• Title/Summary/Keyword: modified $A^2/O$ process

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Dry Etching Characteristics of TiN Thin Films in BCl3/He Inductively Coupled Plasma (BCl3/He 유도결합 플라즈마를 이용한 TiN 박막의 식각 특성)

  • Joo, Young-Hee;Woo, Jong-Chang;Kim, Chang-Il
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.25 no.9
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    • pp.681-685
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    • 2012
  • We investigated the dry etching characteristics of TiN in $TiN/Al_2O_3$ gate stack using a inductively coupled plasma system. TiN thin film is etched by BCl3/He plasma. The etching parameters are the gas mixing ratio, the RF power, the DC-bias voltages and process pressures. The highest etch rate is in $BCl_3/He$ (25%:75%) plasma. The selectivity of TiN thin film to $Al_2O_3$ is pretty similar with $BCl_3/He$ plasma. The chemical reactions of the etched TiN thin films are investigated by X-ray photoelectron spectroscopy. The intensities of the Ti 2p and the N 1s peaks are modified by $BCl_3$ plasma. Intensity and binding energy of Ti and N could be changed due to a chemical reaction on the surface of TiN thin films. Also we investigated that the non-volatile byproducts such as $TiCl_x$ formed by chemical reaction with Cl radicals on the surface of TiN thin films.

The Phenomenon of the Slag Foaming and the Result of using Various Slag Deforming Agents in the Steelmaking Converter (제강(製鋼) 전로(轉爐) 정연시(精鍊時) 슬래그 폼(Slag Foam)발생(發生) 현상(現像) 및 진정제(鎭靜劑) 종류(種類)에 따른 사용효과(使用效果))

  • Chun, Sang-Ho;Song, Choong-Ok;Ban, Bong-Chan
    • Resources Recycling
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    • v.15 no.2 s.70
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    • pp.18-23
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    • 2006
  • Foaming of slag is a thermodynamically unstable phenomenon and has significant effects in iron and steelmaking processes. For better recycling method of pulp sludge, the application as an defoaming agent during steelmaking process was adopted and tested. The forming machine has been modified in order to produce the briquettes, which are made of pulp sludge and slag with different weight ratio. Influencing factors on the foaming phenomena have been studied and tested for better understanding of foaming phenomena. Experiments were carried out with $CaO-FeO-SiO_2$ based slags with Ar gas injection and addition of coke particles. The slag basicity and (%FeO) contents adapted as major factors to treasure foaming tendency of the slag system. It was found that foam index (${\Sigma}$) gradually decreased as both the basicity and the (FeO) content increase. Four kinds of antifoaming agent such as aluminium dross, cokes, rice bran and pulp sludge with steelmaking slag have been tested in actual process. Aluminium dross was the most effective, and pulp sludge with steelmaking slag also showed the desired results.

A Numerical Study of Smoke Movement with Radiation in Atrium Fires (아트리움에서 화재 발생시 복사가 고려된 연기거동에 대한 수치해석 연구)

  • 정진용;유홍선;홍기배
    • Fire Science and Engineering
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    • v.15 no.1
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    • pp.7-15
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    • 2001
  • This paper describes the smoke filling process of a fire field model based on a self-developed SMEP (Smoke Movement Estimating Program) codo to the simulation of fire induced flows in the atrium space (SIVANS atrium at Japan) containing smoke radiation effect. The SMEP using PISO algorithm solves conservation equations for mass, momentum, energy and species, together with those for the modified k-$\varepsilon$ turbulence model with buoyancy term. Also it solves the radiation equation using the discrete ordinates method. The result of the calculated smoke temperature containing radiation effect has shown a better prediction than the result calculated by only convection effect in comparison with the experimental data. This seems to come from the radiation effect of $H_2$O and $CO_2$ gas under smoke productions. Thus, the consideration of the radiation effect under smoke in fire should be necessary in order to get more realistic result. Also the numerical results indicated that the smoke layer is developing at a rate of about 0.1 m/s. It would take about 450 seconds after starting the ultra fast fire of 560 kW that the smoke layer move down to 1.5m above the escape level.

