• Transactions on Electrical and Electronic Materials
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• v.11 no.5
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• pp.234-237
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• 2010

Nanoenergetic materials were synthesized and the thermite reaction between the CuO nanowires and the deposited nano-Al by Joule heating was studied. CuO nanowires were grown by thermal annealing on a glass substrate. To produce nanoenergetic materials, nano-Al was deposited on the top surface of CuO nanowires. The temperature of the first exothermic reaction peak occurred at approximately $600^{\circ}C$. The released heat energy calculated from the first exothermic reaction peak in differential scanning calorimetry, was approximately 1,178 J/g. The combustion of the nanoenergetic materials resulted in a bright flash of light with an adiabatic frame temperature potentially greater than $2,000^{\circ}C$. This thermite reaction might be utilized to achieve a highly reliable selective area crystallization of amorphous silicon films.

• Journal of Powder Materials
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• v.22 no.4
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• pp.271-277
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• 2015

As wrought stainless steel, sintered stainless steel (STS) has excellent high-temperature anti-corrosion even at high temperature of $800^{\circ}C$ and exhibit corrosion resistance in air. The oxidation behavior and oxidation mechanism of the sintered 316L stainless was reported at the high temperature in our previous study. In this study, the effects of additives on high-temperature corrosion resistances were investigated above $800^{\circ}C$ at the various oxides ($SiO_2$, $Al_2O_3$, MgO and $Y_2O_3$) added STS respectively as an oxidation inhibitor. The morphology of the oxide layers were observed by SEM and the oxides phase and composition were confirmed by XRD and EDX. As a result, the weight of STS 316L sintered body increased sharply at $1000^{\circ}C$ and the relative density of specimen decreased as metallic oxide addition increased. Compared with STS 316L sintered parts, weight change ratio corresponding to different oxidation time at $900^{\circ}C$ and $1000^{\circ}C$, decreased gradually with the addition of metallic oxide. The best corrosion resistance properties of STS could be improved in case of using $Y_2O_3$. The oxidation rate was diminished dramatically by suppression the peeling on oxide layers at $Y_2O_3$ added sintered stainless steel.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.3
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• pp.267-272
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• 2011

We analyzed the wear characterization of $Si_3N_4$ ceramics according to the amount of added $SiO_2$ nanocolloid. The test specimen was prepared by hot-press sintering at 35 MPa and 2123 K in an $N_2$ gas atmosphere for 1 h. A wear test was performed with a block-on-ring tester, and the test conditions were as follows: (1) the ring with a diameter of 35 mm had a rotational speed of 50 rpm; (2) the load was 9.8 N; and (3) the temperature was $25^{\circ}C$. The test results show that $Si_3N_4$ ceramics have a friction coefficient of about 1.0 and a wear loss of about 0.02 mm. Of the specimens used this study, the test specimen with 1.3 wt% of added $SiO_2$ nanocolloid has the best wear resistance because it has the lowest friction coefficient and the smallest wear loss. This specimen also has the highest Vickers hardness and bending strength. In this study, the friction coefficient is inversely proportional to the hardness and bending strength.

• Journal of the Korean Ceramic Society
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• v.45 no.9
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• pp.524-530
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• 2008

Anti-Reflective (AR) thin film coatings of $SiO_2$ (n= 1.48) and $TiO_2$ (n=2.17) were deposited by ion-beam assisted deposition (IBAD) with End-Hall ion source and conventional electron beam (e-beam) evaporation to investigate the effect of deposition method on the refractive indicies (n) of the fIlms. Green-light generation using a GaAs laser diode was achieved via excitation of the second harmonic. The latter resulted from the transmission of the fundamental guided-mode wave of 1064 nm through periodically poled $LiNbO_3$. Large differences in the refractive indicies of each of the layers in the multilayer coating may improve AR performance. IBAD of $SiO_2$ reduced its refractive index from 1.45 to 1.34 at 1064 nm. Conversely, e-beam evaporation of $TiO_2$ increased its refractive index from 1.80 to 2.11. In addition, no fluctuations in absorption at the wavelength of 1064 nm were found. The results suggest that films prepared by different deposition methods can increase the effectiveness of multilayer AR coatings.

