• 제목/요약/키워드: multilayer substrate

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Glass 위에 증착된 SnO2/Ag/Nb2O5/SiO2/SnO2 다층 투명전도막의 성능지수 (Figure of Merit of SnO2/Ag/Nb2O5/SiO2/SnO2 Transparent Conducting Multilayer Film Deposited on Glass Substrate)

  • 김진균;이상돈;장건익
    • 한국전기전자재료학회논문지
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    • 제30권2호
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    • pp.81-85
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    • 2017
  • $SnO_2/Ag/Nb_2O_5/SiO_2/SnO_2$ multilayer films were prepared on glass substrate by sequential using RF/DC magnetron sputtering at room temperature. The influence of top $SnO_2$ layer thickness on optical and electrical properties of the multilayer films was investigated. Experimentally measured results exhibit transmittances over 84.3 ~ 85.8% at 550 nm wavelength. As the top $SnO_2$ layer thickness increased from 40 to 55 nm, the sheet resistance (Rs) increased from 5.81 to $6.94{\Omega}/sq$. The Haacke's figure of merit (FOM) calculated for the samples with various $SnO_2$ layer thicknesses was a maximum at 45 nm ($35.3{\times}10^{-3}{\Omega}^{-1}$).

D.C. 마그네트론 스퍼터링법으로 제조한 ITO 및 ITO/Ag/ITO 박막의 미세조직과 투명 전극 특성 (Microstructure and Properties of ITO and ITO/Ag/ITO Multilayer Thin Films Prepared by D.C. Magnetron Sputtering)

  • 최용락;김선화
    • 한국재료학회지
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    • 제16권8호
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    • pp.490-496
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    • 2006
  • ITO monolayer and ITO/Ag/ITO multilayer thin films are prepared by D.C. magnetron sputtering method. Ag layer was inserted for applying ITO to a flexible substrate at low temperature. Carrier concentration and carrier mobility of ITO and ITO/Ag/ITO thin films were measured, the transmittance of them also was done. The amorphous phase was confirmed to be combined in addition to (400) and (440) peaks from XRD result of ITO thin film. As the substrate temperature increased, the preferred orientation of (400) appeared. From the result of application of Ag layer at room temperature, the growth of columnar structure was inhibited, and the amorphous phase formed mostly. The ITO/Ag/ITO thin film represented the transmittance of above 80% when the thickness of Ag layer was 50 ${\AA}$, and the concentration of carrier increased up to above 10 times than that of ITO thin film. Finally, since very low resistance of 3.9${\Omega}/{\square}$ was observed, the effective application of low temperature process is expected to be possible for ITO thin film.

Control of Feed Rate Using Neurocontroller Incorporated with Genetic Algorithm in Fed-Batch Cultivation of Scutellaria baicalensis Georgi

  • Choi, Jeong-Woo;Lee, Woochang;Cho, Jin-Man;Kim, Young-Kee;Park, Soo-Yong;Lee, Won-Hong
    • Journal of Microbiology and Biotechnology
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    • 제12권4호
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    • pp.687-691
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    • 2002
  • To enhance the production of flavonoids [baicalin, wogonin-7-Ο-glucuronic acid (GA)], which are secondary metabolites of Scutellaria baicalensis Georgi(G.) plant cells, a multilayer perceptron control system was applied to regulate the substrate feeding in a fed-batch cultivation. The optimal profile for the substrate feeding rate in a fed-batch culture of S. baicalensis G. was determined by simulating a kinetic model using a genetic algorithm. Process variable profiles were then prepared for the construction of a multilayer perceptron controller that included massive parallelism, trainability, and fault tolerance. An error back-propagation algorithm was applied to train the multiplayer perceptron. The experimental results showed that neurocontrol incorporated with a genetic algorithm improved the flavonoid production compared with a simple fuzzy logic control system. Furthermore, the specific production yield and flavonoid productivity also increased.

양친매성 다중층막의 전기적 도전성 및 전기적 특성 (The Electrical Conductivity and Electrochemical Characteristics of Amphiphilic Milecules Multilayer Film confined with Hetero Type)

  • 최인희;박수길;임기조;이주성
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1996년도 춘계학술대회 논문집
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    • pp.269-272
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    • 1996
  • The electrochemical behavior of Ru complex and PD complex monolayer, deposited on conductive substrate by the Langmuir-Blodgett(LB) technique as monolayer and multilayer, has been studied by cyclic voltammetry. Monolayer films show stable reversible state. Atomic resolution imaging of LB highly-conductive, environmently stable organic films has been obtained by atomic force microscopy (AFM) showing their closely packed structure,

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Passivation of organic light emitting diodes with $Al_2O_3/Ag/Al_2O_3$ multilayer thin films grown by twin target sputtering system

  • Jeong, Jin-A;Kim, Han-Ki
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.420-423
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    • 2008
  • The characteristics of $Al_2O_3/Ag/Al_2O_3$ multilayer passivaton prepared by twin target sputtering (TTS) system for organic light emitting diodes. The $Al_2O_3/Ag/Al_2O_3$ multilayer thin film passivation on a PET substrate had a high transmittance of 86.44 % and low water vapor transmission rate (WVTR) of $0.011\;g/m^2$-day due to the surface plasmon resonance (SPR) effect of Ag interlayer and effective multilayer structure for preventing the intrusion of water vapor. Using synchrotron x-ray scattering and field emission scanning electron microscope (FESEM) examinations, we investigated the growth behavior of Ag layer on the $Al_2O_3$ layer to explain the SPR effect of the Ag layer. This indicates that an $Al_2O_3/Ag/Al_2O_3$ multilayer passivation is a promising thin film passivation scheme for organic based flexible optoelectronics.