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Surface Modification of Alumina Ceramic with Mg2Al4Si5O18 Glass by a Sol-Gel Process (졸-겔 공정으로 합성된 코디어라이트를 이용하여 알루미나의 표면개질)

  • Choi, Pil-Gyu;Chu, Min Cheol;Bae, Dong-Sik
    • Korean Journal of Materials Research
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    • v.24 no.1
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    • pp.48-52
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    • 2014
  • The Mg-enriched magnesium aluminum silicate (MAS) glass is known for its higher mechanical strength and chemical resistance. Among such glasses, cordierite ($Mg_2Al_4Si_5O_{18}$) is well known to have a low thermal expansion and low melting point. Polycrystalline engineering ceramics such as alumina can be strengthened by a surface modification with low thermal expansion materials. The present study involves the synthesis of cordierite by a sol-gel process and investigates the effect of glass penetration on the surface of alumina. The cordierite powders were prepared from $Al(OC_3H_7)_3$, $Mg(OC_2H_5)_2$ and tetraethyl orthosilicate by hydrolysis and condensation reaction. The cordierite powders were characterized by X-ray diffraction (XRD, Rigaku), scanning electron microscope (SEM, JEOL: JSM-5610), energy dispersive spectroscopy (EDS, JEOL: JSM-5610), and universal testing machine (UTM, INSTRON). The X-ray diffraction patterns showed that the synthesized particles were ${\mu}$-cordierite calcined at $1100^{\circ}C$ for 1 h. The shape of synthesized cordierite was changed from ${\mu}$-cordierite to ${\alpha}$-cordierite with increasing calcination temperature. Synthesized cordierite was used for surface modification of alumina. Cordierite powders penetrated deeply into the alumina sample along grain boundaries with increasing temperature. The results of surface modification tests showed that the strength of the prepared alumina sample increased after surface modification. The strength of a surface modified with synthesized cordierite increased the most, to about 134.6MPa.

A Study of Improvement on Collaboration Treatment Method of Electroplating Wastewater (도금폐수의 공동처리를 위한 공정개선에 관한 연구)

  • 이내우;최재욱;안병환
    • Journal of the Korean Society of Safety
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    • v.12 no.4
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    • pp.93-101
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    • 1997
  • A modified procedure for electroplating wastewater treatment using formaldehyde and hydrogen peroxide can destroy free cyanide. The representative diagram which is quite sensitive on reaction temperature is showed for this kinds of treatment. Principally free cyanide and some kinds of cyanide complex should be treated first, and then toxic heavy metals can be removed because cyanide component will be inhibited to remove other pollutants, if it is not destroyed perfectly. Formaldehyde and hydrogen peroxide are added in controlled amounts to cyanide treatment tank. Reasonable amounts of these chemicals are (HCHO/CN)=0.9 and ($H_2O_2/CN$)=1.1 in molar ratios, it is also variable on reaction temperature. Of course, actual treatment processes depending on plating material and chemical are good applicable, also to systematize operation manual for treating electroplating wastewater process, further works are desirable.

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Impact of Solution-Processed BCP Buffer Layer on Efficient Perovskite Solar Cells (페로브스카이트 태양전지에서의 저온 용액 공정의 BCP 버퍼층 효과)

  • Jung, Minsu;Choi, In Woo;Kim, Dong Suk
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.34 no.1
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    • pp.73-77
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    • 2021
  • Inorganic-organic hybrid perovskite solar cells have demonstrated considerable improvements, reaching 25.5% of certified power conversion efficiency in 2020 from 3.8% in 2009. In normal structured perovskite solar cells, TiO2 electron-transporting materials require heat treatment process at a high temperature over 450℃ to induce crystallinity. Inverted perovskite solar cells have also been studied to exclude the additional thermal process by using [6,6]-phenyl-C61-butyric acid methyl ester (PCBM) as a non-oxide electron-transporting layer. However, the drawback of the PCBM layer is a charge accumulation at the interface between PCBM and a metal electrode. The impact of bathocuproin (BCP) buffer layer on photovoltaic performance has been investigated herein to solve the problem of PCBM. 2-mM BCP-modified perovskite solar cells were observed to exhibit a maximum efficiency of 12.03% compared with BCP-free counterparts (5.82%) due to the suppression of the charge accumulation at the PCBM-Au interface and the resulting reduction of the charge recombination between perovskite and the PCBM layer.

