• Transactions of Materials Processing
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• v.17 no.7
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• pp.453-458
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• 2008

• Journal of the Korean Society for Heat Treatment
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• v.32 no.3
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• pp.113-117
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• 2019

The effects of severe plastic deformation and heat treatment on the mechanical properties of Al 5052 and 6005 alloys were investigated using the metallurgical technique and nano-indentation technique in nano-surface region. Equal channel angular pressing (ECAP) was used to apply severe plastic deformation to the aluminum alloys in order to obtain fine grain sized materials. The elastic modulus was measured and interpreted in relation to the metallurgical observation. The elastic modulus increased after ECAP process due to evolution of the fine grains. However, the elastic modulus decreased after heat treatment due to generation of coarsened precipitates on the grain boundaries.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.17 no.5
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• pp.8-15
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• 2018

Films with special properties (e.g., water-repellent films, optical films, anti-reflection films, and flexible films) are referred to as functional films. Recently, there has been interest in fine patterning methods for film fabrication. In particular there have been many studies that use a UV nanoimprint process involving a UV curing method. In this paper, a polymer film was fabricated by the UV nanoimprint process with a micro-pattern, and its durability was evaluated by a wear test and a nano-indentation test. The film mechanical properties (such as coefficient of friction, hardness, and modulus of elasticity) were measured. Moreover, the choice of PUA type resin used in the UV nanoimprint process was confirmed to impact the durability of the thin film. Despite making the polymer film samples using the same method and PUA type resin, different coefficient of friction, hardness, and modulus of elasticity values were obtained. PUA 4 resin had the most favorable coefficient of friction, hardness, and modulus of elasticity. This material is predicted to produce a high durability functional film.

• Journal of the Korean Vacuum Society
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• v.22 no.5
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• pp.245-249
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• 2013

The $HfO_X$ thin film was deposited what it has been paid attention to the next generation oxide thin layer of MOSFET (metal-Oxide semiconductor field-effect-transistor) by rf magnetron sputter on Si (100) substrate. The $HfO_X$ thin film was deposited using a various oxygen gas flows (5, 10, 15 sccm). After deposition, $HfO_X$ thin films were annealed from 400 to $800^{\circ}C$ for 20 min in nitrogen ambient. The electrical characteristics of the $HfO_X$ thin film was improved by leakage current properties, depending on the increase of oxygen gas flow and annealing temperature. In particular, the properties of nano-mechanics of $HfO_X$ thin films were measured by AFM and Nano-indenter. From the results, the maximum indentation depth at the basis of maximum indentation force was increased from 24.9 to 38.8 nm according to increase the annealing temperature. Especially, the indentation depth was increased rapidly at $800^{\circ}C$. The rapid increasement of indentation depth was expected to be due to the change of residual stress in the $HfO_X$ thin film, and this result was caused by relative flux of oxygen outgasing during the annealing process.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.2 no.1
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• pp.75-84
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• 2003

In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.04a
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• pp.263-270
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• 1998

상용화된 박막 코팅 자기 저장 디스크의 기계역학 및 윤활적 물성치를 도출하기 위하여 Nano-Indentation 과 Nano-Scratch 실험이 수행되었다. 자기 디스크는 원주방향으로 일정한의 분석을 위하여 AFM(Atomic Force Microscopy)이 사용되었다. 텍스처 방향에 따른 표면조도의 변화는 가우스 확률 분포(Gaussian probability distribution)와 Weibull누적 확률 이론(Weibull cumulative probability theory)에 의하여 분석되었다. 표면 조도와 마찰계수는 텍스처의 스캐닝(scanning) 방향에 의존한다는 것이 확인 되었다.

• Interaction and multiscale mechanics
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• v.3 no.3
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• pp.267-276
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• 2010

A nonlocal finite element model is developed for solving elasto-static frictional contact problems of nanostructures and nanoscale devices. A two dimensional Eringen-type nonlocal elasticity model is adopted. The material is characterized by a stress-strain constitutive relation of a convolution integral form whose kernel is capable to take into account both the diffusion process of nonlocal elasticity and the scale ratio effects. The incremental convex programming procedure is exploited as a solver. Two examples of different nature are presented, the first one presents the behavior of a nanoscale contacting system and the second example discusses the nano-indentation problem.

• Journal of the Microelectronics and Packaging Society
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• v.26 no.4
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• pp.95-100
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• 2019

Nanoindentation has been widely used for evaluating mechanical properties of nano-devices, from MEMS to packaging modules. Residual stress is also estimated from indentation tests, especially the Knoop indenter which is used for the determination of residual stress directionality. According to previous researches, the ratio of the two stress conversion factors of Knoop indentation is a constant at approximately 0.34. However, the ratio is supported by insufficient quantitative analyses, and only a few experimental results with indentation depth variation. Hence, a barrier for in-field application exists. In this research, the ratio of two conversion factors with variation in indentation depth using finite elements method has been attempted at. The magnitudes of each conversion factors were computed at uniaxial stress state from the modelled theoretical Knoop indenter and specimen. A model to estimate two stress conversion factor of the long and short axis of Knoop indenter at various indentation depths is proposed and analyzed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.925-926
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• 2009

• Journal of the Korean Society for Precision Engineering
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• v.23 no.5 s.182
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• pp.162-169
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• 2006

Steel cord which is used as reinforcement in car tires is produced by wet-drawing process. Recently the quality improvement of the steel cord product is demanded by the tire market. After cold drawing process, produced residual stresses have a harmful effect on the durability of the wire and become the cause which decreases the quality of the product. Therefore, to improve the quality of the steel cord product, the research regarding the method of residual stress relaxation is necessary. To evaluate the quality of the cold drawn wire, it is very important to measure the residual stress, because the residual stress decides a variety of the quality level which is demanded in the cold drawn wire. The aim of this study is to propose residual stress relaxation method in the drawn wire using FE-analysis. The validity of the analysis results was verified by Nano indentation test.