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다층박막을 이용한 Ga-doped ZnO 투명전도막의 특성 (The Characteristics of Ga-doped ZnO Transparent Thin Films by using Multilayer)

  • 김봉석;이규일;강현일;이태용;오수영;이종환;송준태
    • 한국전기전자재료학회논문지
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    • 제20권12호
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    • pp.1044-1048
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    • 2007
  • With development of electronic products the demands for miniaturization and weight-lightening have increased until a recent date. Accordingly, The effort to substitute glass substrates was widely made. However, polymer substrates have weak point that substrates were damaged at high temperature. In this paper, we deposited transparent conductive film at low temperature. And we inserted Au thin film between oxide to compensate for deteriorated electrical characteristics. Ga-doped ZnO(GZO) multilayer coatings were deposited on glass substrate by DC sputtering. The optimization of deposition conditions of both AZO and Au layers were performed to obtain better electrical and optical characteristics in advance. We presumed that the properties of multilayer were affected by the deposition process of both GZO and Au layers. The best multilayer coating exhibited the resistivity of $2.72{\times}10^{-3}\;{\Omega}-cm$ and transmittance of 77 %. From these results, we can confirm a possibility of the application as transparent conductive electrodes.

ITO/ZnO/Ag/ZnO/ITO Multilayers Films for the Application of a Very Low Resistance Transparent Electrode on Polymer Substrate

  • Ok, Chul-Ho;Han, Jin-Woo;Kim, Jong-Yeon;Kim, Byoung-Yong;Han, Jeong-Min;Moon, Hyun-Chan;Park, Kwang-Bum;Seo, Dae-Shik
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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    • pp.397-397
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    • 2007
  • Multilayer transparent electrodes, having a much lower electrical resistance than the widely used transparent conducting oxide electrodes, were prepared by using radio frequency magnetron sputtering. The multilayer structure consisted of five layers, indium tin oxided(ITO)/zinc oxide(ZnO)/Ag/oxide(ZnO)/ITO. With about 50nm thick ITO films, the multilayer showed a high optical transmittance in the visible range of the spectrum and had color neutrality. The electrical and optical properties of ITO/ZnO/Ag/ZnO/ITO multilayer were changed mainly by Ag film properties, which were affected by the deposition process of the upper layer. Especially ZnO layer was improved to adhesion of Ag and ITO. A high quality transparent electrode, having a resistance as low as and a high optical transmittance of 91% at 550nm, was obtained. It could satisfy the requirement for the flexible OLED and LCD.

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PLD법으로 제작된 Phosphorus를 도핑한 ZnO 박막의 다층 구조 도입에 따른 영향 (The Effects of Phosphorus Doped ZnO Thin Films with Multilayer Structure Prepared by Pulsed Laser Deposition Method)

  • 임성훈;강홍성;김건희;장현우;김재원;이상렬
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 춘계학술대회 논문집 디스플레이 광소자 분야
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    • pp.127-130
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    • 2005
  • The properties of phosphorus doped ZnO multilayer thin films deposited on (001) sapphire substrates by pulsed laser deposition (PLD) were investigated by using annealing treatment at various annealing temperature after deposition. The phosphorus doped ZnO multilayer was composed of phosphorus doped ZnO layer and two pure ZnO layers on sapphire substrate. The structural. electrical and optical properties of the ZnOthin films were measured by X-ray diffraction (XRD). Hall measurements and photoluminescence (PL). As the annealing temperature optimized. the electrical properties of the ZnO multilayer showed a electron concentration of $1.56{\times}10^{16}/cm^3$, a resistivity of 17.97 ${\Omega}cm$. It was observed the electrical property of the film was changed by dopant activation effect as thermal annealing process

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금속층 두께에 따른 ITO/Ag/ITO 다층 투명 전극의 발열 특성 연구 (A Study on the Exothermic Properties of ITO/Ag/ITO Multilayer Transparent Electrode Depending on Metal Layer Thickness)

  • 민혜진;강예지나;손혜원;신소현;황민호;이현용
    • 한국전기전자재료학회논문지
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    • 제35권1호
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    • pp.37-43
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    • 2022
  • In this study, we investigated the optical, electrical and exothermic characteristics of ITO/Ag/ITO multilayer structures prepared with various Ag thicknesses on quartz and PI substrates. The transparent conducting properties of the ITO/Ag/ITO multilayer films depended on the thickness of the mid-layer metal film. The ITO/Ag (14 nm)/ITO showed the highest Haccke's figure of merit (FOM) of approximately 19.3×10-3 Ω-1. In addition, the exothermic property depended on the substrate. For an applied voltage of 3.7 V, the ITO/Ag (14 nm)/ITO multilayers on quartz and PI substrates were heated up to 110℃ and 200℃, respectively. The bending tests demonstrated a comparable flexibility of the ITO/Ag/IT multilayer to other transparent electrodes, indicating the potential of ITO/Ag/ITO multilayer as a flexible transparent conducting heater.