• Korean Chemical Engineering Research
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• v.57 no.2
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• pp.259-266
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• 2019

Tuning of electro-optical properties of nano-structured $SnO_2:Ga$ powders in a micro drop fluidized reactor (MDFR) was highly effective to enhance the activities of powders to be used as sensor materials. The tuning was conducted continuously in a facile one-step process during the formation of powders. The microscopic hydrodynamic forces affected the band gap structure and charge transfer of $SnO_2:Ga$ powders through the oxygen and interfacial tin vacancies by providing plausible pyro-hydraulic conditions, which resulted in the decrease in the electrical resistance of the materials. The analyses of room-temperature photoluminescence (PL) spectra and FT-IR exhibited that the tuning could improve the surface activities of $SnO_2:Ga$ powders by adjusting the excitation as well as separation of electrons and holes, thus maximizing the oxygen vacancies at the surface of the powders. The scheme of photocatalytic mechanism of $SnO_2:Ga$ powders was also discussed.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.177.1-177.1
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• 2015

플라즈마 건식 식각공정은 반도체 공정에 있어 증착 및 세정 공정과 함께 중요한 공정중 하나이다. 기존 연구에서는 높은 식각 속도, 종횡비, 대면적에 대한 균일도 증가를 위하여 플라즈마 이온 밀도의 증가와 전자 온도를 감소시키기 위한 노력을 하고 있으며 플라즈마 식각분석 연구에서는 분광학 분석 기법을 활용하여 플라즈마에 의하여 활성화된 식각 가스와 박막 표면의 반응 메커니즘 연구가 진행 중에 있다. 그러나 지금까지의 플라즈마 식각연구에서는 플라즈마 식각 공정에서 발생되는 박막의 damage에 대한 연구는 전무하다. 본 연구에서는 플라즈마 식각과정에서 발생되는 박막 표면의 damage 연구를 위하여 Nano-indenter에 의한 분석 기법을 제시하였다. Nano-indentation 기법은 박막 표면을 indenter tip으로 직접 인가하여 박막 표면의 기계적 특성을 분석하고 이를 통하여 플라즈마에 의한 박막 표면의 물성 변화를 정량적으로 측정한다. 실험에서 플라즈마 소스는 Adaptively Coupled Plasma (ACP)를 사용하였고 식각 가스로는 HBr 가스를 주로 사용하였으며, 플라즈마 소스 파워는 1000 W로 고정 하였다. 연구 결과에 의하면 식각공정 챔버 내 압력이 5, 10, 15 및 20 mTorr로 증가함에 따라 TEOS SiO2 박막의 강도가 7.76, 8.55, 8.88 및 6.29 GPa로 변화되는 것을 측정하였고 bias power에 따라서도 다르게 측정됨을 확인하였다. 이 결과를 통하여 Nano-indentation 분석 기법을 활용하여 TEOS SiO2 박막의 식각공정의 변화에 따른 강도변화를 측정함으로써 플라즈마에 의한 박막 표면의 damage를 정량적으로 측정 가능함을 확인하였다.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.751-756
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• 2009

In the perspective of saving energy in buildings, the high performance of insulation and air tightness for improving the heating and the cooling efficiency, has brought economically positive effects. However, these building energy saving technologies cause the lack of ventilation, which is the direct cause of increasing the indoor contaminants, and is also very harmful to the residents, because they spend over 90% of their time indoors. Therefore, the ventilation is important to keep the indoor environment clean and it can also save the energy consumption. In this study, a HEPA type nano ceramic filter is designed as a passive ventilation system to collect airborne particles and to supply fresh outdoor air. The double layer filter, which has $30{\mu}m$ in diameter at the conditions of 10wt% of concentration and 3kV/cm of the electric intensity, is produced by electrospinning. The filtration coating technology is confirmed in the solution with $SiO_2$ nano particles using polymer nano fibers. Also double layer filters are coated with $SiO_2$ nano particles and finally the porous construction materials are made by sintering in the electric furnace at $200{\sim}1400^{\circ}C$. The efficiency is measured 96.67% at the particle size of $0.31{\mu}m$, which is slightly lower than HEPA filter. However the efficiency is turned out to be sufficient.