Evaluation of Environmental and Economic Impacts of Advanced Wastewater Treatment Plants with Life Cycle Assessment (고도 하수처리장의 전과정평가에 따른 환경성 및 경제성 평가)

  • Pyo, SeHee;Kim, MinJeong;Lee, SeungChul;Yoo, ChangKyoo
    • Korean Chemical Engineering Research
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    • v.52 no.4
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    • pp.503-515
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    • 2014
  • A lot of existing wastewater treatment plants (WWTPs) are rebuilt or retrofitted for advanced wastewater treatment processes to cope with reinforced effluent criteria of nitrogen and phosphorous. Moreover, how to treat the wasted sludge from WWTPs has been also issued since the discharge of the wasted sludge into ocean is impossible from 2011 due to the London Convention 97 protocol. These trend changes of WWTPs get a motivation to assess environmental and economic impacts from the construction stage to the waste stage in WWTPs. Therefore, this study focuses on evaluation of environmental and economic impacts of the advanced wastewater treatment processes and waste sludge treatment process by using life cycle assessment. Four advanced wastewater treatment processes of Anaerobic/Anoxic/Oxic ($A_2O$), 5 stages-Bamard Denitrification Phosphate (Bardenpho), Virginia Initiative Plant (VIP), and Modified University of Cape Town (MUCT) are chosen to compare the conventional activated sludge (CAS) and three waste sludge treatment methods of land fill, incineration, and composting are used. To evaluate environmental and economic impacts of each advanced wastewater treatment processes, life cycle assessment (LCA) and life cycle cost (LCC) are conducted based on International organization for standardization (ISO) guidelines. The results clearly represent that the $A_2O$ process with composting shows 52% reduction in the environmental impact than the CAS process with landfill. On the other hand, the MUCT process with composting is able to save 62% of the life cycle cost comparing with the CAS process with landfill. This result suggested the qualitative and quantitative criteria for evaluating eco-environmental and economic technologies of advanced treatment processes and also sludge treatment method, where their main influence factors on environmental and economic impacts are analyzed, respectively. The proposed method could be useful for selecting the most efficient and eco-friendly wastewater treatment process and sludge treatment method when retrofitting the existing WWTPs to advanced treatments.

Modelling and packed bed column studies on adsorptive removal of phosphate from aqueous solutions by a mixture of ground burnt patties and red soil

  • Rout, Prangya R.;Dash, Rajesh R.;Bhunia, Puspendu
    • Advances in environmental research
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    • v.3 no.3
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    • pp.231-251
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    • 2014
  • The present study examines the phosphate adsorption potential and behavior of mixture of Ground Burnt Patties (GBP), a solid waste generated from cooking fuel used in earthen stoves and Red Soil (RS), a natural substance in fixed bed column mode operation. The characterization of adsorbent was done by Proton Induced X-ray Emission (PIXE), and Proton Induced ${\gamma}$-ray Emission (PIGE) methods. The FTIR spectroscopy of spent adsorbent reveals the presence of absorbance peak at $1127cm^{-1}$ which appears due to P = O stretching, thus confirming phosphate adsorption. The effects of bed height (10, 15 and 20 cm), flow rate (2.5, 5 and 7.5 mL/min) and initial phosphate concentration (5 and 15 mg/L) on breakthrough curves were explored. Both the breakthrough and exhaustion time increased with increase in bed depth, decrease in flow rate and influent concentration. Thomas model, Yoon-Nelson model and Modified Dose Response model were used to fit the column adsorption data using nonlinear regression analysis while Bed Depth Service Time model followed linear regression analysis under different experimental condition to evaluate model parameters that are useful in scale up of the process. The values of correlation coefficient ($R^2$) and the Sum of Square Error (SSE) revealed the Modified Dose Response model as the best fitted model to the experimental data. The adsorbent mixture responded effectively to the desorption and reusability experiment. The results of this finding advocated that mixture of GBP and RS can be used as a low cost, highly efficient adsorbent for phosphate removal from aqueous solution.

