• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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• pp.366-369
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• 2002

At present, the study of direct digital X-ray detector and indirect digital X-ray detector proceed actively. But it needs high thickness and high voltage in selenium for high ionization rate. Therefore, we carried out the study of electric characteristics of a-Se with additive ratio of Iodine in drafting study for developing Hybrid X -ray Sensor for complementing direct digital X -ray detector and indirect digital X-ray detector in this paper. On this, there are formed Amorphous selenium multi-layers by sticking phosphor layer$(Gd_{2}O_{2}S(Eu^{2+}))$ using optical adhesives of EFIRON Co. Amorphous selenium multi-layers having dielectric layer(parylene) has characteristics of low dark-current, high X-ray sensitivity. So we can acquired a enhanced signal to noise ratio. We make Amorphous selenium multi-layers with $30{\mu}m$ thickness on glass.

• 한국환경복원기술학회지
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• 제7권3호
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• pp.35-47
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• 2004

In order to study changes in vegetation pursuant to rooftop revegetation plantation methods, plantation methods for rooftop revegetation were divided into two types through an analysis of recent trends. Then, Planted plants and invasive plants on sites where the planting methods were introduced were monitored. Planting methods were divided into mono-layer meadow cover type and multi-layer planting cover type. They showed some differences in terms of the availability of wetland, the structure of vegetation layers, the planted species, and the material of mulching. According to the results of monitoring the two sample sites for different plantation methods, the number of invasive plants was higher in multi-layer planting cover type and the ratio of naturalized plants was higher by 30% in average in mono-layer meadow cover type. The main reason for such a result is that the natural soil used in the multi-layer planting cover type likely contained some seeds. Moreover, it's harder for invasive plant seeds to germinate in volcanic rocks than in natural soil. Also, it is attributable to wetlands available in multi-layer planting cover type and diverse living environments created by multi-layer planting. The reason of the ratio of naturalized plants being higher by at least 10% in mono-layer meadow cover type is the character of naturalized plants being stronger in unfavorable conditions than nature plants are. Accordingly, the germination rate in the volcanic rock mulching has likely contributed in raising the introduction and germination of naturalized plants. The results showed that multi-layer planting cover type using wetland creation and nature soil can increase the number of invasive plants and lower the ratio of naturalized plants. However, since seeds contained in the natural soil can affect the growth of planted plants, this needs to be clarified, It was judged that mono-layer meadow cover type may affect more greatly on the germination and growth of invasive plants than on those of planted plants, Its potential adoption in highly urbanized areas was examined. By complementing with the mutual benefits of each plantation method, it appeared possible to shift to a rooftop revegetation system suitable to the site.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.473-476
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• 2003

This paper shows necessity of encapsulation layer to maximite flexibility of brittle indium-tin-oxide (ITO) on polymer substrates. And, Young's modulus (E) of encapsulation layer have an significant effect on external bending stress and the coefficient of thermal expansion (CTE) of that have a significant effect on internal thermal stress. To compare magnitude of total mechanical stress including both bending stress and thermal stress, the mechanical stress of triple-layer structure (substrate / ITO / encapsulation layer or substrate / buffer layer / ITO) can be quantified and numerically analyzed through the farthest cracked island position. As a result, it should be noted that multi-layer structures with more elastic encapsulation material have small mechanical stress compared to that of buffer and encapsulation structure of large Young's modulus material when they were externally bent.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.319-319
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• 2013

Even though the fabrication methods of metal oxide based thin film capacitor have been well established such as RF sputtering, Sol-gel, metal organic chemical vapor deposition (MOCVD), ion beam assisted deposition (IBAD) and pulsed laser deposition (PLD), an applicable capacitor of printed circuit board (PCB) has not realized yet by these methods. Barium Strontium Titanate (BST) and other high-k ceramic oxides are important materials used in integrated passive devices, multi-chip modules (MCM), high-density interconnect, and chip-scale packaging. Thin film multi-layer technology is strongly demanded for having high capacitance (120 nF/$mm^2$). In this study, we suggest novel multi-layer thin film capacitor design and fabrication technology utilized by plasma assisted deposition and photolithography processes. Ba0.6Sr0.4TiO3 (BST) was used for the dielectric material since it has high dielectric constant and low dielectric loss. 5-layered BST and Pt thin films with multi-layer sandwich structures were formed on Pt/Ti/$SiO_2$/Si substrate by RF-magnetron sputtering and DC-sputtering. Pt electrodes and BST layers were patterned to reveal internal electrodes by photolithography. SiO2 passivation layer was deposited by plasma-enhanced chemical vapor deposition (PE-CVD). The passivation layer plays an important role to prevent short connection between the electrodes. It was patterned to create holes for the connection between internal electrodes and external electrodes by reactive-ion etching (RIE). External contact pads were formed by Pt electrodes. The microstructure and dielectric characteristics of the capacitors were investigated by scanning electron microscopy (SEM) and impedance analyzer, respectively. In conclusion, the 0402 sized thin film multi-layer capacitors have been demonstrated, which have capacitance of 10 nF. They are expected to be used for decoupling purpose and have been fabricated with high yield.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2009년도 춘계학술대회 논문집
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• pp.929-930
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• 2009

• 한국세라믹학회지
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• 제56권1호
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• pp.98-103
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• 2019

