• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.34 no.2
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• pp.99-104
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• 2021

Ion-beam sputtering (IBS) was used to deposit semiconducting IZTO (indium zinc tin oxide) thin films onto heavily-doped Si substrates using a sintered ceramic target with the nominal composition In0.4Zn0.5Sn0.1O1.5, which could work as a channel layer for oxide TFT (oxide thin film transistor) devices. The crystallization behavior and electrical properties were examined for the films in terms of deposition parameters, i.e. target tilt angle and substrate temperature during deposition. The thickness uniformity of the films were examined using a stylus profilometer. The observed difference in electrical properties was not related to the degree of crystallization but to the deposition temperature which affected charge carrier concentration (n), electrical resistivity (ρ), sheet resistance (Rs), and Hall mobility (μH) values of the films.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.345-345
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• 2014

최근 디스플레이 기술은 급속도로 발전해 가고 있다. 정보화 기술의 발전으로 언제 어디서나 쉽게 정보를 얻을 수 있는 유비쿼터스 시대로 접근하고 있으며, 휴대가 간편하고 이동성을 가진 휴대용 기기가 인기를 끌고 있다. 이에 따라 더 얇고 더 가벼우며 휴대하기 쉬운 디스플레이가 요구 되고 있고, 더 나아가 떨어뜨려도 깨지지 않고 유연하며, 디자인 변형이 자유로우며, 때론 종이처럼 접거나 휘어지거나 두루마리처럼 말을 수 있는 이른바 "플렉서블 디스플레이"에 대한 필요성이 점점 대두되고 있다. 이러한 첨단 디스플레이의 핵심 소자 중 하나는 산화물 박막 트랜지스터 이다. 산화물 반도체는 넓은 밴드갭을 가지고 가시광선 영역에서 투명하며, 높은 이동도를 가지고 있어 차세대 평판디스플레이, 투명디스플레이 및 플렉서블 디스플레이용 박막트랜지스터(TFT)를 위한 채널층으로써 광범위하게 연구되고 있다. 하지만 현재 대부분의 산화물 박막 트랜지스터 제조 공정은 고온에서의 열처리를 필요로 한다. 고온에서의 열처리 공정은 산화물 박막의 제조 공정 단가를 증가시키는 문제점이 있으며, 산화물 박막이 형성되는 기판의 녹는점이 낮은 경우에는 상기 기판의 변형을 가져오므로(예를 들면, 플라스틱 기판, 섬유 기재 등), 상기 산화물 박막이 적용되는 기판의 종류에 제한이 생기는 문제점이 있었다. 이에 플렉시블 디스플레이 등을 위해서는 저온공정이 필수로 선행 되어야 한다. 산화물 TFT는 당초, ZnO계의 재료가 연구되었지만 2004년 말에 Hosono 그룹이 Nature지에 "IGZO (In, Ga, Zn, O)"을 사용한 TFT를 보고한 이후 IGZO, IZO, ISZO, IYZO, HIZO와 같은 투명 산화물반도체가 TFT의 채널물질로써 많이 거론되고 있다. 그 중에서 인듐갈륨 산화물(IGO)는 삼성분계 n-형 산화물 반도체이고, 채널 이동성이 좋고 광투과도가 우수해 투명 TFT에 매우 유용하게 사용할 수 있다. 이 실험에서 우리는 인듐갈륨 산화물 박막 및 트랜지스터 특성 연구를 진행하였다. 인듐갈륨 산화물 박막은 상온에서 rf-magnetron sputtering법을 사용하여 산소분압 1~10%에서 증착 되었다. 증착된 인듐갈륨 산화물 박막은 cubic $In_2O_3$ 다결정으로 나타났으며, 2차상은 관찰 되지 않았다. 산소분압이 10%에서 1%로 변함에 따라 박막의 전도도는 $2.65{\times}10^{-6}S/cm$에서 5.38S/cm 범위에서 조절되었으며, 이를 바탕으로 인듐갈륨 박막을 active층으로 사용하는 bottom gate 구조의 박막트랜지스터를 제작 하였다. 인듐갈륨산화물 박막트랜지스터는 산소분압 10%에서 on/off 비 ${\sim}10^8$, field-effect mobility $24cm^2/V{\cdot}S$를 나타내며 상온에서 플렉서블용 고 이동도 소자 제작의 가능성을 보여준다.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.309.2-309.2
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• 2014

