• Title/Summary/Keyword: microwave probe

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High frequency measurement and characterization of ACF flip chip interconnects

  • 권운성;임명진;백경욱
    • 한국마이크로전자및패키징학회:학술대회논문집
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    • 한국마이크로전자및패키징학회 2001년도 추계 기술심포지움
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    • pp.146-150
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    • 2001
  • Microwave model and high-frequency measurement of the ACF flip-chip interconnection was investigated using a microwave network analysis. S-parameters of on-chip and substrate were separately measured in the frequency range of 200 MHz to 20 GHz using a microwave network analyzer HP8510 and cascade probe. And the cascade transmission matrix conversion was performed. The same measurements and conversion techniques were conducted on the assembled test chip and substrate at the same frequency range. Then impedance values in ACF flip-chip interconnection were extracted from cascade transmission matrix. ACF flip chip interconnection has only below 0.1nH, and very stable up to 13 GHz. Over the 13 GHz, there was significant loss because of epoxy capacitance of ACF. However, the addition of SiO$_2$filler to the ACF lowered the dielectric constant of the ACF materials resulting in an increase of resonance frequency up to 15 GHz. High frequency behavior of metal Au stud bumps was investigated. The resonance frequency of the metal stud bump interconnects is higher than that of ACF flip-chip interconnects and is not observed at the microwave frequency band. The extracted model parameters of adhesive flip chip interconnects were analyzed with the considerations of the characteristics of material and the design guideline of ACA flip chip for high frequency applications was provided.

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Gd-Doped CeO2 분말의 마이크로파 소결 (Microwave Sintering of Gd-Doped CeO2 Powder)

  • 김영균;김석범
    • 한국세라믹학회지
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    • 제44권3호
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    • pp.182-187
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    • 2007
  • 10 mol% $Gd_{2}O_{3}-CeO_{2}$ powder was sintered by microwave in a 2.45 GHz multimode cavity to develop a dense electrolyte layer for intermediate temperature solid oxide fuel cells (IT-SOFCs). Samples were sintered from $1100^{\circ}C$ upto $1500^{\circ}C$ by $50^{\circ}C$ difference and kept for 10 min and 30 min at the maximum temperature respectively. Theoretical density of the sample sintered at $1200^{\circ}C$ for 10 min was 95.4% and increased gradually upto 99% in the sample sintered at $1500^{\circ}C$ for 30 min. All of sintered samples showed very fine microstructures and the maximum average grain size of the sintered sample at $1500^{\circ}C$ for 30 min was $(0.87{\pm}0.42){\mu}m$. Ionic conductvity of the samples were measured by DC 4 probe method.

전자오븐을 이용한 간편하고 연속적인 마이크로파 발생 장치 개발 (Development of simple and continuous microwave source using a microwave oven)

  • 권기청;김재현;김정희;이효석;전상진;허승회;최원호
    • 한국진공학회지
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    • 제9권3호
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    • pp.290-295
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    • 2000
  • KAIST-TOKAMAK에서 재현성이 좋은 저항가열 플라즈마를 발생시키는데 필요한 전이온화(pre-ionization)에 응용하기 위해 2.45 GHz 마그네트론을 사용하여 간편한 마이크로파 발생장치를 개발하였다. 장치에 사용한 마그네트론은 출력 500 W, 주파수 2.45 GHz이며, 일반적인 가정용 전자오븐(microwave oven)에 사용된다. 기존의 가정용 마그네트론은 음극(cathode)과 양극(anode)사이에 걸리는 고전압이 60 Hz의 주기를 갖기 때문에 약 16ms마다 약 8 ms 동안만 주기적으로 마이크로파를 발생한다. 이 마그네트론을 사용하여 토카막 전이온화에 충분할 정도로 연속적으로 발생되는 마이크로파를 얻기 위해서 음극과 양극사이에 개량된 회로로 리플전압이 작은 DC 고전압(5 kV 1 A)을 인가하였다. 본 논문에서는 주기적으로 생성.소멸하는 ECH 플라즈마와 연속적인 ECH 플라즈마를 발생시켜 랑뮈어탐침과 광증배관(PMT)을 이용한 이온 포화전류와 $H_\alpha$/ 방출(emission)을 측정하여 마이크로파 발생장치의 특성을 조사하였다.