Optical filters to control light wavelength of displays or cameras are fabricated by multi-layer stacking process of low and high index thin films. The process of multi-layer stacking of thin films has received much attention as an optimal process for effective manufacturing in the optical filter industry. However, multi-layer processing has disadvantages of complicated thin film process, and difficulty of precise control of film morphology and material selection, all of which are critical for transmittance and coloring effect on filters. In this study, the composite $TiO_2$, which can be used to control of UV absorption, coated on nano hollow silica sol, was synthesized as a coating material for optical filters. Furthermore, systematic analysis of the process parameters during the chemical reaction, and of the structural properties of the coating solutions was performed using SEM, TEM, XRD and photo spectrometry. From the structural analysis, we found that the 85 nm nano hollow silica with 2.5 nm $TiO_2$ shell formation was successfully synthesized at proper pH control and titanium butoxide content. Photo luminescence characteristics, excited by UV irradiation, show that stable absorption of 350 nm-light, correlated with a 3.54 eV band gap, existed for the $TiO_2$ shell-nano hollow silica reacted with 8.8 mole titanium butoxide solution. Transmittance observed on substrate of the $TiO_2$ shell-nano hollow silica showed effective absorption of 200-300 nm UV light without deterioration of visible light transparency.

• E2M - 전기 전자와 첨단 소재
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• 제7권2호
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• pp.145-151
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• 1994

The multi-dielectric layer SiOz/Si3N4/SiO2(ONO) is used to scale down the memory device. In this paper, the change of composition in ONO layer due to the process condition and the conduction mechanism are observed. The composition of the oxide film grown through the oxidation of nitride film is analyzed using auger electron spectroscopy(AES). AES results show that oxygen concentration increases at the interface between oxide and nitride layers as the thickness -of the top oxide layer increases. Results of I-V measurement show that the insulating properties improve as the thickness of the top oxide layer increases. But when the thickness of the nitride layer decreases below 63.angs, insulating peoperties of film 28.angs. of top oxide and film 35.angs. turn over showing that insulating property of film 28.angs. of top oxide is better than that of film 35.angs. of top oxide. This phenomenon of turn over is thought as the result of generation of surface state due to oxygen flow into nitride during oxidation process. As the thickness of the top oxide and nitride increases, the electrical breakdown field increases, but when the thickness of top oxide reaches 35.angs, the same phenomenon of turn over occurs. Optimum film thickness for scaled multi-layer dielectric of memory device SONOS is estimated to be 63.angs. of nitride layer and 28.angs. of top oxide layer. In this case, maximum electrical breakdown field and leakage current are 18.5[MV/cm] and $8{\times}{10^-12}$[A], respectively.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.206-206
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• 2011

투명 전도성 산화물 (TCO, Transparent Conductive Oxide) 박막을 태양전지에 적용하기 위해서는 우수한 전기 전도성 및 가시광 영역에서 높은 투과율을 가져야 한다. 대표적인 TCO 물질인 ITO (Indium tin oxide) 박막은 우수한 전기적, 광학적 특성을 가지고 있지만 $400^{\circ}C$ 이상의 고온에서는 전기저항이 급격히 증가하게 되어 실제 태양전지 패널에 적용했을 때 전기적 특성이 저하된다. 따라서 태양전지용 TCO 박막을 개발 시, 뛰어난 고온 안정성이 요구되고 있다. 본 연구에서는 고온 안정적 특성을 지니는 Ga3+를 도핑한 ZnO 계열 TCO인 GZO/ITO multi-layered 박막을 증착하였다. 또한 buffer layer의 두께 변화 및 구조 제어를 통한 최위층 박막의 전기적 특성 및 결정성을 조사하였으며 다층 박막의 계면 간 특성 및 굴절률 제어를 통한 광학적 물성을 연구하였다.

• 한국전산구조공학회:학술대회논문집
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• 한국전산구조공학회 2007년도 정기 학술대회 논문집
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• pp.309-314
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• 2007

Optimal layer sequencing of a multi-layered acoustical foam is solved to maximize its sound transmission loss. A foam consisting of air and poroelastic layers can be optimized when a limited amount of a poroelastic material is allowed. By formulating the sound transmission loss maximization problem as a one dimensional topology optimization problem, optimal layer sequencing and thickness were systematically found for several frequencies. For optimization, the transmission losses of air and poroelastic layers were calculated by the transfer matrix derived from Biot's theory. By interpolating five intrinsic parameters among several poroelastic material parameters, dear air-poroelastic layer distributions were obtained; no filtering or post-processing was necessary. The optimized foam layouts by the proposed method were shown to differ depending on the frequency of interest.

• 한국소음진동공학회논문집
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• 제21권1호
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• pp.9-17
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• 2011

In this paper, the general equation of motion of damped sandwich beam with multi-viscoelastic material layer was derived based on the equation presented by Mead and Markus. The viscoelastic layer, which has characteristics of complex shear modulus, was assumed to be dominantly under shear deformation. The equation of motion of n-layered damped sandwich beam in bending could be represented by (n+3)th order ordinary differential equation. Finite element model for the n-layered damped sandwich beam was formulated and programmed using higher order shape functions. Several numerical examples were implemented to show the effects of damped material.