충분한 성능의 효율을 나타내지 못하고 있다. 발광다이오드의 낮은 광추출효율은 반도체소재와 외부 공기와의 큰 굴절률 차이로 인하여 발생하는 전반사 현상에 기인한 것으로 이 문제를 해결하기 위하여 발광다이오드 소자의 발광면 및 기판을 텍스처링하는 방법이 중요하게 인식되고 있다. 하지만 현재까지 패턴의 구조에 따른 광추출 특성을 분석한 연구는 미진한 상황이다. 본 연구에서는 임프린팅 및 건식식각 공정을 이용하여 다양한 구조의 나노 및 micron 급 패턴을 발광다이오드의 p-GaN층에 형성하였다. 발광다이오드 기판 위에 하드마스크로 사용하기 위한 SiO2를 50nm 증착한 후 그 위에 UV 임프린팅 공정을 진행하여 폴리머 패턴을 형성시켰다. 임프린팅 공정으로 형성된 폴리머 패턴을 CF4CHF3 플라즈마를 이용하여 SiO2를 건식식각하였고, 이후에 SiCl4와 Ar 플라즈마를 이용한 ICP 식각 공정을 진행하여 p-GaN층을 100nm 식각하였다. 마지막으로 BOE를 이용한 습식식각 공정으로 p-GaN층에 남아있는 SiO2층을 제거하여 p-GaN층에 sub-micron에서 micron급의 홀 패턴을 형성하였다. Photoluminescence(PL) 측정을 통해서 발광다이오드 소자에 형성된 패턴의 구조에 따른 광추출 특성을 분석하였다.

• Journal of the Optical Society of Korea
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• v.6 no.3
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• pp.59-71
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• 2002

Photonic band gap structures have a high potential for nearly zero-threshold lasers. This paper describes new-types of low-threshold photonic crystal lasers fabricated in InGaAsP slab waveguides free-standing in air. Two-types of photonic crystal lasers are studied. One is a single-cell nano-cavity laser formed in a square array of air holes. This photonic band gap laser operates in the smallest possible whispering gallery mode with a theoretical Q >30000 and exhibits low threshold pump power of 0.8 mW at room temperature. The nther laser does not have any cavity structure and the lasing operation originates from the enhanced optical density of states near photonic band edges. A very low threshold of 35 $\mu$W (incident pump power) is achieved from this laser at 80 K, one of the lowest values ever reported. This low threshold is benefited from low optical losses as well as enhanced material gain at low temperature.

• Journal of the Optical Society of Korea
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• v.16 no.3
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• pp.236-242
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• 2012

In general, such methods as interferometers or wavefront sensors are commonly used for testing of an optical system and optical components. In these cases, the surrounding environments are unlikely to affect the measurements. On the other hand, intraocular lenses of hydrophilic materials with special properties experience a certain difficulty in testing the optical properties. An intraocular lens is dried in the air, which causes deformation and changes the optical characteristics such as index of refraction and thickness. Thus, it is hard to measure the optical characteristics of an intraocular lens by using common methods. In this study, a special structure is used for measuring of the transmission wavefront aberration and effective focal length of an intraocular lens of hydrophilic materials by using a Shark-Hartmann sensor among the various measuring methods. As an application of this measuring method, this study shows a simple method to measure the index of refraction of unknown liquids with a plano-convex lens with a well known index of refraction. Also, this method is used to measure the optical properties of a plano-convex such as index of refraction and curvature by using a liquid with a well known index of refraction.

• Journal of the Semiconductor & Display Technology
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• v.15 no.1
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• pp.22-26
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• 2016

Extreme ultraviolet (EUV) pellicle is one of the most concerned research in the field of EUV lithography (EUVL). Imaging performance of EUV mask with pellicle should be investigated prior to high volume manufacturing (HVM) of EUVL. In this paper, we analyzed the relationship between standoff distance and imaging performance of EUV mask to verify the influences of relative standoff distance on imaging performance. As a result, standoff distance of EUV pellicle has no effect on imaging performance of EUV mask such as critical dimension (CD), normalized image log slope (NILS) and image contrast. Therefore, pellicle support structure can be flexibly designed and modified in diverse ways to complement the thermal limitation of EUV pellicle membrane.

• Transactions of the Korean hydrogen and new energy society
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• v.21 no.2
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• pp.117-122
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• 2010

BCY($Ba(Ce_{0.9}Y_{0.1})O_{3-\delta}$) oxide, shows high protonic conductivity at high temperatures, and are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BCY-Ni layer have to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and would be applied to the fabrication process of AD integration ceramic layer effectively. XRD and SEM measurements were conducted in order to analyze the characteristics of BCY-Ni membrane fabricated by AD process.