• Proceedings of the KSME Conference
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• 2007.05a
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• pp.455-460
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• 2007

A self-sensing circuit for piezo inkjet has been designed in order to monitor the operating condition during printing. In order to verify the circuit, both ink droplet images from strobe LED and vibration signals from the laser vibrometer were measured and compared with self-sensing signal. Experimental results show that self-sensing signal was effective in detecting the pressure wave change due to the bubble trapped in inkjet printhead.

• Journal of the Semiconductor & Display Technology
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• v.22 no.1
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• pp.1-5
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• 2023

Most of the production process is performed in a cleanroom in the case of facilities that produce semiconductor chips or display panels. Therefore, environmental management of cleanrooms is very important for product yield and quality control. Among them, airborne particles are a representative management item enough to be the standard for the actual cleanroom rating, and it is a part of the Fab or Facility monitoring system, and the sequential particle monitoring system is mainly used. However, this method has a problem in that measurement efficiency decreases as the length of the sampling tube increases. In addition, a statistically significant test of deterioration in efficiency has rarely been performed. Therefore, in this study, the statistically significant test between the number of particles measured by InSitu and the number of particles measured for each sampling tube ends(Remote). Through this, the efficiency degradation problem of the sequential particle monitoring system was confirmed by a statistical method.

• The Korean Journal of Applied Statistics
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• v.20 no.3
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• pp.597-604
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• 2007

There are many uses of control charts in health-care monitoring and in public-health surveillance. For example, control charts are used in monitoring and improvement of hospital performance, in monitoring chronic diseases and infectious diseases, and so on. We introduce the Variable Life-Adjusted Display (VLAD) chart and propose the method for choosing control limits of the VLAD chart to give specified in-control properties.

• Journal of the Semiconductor & Display Technology
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• v.2 no.3
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• pp.13-18
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• 2003

A remote monitoring system of the semiconductor equipment is used to monitor or control operations of the equipment. Most of the conventional monitoring systems are based on the client-server model with the general purpose PC. Basically, it implies the difficulties in the system reliability and cost down due to its size and complexity. To overcome these difficulties, we suggest an embedded web server which is based on the low-cost microprocessor. It is designed for the monitoring or controlling a dedicated equipment only. To evaluate the feasibility of the suggested embedded web server, we have implemented a test-board with ATMega103 and programmed the basic modules using the AVR-GCC. Finally, we have tested its operations on the MS Explorer 6.0 environment.

• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.73-78
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• 2013

This paper proposes a portable electrocardiograph and smart device-based heart health monitoring and risk notification system. The proposed system consists of a portable electrocardiograph and a smart device for a system user, and a web-based monitoring system for observers. This system can improve the convenience and efficiency of measurement by using a light-weight portable electrocardiograph and a smart device. In addition, any authorized person such as caregiver or family member who is not related to medical institution can monitor users'heart health in real-time using the web-based monitoring system. Therefore, a user and authorized remote observers can efficiently monitor and manage user's heart health in daily-life even without any medical institution's help, and can preemptively deal with any possible dangerous situations, such as degeneration of a cardiac disorder and sudden cardiac death.

• Journal of the Semiconductor & Display Technology
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• v.11 no.3
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• pp.45-50
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• 2012

In this paper, we propose a real-time ECG monitoring system for personal health records. This study aims to provide services that help patients to monitor their own physical condition and manage their own health records consistently, whereas existing medical services are Medical Institute-Centric model. The system is composed of web server, smart phone, and ECG meter, and web page. Without time and space restraints, It provides us with managing personal health records by performing patient's ECG measurement and real-time monitoring. And also Real-time bidirectional communication between smart phone and web page can be performed rapidly by applying the ECG monitoring with WebSocket Technology that follows HTML5 standard. Through this system, It can handle patient in need immediately.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.129-133
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• 2019

In this paper, we developed a system to monitor the storage capacity of suction-type device such as vacuum cleaner or crop harvesters. The monitoring system consists of load cells and a differential pressure sensor which simultaneously monitor the weight and volume of the stock. Since weighing objects stored in storage containers alone cannot fully monitor the level of filling, more accurate monitoring can be achieved by monitoring volume and fusion with weight information. The volume was monitored using a phenomenon in which the flow rate of the inhaled air varies depending on the volume of the object filled in the storage container. In this paper, we developed a system to monitor the storage in three stages: low, medium and high.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.27-31
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• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• Journal of IKEEE
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• v.21 no.2
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• pp.158-161
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• 2017

In this paper, we propose Total RMS(Radiation Monitoring System) for nuclear and nuclear medicine. The proposed system can expand and control Stack Monitor, Area Monitor, and Water(Liquid) Monitor into one system, and can monitor the signals measured by each radiation detector in an integrated manner. The proposed system consists of a sensor module that detects the radiation, a display unit that displays the radiation dose near the radiation detection location, an alarm unit that reports the alarm when the detected radiation dose reaches the danger level, A Main Hub for collecting and storing the contents to the remote monitoring system, and an RMS Monitoring Unit for clearly displaying the measured radiation dose at the remote site. In order to evaluate the performance of Total RMS for the proposed nuclear and nuclear medicine field, it is confirmed that the measurement uncertainty is less than 8.5% and it operates normally within ${\pm}15%$ of the international standard.

• Journal of the Semiconductor & Display Technology
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• v.18 no.4
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• pp.81-86
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• 2019

According to the needs of many users, motor pumps have been steadily developed and widely used in many industries where fluids are used. Motor pumps are used in a variety of environments, degrading quality and performance. It is becoming important to monitor the condition of motor pumps in order to maintain system performance and increase efficiency. This paper presents the method for effectively monitoring the condition of motor pumps. The designed MMI controller receives the collected data through data logging and output and controls the motor pump with touch screen. Implementing a Wi-Fi monitoring system and SCADA monitoring system based on Ethernet and RS485, user can monitor even if the user is far from the MMI controller without time and space limitation. In addition, by implementing a voice output system, the user can immediately recognize the situation through the sound. Therefore, through the proposed method, multi-monitoring system solves the cause of breakdowns and degradation of motor-pump and gives the possibility of commercialization by providing the convenience of maintenance to users.