산화아연은 넓은 밴드갭과 큰 엑시톤 에너지를 갖고 있어 광전자반도체 물질로 산화인듐주석의 대체물질로 유망하다. 그러나, 산화아연 박막 및 나노막대는 대부분 c-축 방향으로의 성장이 보고되고 있다. 하지만, c-축으로 성장하는 극성 산화아연은 자발분극과 압전분극을 갖으며 이는 quantum confinement Stark effect (QCSE)를 발생시킨다. 그러므로, 반극성과 무극성 산화아연의 연구가 활발히 진행 되고 있다. 더욱이, 산화아연 나노구조체는 넓은 표면적, 높은 용해도, 광범위한 적용분야 등의 이점으로 많은 연구가 이뤄지고 있다. 본 연구에서는 m-면 사파이어 기판 위에 원자층 증착법을 이용하여 비극성 산화아연의 박막을 형성 후 전기화학증착법을 이용하여 반극성 산화아연 막대를 성장하고 이에 대한 성장 메커니즘을 분석하였다. 반극성 (10-11) 산화아연 나노구조체를 성장하기 위하여 두 단계 공정을 이용하였다. 먼저 원자층 증착법을 이용하여 m-면 사파이어 기판 위에 60 nm의 산화아연 씨앗층을 $195^{\circ}C$에서 성장 하였다. X-선 회절분석을 통하여 m-면 사파이어 위에 성장한 산화아연 씨앗층이 무극성 (10-10)으로 성장한 것을 확인하였다. 무극성 산화아연 씨앗층 위에 나노구조체를 형성하기 위하여 전기화학 증착법을 이용하여 주 공정이 진행되었다. 전구체로는 질산아연헥사수화물 ($Zn(NO3)2{\cdot}6H2O$)과 헥사메틸렌테트라민을 ((CH2)6N4)을 사용하였다. 무극성 산화아연 기판을 질산아연헥사수화물과 헥사메틸렌테트라민을 용해한 전해질에 담근 뒤 $70^{\circ}C$에서 두시간 동안 -1.0V의 정전압을 인가하였다. SEM을 이용한 표면 분석에서 원자층 증착법을 이용해 성장한 무극성 산화아연 씨앗층 위에 산화아연 나노구조체를 성장 시, 한 방향으로 기울어진 반극성 산화아연 나노구조체가 성장하는 것이 관찰되었다. 산화아연 막대의 성장 시간에 따라 XRD를 측정한 결과, 성장 초기에는 매우 약한 $31.5^{\circ}$ (100), $34.1^{\circ}$ (002), $36^{\circ}$ (101) 부근의 피크가 관찰되는 반면, 성장 시간이 증가함에 따라 강한 $36^{\circ}$ 부근의 피크가 관찰되는 X-선 회절 분석 결과를 얻을 수 있었다. 이는, 성장 초기에는 여러 방향의 나노구조체가 성장하였지만 성장시간이 점차 증가함에 따라 (101) 방향으로 우선 성장되는 것을 확인하였다.

• Korean Journal of Environmental Agriculture
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• v.17 no.1
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• pp.65-69
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• 1998

In order to evaluate the utility of bituminous coal fly ash, gypsum, oyster shell as soil amendments, aadic clayloam paddy soils with low calaum content were amended in the upper 15㎝ with amendments, and then Chinese cabbage was cultivated under plastic film house. Amendments treated were, in metric tons per hectare, i) none(Check) ; ii) 80 fly ash(FA) ; iii) 4 shell(SH) ; iv) 56 fly ash+24 gypsum (FG) ; v) 40 fly ash+24 gypsum+0.8 shell(FGS). On the whole, soil chemical properties were improved by amendments treatments. Amongst treatments, FA prominently neutralized soil pH and increased contents of Av. $P_2O_5$, Ex. K, and Av. B in soils. Besides, it showed the highest ratio in bacteria/fungi and (bacteria+actinomycetes)/fungi. FGS also affected the neutralization of soil pH and the increment of Ex. Mg. Amendments plants appeared alkaline damages only at early growing stage, but showed positive responses in fresh weight yields : 23% for FGS : 21% for FG : 19 18% for SH. At harvesting, leaves both of FA and FGS plants had higher values in contents of N, P, K, Ca, Mg, Fe, Mn, Zn, B, reduang-sugar, and vitamin-C than of others. In especial, Check plants appeared the heart rot symptoms owing to calaum defiaency differently from amendments plants. Taken together, FGS was an effective combination enable to maximize the utility of fly ash, gypsum, shell as soil amendments, espeaally in cabbage yield and quality.

