• 제목/요약/키워드: motion property

검색결과 306건 처리시간 0.032초

CMP 공정에서 연마패드 경도에 따른 연마 특성 변화 분자동력학 연구 (Molecular Dynamics Study on Property Change of CMP Process by Pad Hardness)

  • 권오근;최태호;이준하
    • 반도체디스플레이기술학회지
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    • 제12권1호
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    • pp.61-65
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    • 2013
  • We investigated the wearable dynamics of diamond spherical abrasive during the substrate surface polishing under the pad compression via classical molecular dynamics modeling. We performed three-dimensional molecular dynamics simulations using the Morse potential functions for the copper substrate and the Tersoff potential function for the diamond abrasive. The pad hardness had a big impact on the wearable dynamics of the abrasive. The moving speed of the abrasive decreased with increasing hardness of the pad. As the hardness decreased, the abrasive was indented into the pad and then the sliding motion of the abrasive was increased. So the pad hardness was greatly influenced on the slide-to-roll ratio as well as the wearable rate.

Modified Rodrigues Parameter 기반의 인공위성 관성모멘트 추정 연구 (Spacecraft Moment of Inertial Estimation by Modified Rodrigues Parameters)

  • 방효충
    • 한국항공우주학회지
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    • 제38권3호
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    • pp.243-248
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    • 2010
  • 본 연구에서는 인공위성의 관성 모멘트 추정을 위해 MRP(Modified Rodrigues Parameter) 자세 변수기반의 추정기를 설계하였다. MRP는 인공위성 자세 결정시 쿼터니 언(Quaternion) 파라미터의 구속 조건으로부터 발생하는 필터의 오차 공분산 행렬의 특이(Singularity) 현상을 피할 수 있는 장점이 있다. 한편 MRP의 경우 자세각 변위가 클 경우에 역시 특이현상이 발생할 수 있어 이를 피하기 위해 적절한 자세각 범위에서 인위적인 기준 운동을 생성하여 필터 설계에 적용하였다. 쿼터니언 파라미터의 단점을 극복하여 보다 안정된 오차 공분산 갱신 결과의 필터의 개선된 성능을 예상할 수 있다.

Nonlinear Friction Compensator Design for Mechatronics Servo Systems Using Neural Network

  • Chung, Dae-won;Nobuhiro Kyra;Hiromu Gotanda
    • Transactions on Control, Automation and Systems Engineering
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    • 제3권2호
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    • pp.111-116
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    • 2001
  • A neural network compensator for stick-slip friction phenomena in meashartonics servo systems is practically proposed to supplement the traditionally available position and velocity control loops for precise motion control. The neural network compensa-tor plays the role of canceling the effect of nonlinear slipping friction force. It works robustly and effectively in a real control system. This enables the mechatronics servo systems to provide more precise control in the digital computer. It was confirmed that the con-trol accuracy is improved near zero velocity and points of changing the moving direction through numerical simulation. However, asymptotic property on the steady state error of the normal operation points is guaranteed by the integral term of traditional velocity loop controller.

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Optimal Switching Parameter Control of Semi-Active Engine Mount

  • Truong, Thanh Quoc;Ahn, Young-Kong;Ahn, Kyoung-Kwan
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2005년도 ICCAS
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    • pp.1-4
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    • 2005
  • This paper describes work on isolation of vibration related engine by a hydraulic engine mount with controllable area of inertia track. Automotive engine mounts are required to constrain motion of engine shake resulting from low-frequency road input of shock excitation and also to isolate noise and vibration generated by the engine with unbalanced disturbance at the high frequency range. The property of the mount depends on vibration amplitude and excitation frequency, which means that the excitation amplitude is large in low excitation frequency range and small in high frequency range. In this paper, theoretical works with model of the mount to reduce vibrations related engine were conducted. The volumetric stiffness of the mount is greatly changed according to the switching the area of the inertia track. Therefore, when the area of the inertia track is tuned, the transmissibility of the mount is effectively reduced.

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플랙탈 이론을 활용한 콘관입시험 결과의 새로운 보간법 개발 (Development of Alternative Interpolation method of CPT Data using Fractal Theory)

  • 유찬;정성모;정경식
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2006년도 춘계 학술발표회 논문집
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    • pp.179-188
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    • 2006
  • In this study, R/S analysis which was proposed by Mandelbrot & Wallis(1969) was applied to evaluate the presence of the fractal property in the cone tip resistance of in-situ CPT data. Hurst exponents(H) were evaluated in the range of $0.660\sim0.990$ and the average was 0.875. It was confirmed that a cone tip resistance data had the characteristic of fractals and it was expected that cone tip resistance data sets are well approximated by a fBm process with an Hurst exponent near 0.875. It was also observed that the boundary between layers were obviously identified as a result of R/S analysis and it will be usage in practices.