• Proceedings of the Materials Research Society of Korea Conference
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• 2009.05a
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• pp.21.2-21.2
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• 2009

발광다이오드는 에너지 변환 효율이 높고 친환경적인 장점으로 인하여 차세대 조명용 광원으로 각광받고 있다. 하지만 현재 발광다이오드는 낮은 광추출효율로 인하여 미래의 수요를 충족시킬 수 있을 만큼 충분한 성능의 효율을 나타내지 못하고 있다. 발광다이오드의 낮은 광추출효율은 반도체소재와 외부 공기와의 큰 굴절률 차이로 인하여 발생하는 전반사 현상에 기인한 것으로 이 문제를 해결하기 위하여 발광다이오드 소자의 발광면 및 기판을 텍스처링하는 방법이 중요하게 인식되고 있다. 하지만 현재까지 패턴의 구조에 따른 광추출 특성을 분석한 연구는 미진한 상황이다. 본 연구에서는 임프린팅 및 건식식각 공정을 이용하여 다양한 구조의 나노 및 micron 급 패턴을 발광다이오드의 p-GaN층에 형성하였다. 발광다이오드 기판 위에 하드마스크로 사용하기 위한 SiO2를 50nm 증착한 후 그 위에 UV 임프린팅 공정을 진행하여 폴리머 패턴을 형성시켰다. 임프린팅 공정으로 형성된 폴리머 패턴을 CF4CHF3 플라즈마를 이용하여 SiO2를 건식식각하였고, 이후에 SiCl4와 Ar 플라즈마를 이용한 ICP 식각 공정을 진행하여 p-GaN층을 100nm 식각하였다. 마지막으로 BOE를 이용한 습식식각 공정으로 p-GaN층에 남아있는 SiO2층을 제거하여 p-GaN층에 sub-micron에서 micron급의 홀 패턴을 형성하였다. Photoluminescence(PL) 측정을 통해서 발광다이오드 소자에 형성된 패턴의 구조에 따른 광추출 특성을 분석하였다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.3
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• pp.228-233
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• 2010

We studied the optical characteristics correlated with low dielectric constants of low-k SiOCH thin films through ellipsometry. The low-k SiOCH thin films were prepared by CCP-PECVD method using BTMSM(Bis-trimethylsilylmethane) precursors deposited on p-Si wafer. The Si-O-CHx, Si-O-Si, Si-CHx, CHx and Si-H bonding groups were specified by FTIR spectroscopic spectra, and the groups coupled with the nano-porous structural organic/inorganic hybrid-type of SiOCH thin films which has extremely low dielectric constant close to 2.0. The structural groups includes highly dense pore as well as ions in SiOCH thin films affecting to complex refraction characteristics of single layer on the p-Si wafer. The structural complexity originate the complex refractive constants of the films, and resulted the elliptical polarization of the incident linearly polarized light source of Xe-light source in the range from 190 nm to 2100 nm. Phase difference and amplitude ratio between s wave and p wave propagating through SiOCH thin film was studied. After annealing, the amplitude of p wave was reduced more than s wave, and phase difference between p and s wave was also reduced.

• Korean Journal of Materials Research
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• v.20 no.11
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• pp.559-569
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• 2010

The liquid-phase sintering method was used to prepare a glass lens forming core composed of SiC-$Al_2O_3-Y_2O_3$. Spark plasma sintering was used to obtain dense sintered bodies. The sintering characteristics of different SiC sources and compositions of additives were studied. Results revealed that, owing to its initial larger surface area, $\alpha$-SiC offers sinterability that is superior to that of $\beta$-SiC. A maximum density of $3.32\;g/cm^3$ (theoretical density [TD] of 99.7%) was obtained in $\alpha$-SiC-10 wt% ($6Al_2O_3-4Y_2O_3$) sintered at $1850^{\circ}C$ without high-energy ball milling. The maximum hardness and compression stress of the sintered body reached 2870 Hv and 1110 MPa, respectively. The optimum ultra-precision machining parameters were a grinding speed of 1243 m/min, work spindle rotation rate of 100 rpm, feed rate of 0.5 mm/min, and depth of cut of $0.2\;{\mu}m$. The surface roughnesses of the thus prepared final products were Ra = 4.3 nm and Rt = 55.3 nm for the aspheric lens forming core and Ra = 4.4 nm and Rt = 41.9 for the spherical lens forming core. These values were found to be sufficiently low, and the cores showed good compatibility between SiC and the diamond-like carbon (DLC) coating material. Thus, these glass lens forming cores have great potential for application in the lens industry.