• Polymer(Korea)
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• v.25 no.5
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• pp.642-648
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• 2001

An attempt was made to synthesize an ammonia adsorbent by the photo-induced grafting of styrene (St) onto polypropylene (PP) nonwoven using benzoin ethyl ether (BEE) as a photosensitizer with urea and trimethylol propane triacrylate in methanol medium. As styrene concentration was increased, the graft yield was increased. It was also found that the graft yield increased with reaction time. The polypropylene grafted with styrene (PP-g-St) was sulfonated by chlorosulfonic acid in dichloroethane and complexed with several metal ion, such as $cO^{+2}$, $nI^{+2}$, $cU^{+2}$, $Zn^{+2}$. The amount of ammonia gas adsorbed by these sample was dependent on the degree of sulfonation, adsorption time, and ammonia gas pressure. The adsorption capacity of ammonia gas by the sulfonated PP-g-St(SPP-g-St) nonwoven with 4. 25 mmol $H^+$/g was 6.61 mmol/g. Metal ion complexed SPP-g-St nonwovens had higher adsorption capacity than SPP-g-St nonwoven and the $Co^{+2}$ complexed SPP-g-St showed 9.90 mmol $NH_3$/g, which was much higher than that of active carbon or silica gel.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.341-341
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• 2012

Recently, oxide semi-conductor materials have been investigated as promising candidates replacing a-Si:H and poly-Si semiconductor because they have some advantages of a room-temperature process, low-cost, high performance and various applications in flexible and transparent electronics. Particularly, amorphous indium-gallium-zinc-oxide (a-IGZO) is an interesting semiconductor material for use in flexible thin film transistor (TFT) fabrication due to the high carrier mobility and low deposition temperatures. In this work, we demonstrated improvement of flexibility in IGZO TFTs, which were fabricated on polyimide (PI) substrate. At first, a thin poly-4vinyl phenol (PVP) layer was spin coated on PI substrate for making a smooth surface up to 0.3 nm, which was required to form high quality active layer. Then, Ni gate electrode of 100 nm was deposited on the bare PVP layer by e-beam evaporator using a shadow mask. The PVP and $Al_2O_3$ layers with different thicknesses were used for organic/inorganic multi gate dielectric, which were formed by spin coater and atomic layer deposition (ALD), respectively, at $200^{\circ}C$. 70 nm IGZO semiconductor layer and 70 nm Al source/drain electrodes were respectively deposited by RF magnetron sputter and thermal evaporator using shadow masks. Then, IGZO layer was annealed on a hotplate at $200^{\circ}C$ for 1 hour. Standard electrical characteristics of transistors were measured by a semiconductor parameter analyzer at room temperature in the dark and performance of devices then was also evaluated under static and dynamic mechanical deformation. The IGZO TFTs incorporating hybrid gate dielectrics showed a high flexibility compared to the device with single structural gate dielectrics. The effects of mechanical deformation on the TFT characteristics will be discussed in detail.

• Bulletin of the Korean Chemical Society
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• v.31 no.10
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• pp.2923-2928
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• 2010

This study examined the synthesis of the crystal structure of bis(2,2'-bipyridine)nitrato zinc (II) nitrate, $[Zn(bipy)_2(NO_3)]^+NO_3^-$ using a microwave treatment at 300 W and 60 Hz for the application to dye-sensitized solar cells. The simulated complex structure of the complex was optimized with the density functional theory calculations for the UV-vis spectrum of the ground state using Gaussian 03 at the B3LYP/LANL2DZ level. The structure of the acquired complex was expected a penta-coordination with four nitrogen atoms of bipyridine and the oxygen bond of the $NO_3^-$ ion. The reflectance UV-vis absorption spectra exhibited two absorptions (L-L transfers) that were assigned to the transfers from the ligand ($\sigma$, $\pi$) of $NO_3$ to the ligand ($\sigma^*$, $\pi^*$) of pyridine at around 200 - 350 nm, and from the non-bonding orbital (n) of O in $NO_3$ to the p-orbital of pyridine at around 450 - 550 nm, respectively. The photoelectric efficiency was approximately 0.397% in the dye-sensitized solar cells with the nanometer-sized $TiO_2$ at an open-circuit voltage (Voc) of 0.39 V, a short-circuit current density (Jsc) of $1.79\;mA/cm^2$, and an incident light intensity of $100\;mW/cm^2$.