keV and MeV Ion Beam Modification of Polyimide Films

  • Lee, Yeonhee;Seunghee Han;Song, Jong-Han;Hyuneui Lim;Moojin Suh
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.170-170
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    • 2000
  • Synthetic polymers such as polyimide, polycarbonate, and poly(methyl methacrylate) are long chain molecules which consist of carbon, hydrogen, and heteroatom linked together chemically. Recently, polymer surface can be modified by using a high energy ion beam process. High energy ions are introduced into polymer structure with high velocity and provide a high degree of chemical bonding between molecular chains. In high energy beam process the modified polymers have the highly crosslinked three-dimensionally connected rigid network structure and they showed significant improvements in electrical conductivity, in hardness and in resistance to wear and chemicals. Polyimide films (Kapton, types HN) with thickness of 50~100${\mu}{\textrm}{m}$ were used for investigations. They were treated with two different surface modification techniques: Plasma Source Ion Implantation (PSII) and conventional Ion Implantation. Polyimide films were implanted with different ion species such as Ar+, N+, C+, He+, and O+ with dose from 1 x 1015 to 1 x 1017 ions/cm2. Ion energy was varied from 10keV to 60keV for PSII experiment. Polyimide samples were also implanted with 1 MeV hydrogen, oxygen, nitrogen ions with a dose of 1x1015ions/cm2. This work provides the possibility for inducing conductivity in polyimide films by ion beam bombardment in the keloelectronvolt to megaelectronvolt energy range. The electrical properties of implanted polyimide were determined by four-point probe measurement. Depending on ion energy, doses, and ion type, the surface resistivity of the film is reduced by several orders of magnitude. Ion bombarded layers were characterized by Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS), XPS, and SEM.

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Effects of incorporation of 2.5 and 5 wt% TiO2 nanotubes on fracture toughness, flexural strength, and microhardness of denture base poly methyl methacrylate (PMMA)

  • Naji, Sahar Abdulrazzaq;Behroozibakhsh, Marjan;Kashi, Tahereh Sadat Jafarzadeh;Eslami, Hossein;Masaeli, Reza;Mahgoli, Hosseinali;Tahriri, Mohammadreza;Lahiji, Mehrsima Ghavvami;Rakhshan, Vahid
    • The Journal of Advanced Prosthodontics
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    • v.10 no.2
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    • pp.113-121
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    • 2018
  • PURPOSE. The aim of this preliminary study was to investigate, for the first time, the effects of addition of titania nanotubes ($n-TiO_2$) to poly methyl methacrylate (PMMA) on mechanical properties of PMMA denture base. MATERIALS AND METHODS. $TiO_2$ nanotubes were prepared using alkaline hydrothermal process. Obtained nanotubes were assessed using FESEM-EDX, XRD, and FT-IR. For 3 experiments of this study (fracture toughness, three-point bending flexural strength, and Vickers microhardness), 135 specimens were prepared according to ISO 20795-1:2013 (n of each experiment=45). For each experiment, PMMA was mixed with 0% (control), 2.5 wt%, and 5 wt% nanotubes. From each $TiO_2$:PMMA ratio, 15 specimens were fabricated for each experiment. Effects of $n-TiO_2$ addition on 3 mechanical properties were assessed using Pearson, ANOVA, and Tukey tests. RESULTS. SEM images of $n-TiO_2$ exhibited the presence of elongated tubular structures. The XRD pattern of synthesized $n-TiO_2$ represented the anatase crystal phase of $TiO_2$. Moderate to very strong significant positive correlations were observed between the concentration of $n-TiO_2$ and each of the 3 physicomechanical properties of PMMA (Pearson's P value ${\leq}.001$, correlation coefficient ranging between 0.5 and 0.9). Flexural strength and hardness values of specimens modified with both 2.5 and 5 wt% $n-TiO_2$ were significantly higher than those of control ($P{\leq}.001$). Fracture toughness of samples reinforced with 5 wt% $n-TiO_2$ (but not those of 2.5% $n-TiO_2$) was higher than control (P=.002). CONCLUSION. Titania nanotubes were successfully introduced for the first time as a means of enhancing the hardness, flexural strength, and fracture toughness of denture base PMMA.