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Flexure hinge mechanism having amplified rectilinear motion for confocal scanning microscopy using optical section

  • Kwon, Oh-Kyu;Park, Poo-Gyeon
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 2001년도 ICCAS
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    • pp.162.6-162
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    • 2001
  • Confocal scanning microscopy (CSM) is an important instrument in a wide variety of imaging applications because of its ability to provide three-dimensional images of thick, volume specimens. The mechanism for two-dimensional beam scanning and optical sectioning has an important roe in CSM as the three-dimensional profiler. This optical sectioning property arises from the use of a point detector, which serves to attenuate the signals from out-of-focus. The intensity profile for the open loop scanning should be matched with its response for the standard. The non-linearity can be minimized with the optical sectioning or the optical probe of the closed loop control. This paper shows the mathematical expression of the light such as the extinction curve in the optical fields of system using AO deflector, the axial/lateral response experimentally when the error sources change, and the methods of optical sectioning. Thorough design of optical sectioner is crucial to the success of CSM in the field ...

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초정밀 위치 제어를 위한 이중 서보 시스템의 보상기 설계 (Designing Compensators of Dual Servo System For High Precision Positioning)

  • 최현석;송치우;한창수;최태훈;이낙규;나경환
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 춘계학술대회
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    • pp.1309-1314
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    • 2003
  • The high precision positioning mechanism is used in various industrial fields. It is used in semiconductor manufacturing line, test instrument, Bioengineering, and MEMS and so on. This paper presents a positioning mechanism with dual servo system. Dual servo system consists of a coarse stage and a fine motion stage. The course stage is driven by VCM and the actuator of fine stage is the PZT. The purposes of dual servo system are stability, higher bandwidth, and robustness. Lead compensator is applied to this control system, and is designed by PQ method. Designed compensator can improve property of positioning mechanism.

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곤충비행에서 추력발생에 관한 2차원 유동장 특성 - 와류정체 및 와류 짝 현상 (TWO-DIMENSIONAL FLOW PROPERTIES OF INSECT FLIGHT ABOUT THRUST GENERATION - VORTEX STAYING AND VORTEX PAIRING PHENOMENA)

  • 이정상;김진호;김종암
    • 한국전산유체공학회:학술대회논문집
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    • 한국전산유체공학회 2006년도 추계 학술대회논문집
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    • pp.126-129
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    • 2006
  • Many researchers have made an effort to explain flight mechanism of flapping insects. As a result, several unsteady mechanisms about lift generation in insect flight have been proposed. But it has a limits to elucidate insect's forward flight and abrupt thrust, because most of these are about insect's hovering flight. For this reason, the objective of this paper is to simulate "Figure-of-eight motion" of insect's wing during tethered flight for comprehending aerodynamic property in insect's forward flight.

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동적 마찰 모델을 이용한 마찰계의 제어에 관한 연구

  • 임상?;오준호
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1997년도 춘계학술대회 논문집
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    • pp.208.2-212
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    • 1997
  • In a model based friction comensation for a frictional system,the performance of the system is inflenceed by the selection of the friction model. Especially, when a real plant have dynamic friction characteritics, the compensation of friction with a static friction model may deteriorate the perfomance. For the system we constlucted an adaptiv parameter estimation and friction compensation with a newly introduced dynamic friction model proposed by Canudas et.[1]. The model depicts varios frictional phenomena,such as Stibeck effect,frictional memory, Stick-slip motion. Parmeter identification algorithm are followed conventional RLSM adaptive rule. The stability for the closed system was proved by the Lyapunov stability. The result say that if a real system have dynamic friction property,the friction compensation with the dynamic friction model will improve the perfomance moreover static friction model based compensation may lead to the system unstable.

Vibration Analysis of the Active Multi-Layer Beams by Using Spectrally Formulated Exact Natural Modes

  • Lee, Usik;Kim, Joohong;Andrew Y. T. Leung
    • Journal of Mechanical Science and Technology
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    • 제15권2호
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    • pp.199-209
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    • 2001
  • Modal analysis method (MAM) is introduced for the fully coupled structural dynamic problems. In this paper, the beam with active constrained layered damping (ACLD) treatment is considered as a representative problem. The ACLD beam consists of a viscoelastic layer that is sandwiched between the base beam structure and an active piezoelectric layer. The exact damped natural modes are spectrally formulated from a set of fully coupled dynamic equations of motion. The orthogonality property of the exact damped natural modes is then derived in a closed form to complete the modal analysis method. The accuracy of the present MAM is evaluated through some illustrative examples: the dynamic characteristics obtained by the present MAM are compared with the results by spectral element method (SEM) and finite element method (FEM). It is numerically proved that MAM solutions become identical to the accurate SEM solutions as the number of exact natural used in MAM is increased.

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