• The Bulletin of The Korean Astronomical Society
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• v.36 no.1
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• pp.27.1-27.1
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• 2011

We obtained the spectra of 93 Planet host stars and 73 normal field stars in F, G, K type using BOES at BOAO. We measured the equivalent width of Fe and 25 elements lines using the automatic EW measurement program, TAME(Tools for Automatic Measurement of Equivalent-widths) and estimated the elemental abundances by synth and abfind driver of MOOG code. Since the absence of planets in the normal field stars cannot be "completely" proved, this work focused on the chemical abundances and planet properties of planet host stars, which have the massive planets close to the parent star relatively. We carried out an investigation for the difference of abundances between stars with "Hot Jupiter" and normal field stars with no known planets. We examined the chemical composition of 25 elements, such as C, N, O, S, Na, Mg, Al, Si, K, Ca, Sc, Ti, V, Cr, Mn, Co, Ni, Cu, Zn, Sr, Y, Zr, Ba, Ce, Nd, and Eu by EW measurements, and the S abundances were estimated using synthetic spectrum. We have found that [Mg/Fe] and [Al/Fe] for planet host stars have lower limit comparing with those of comparison stars, and [Ca/Fe] of host star with Neptunian planets is relatively lower than the other host stars with massive planets. We have performed the Kolmogorov-Smirnov test, and examined the ratio of planet host stars to all stars for each bin of [X/H]. As a result, we noted that the O, Si, and Ca abfor undances are strongly related with the presence of planets.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.32 no.5
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• pp.371-375
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• 2019

Developing a thin-film transistor with characteristics such as a large area, high mobility, and high reliability are key elements required for the next generation on displays. In this paper, we have investigated the research trends related to improving the reliability of oxide-semiconductor-based thin-film transistors, which are the primary focus of study in the field of optical displays. It has been reported that thermal treatment in a high-pressure oxygen atmosphere reduces the threshold voltage shift from -7.1 V to -1.9 V under NBIS. Additionally, a device with a $SiO_2/Si_3N_4$ dual-structure has a lower threshold voltage (-0.82 V) under NBIS than a single-gate-insulator-based device (-11.6 V). The dual channel structure with different oxygen partial pressures was also confirmed to have a stable threshold voltage under NBIS. These can be considered for further study to improve the NBIS problem.

• Current Research on Agriculture and Life Sciences
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• v.14
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• pp.111-122
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• 1996

S. chibaensis J-59 produced an extracellular xylanase in a CSL medium composed of 1.5% com steep liquor, 0.1% $MgSO_4{\cdot}7H_2O$, 0.012% $CoCl_2{\cdot}6H_2O$, and 0.15% glucose containing xylan. but it did not produce in the culture medium containing xylose. The production of enzyme reached to a maximum level (0.83 uints/ml) when bacteria were cultured in 2.5 l jar fermentor for 48hrs at $30^{\circ}C$ and pH 7.0. Furthermore, S. chibaensis J-59 produced an intracellular glucose isomerase in a medium containing xylan and/or xylose. Xylanase was purified 29-fold over the culture supernatants of S. chibaensis J-59 by ammonium sulfate fractionation, chromatography on DEAE-Sephadex A-50, and gel filtration on Sephadex G-200. The purified enzyme is a monomeric enzyme with a native molecular mass of 25 kDa and a subunit molecular mass of 25 kDa. The purified enzyme requires $Mg^{2+}$ for activity, $Ca^{2+}$, $Co^{2+}$ is not an inhibitor but inhibit by $Fe^{3+}$, $Hg^{2+}$, and $Cu^{2+}$, sodium dodecyl sulfate, N-bromosuccinide. Pattern of hydrolysis demonstrated that the xylanase was an endo-splitting enzyme able to break down birchwood xylan at random giving xylobiose, xylotriose and xylotetrose as the main end products.