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유전체 원주공진기법에 의한 고주파 유전특성 측정에 관한 연구 (Study on the Microwave Dielectric properties in the Dielectric Rod Resonator Method)

  • 김경용;김왕섭;최환
    • 전자공학회논문지A
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    • 제32A권3호
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    • pp.471-481
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    • 1995
  • Measurement factors for the dielectric properties of low dielectric loss materials (tan${\dalta}{\le}10^{-4}$) were investigated using the dielectric rod resonator method. It was shown that the relative conductivity (${\sigma}_{r}$) should be controlled within a 5% to obtain the standard deviations of less than 0.07 for permittivity .epsilon.r and 0.06${\times}10^{-4}$ for tan.delta.respectively. Surface resistivity (R$_s$) could be reduced when the surface roughness of parallelled conducting plate was less than 0.07 .mu.m. Measurement error for the permittivity was $\pm$0.02% independent of probe loop size, whereas the error in Q value was reduced with the decrease in probe loop size and also with the increase in the absolute values of Q. Reliable Q values were determined with the probe loop size of less than 4mm. The accurate for the distance between the measuring probe loop and the sample could be obtained when the insertion loss of resonant frequency ranged -15dB - -30dB.

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비파괴 측정을 위한 근접장 마이크로파 현미경 연구 (The Study of Near-field Scanning Microwave Microscope for the Nondestructive Detection System)

  • 김주영;김송희;유현준;양종일;유형근;유경선;김승완;이기진
    • 비파괴검사학회지
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    • 제24권5호
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    • pp.508-517
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    • 2004
  • 근접장의 특성과 근접장 마이크로파 현미경의 배경이론을 설명하였고 유전체 공진기 제작에 앞서 HFSS (high frequency structure simulator)를 이용한 모의 시뮬레이션을 기술하였다. 이것을 바탕으로 원통형 유전체 공진기를 제작하여 금속탐침과 결합한 근접장 마이크로파 현미경(near field scanning microwave microscope : NSMM)을 구성하였다. 제작한 유전체 공진기의 특성은 HFSS를 이용하여 모의 실험한 결과와 비교하였다 Tip의 기하학적 모양에 따른 공간분해능과 감도(sensitivity)를 연구하였고 contrast가 가장 좋은 hybrid tip을 개발하였다. 전도도가 서로 다른 금속시료에 따른 NSMM의 반사계수의 변화를 측정하였고 실험결과와 이론적 시료의 임피던스를 비교하였다. 마지막으로 유전체 공진기를 이용한 NSMM으로 공간 분해능이 $1{\mu}m$의 Cr과 NiFe 패턴의 이미지를 비접촉, 비파괴방법으로 얻었다.

근접장 마이크로파 현미경을 이용한 ITO 박막 면저항의 비파괴 관측 특성 연구 (Nondestructive measurement of sheet resistance of indium tin oxide(ITO) thin films by using a near-field scanning microwave microscope)

  • 윤순일;나승욱;윤영운;유현준;이영주;김현정;이기진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 추계학술대회 논문집 Vol.17
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    • pp.522-525
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    • 2004
  • ITO thin films $({\sim}150\;nm)$ are deposited on glass substrates by different deposition condition. The sheet resistance of ITO thin films measured by using a four probe station. The microstructure of these films is determined using a X-ray diffractometer (XRD) and a scanning electron microscope (SEM) and a atomic force microscope (AFM). The sheet resistance of ITO thin films compared $s_{11}$ values by using a near field scanning microwave microscope.

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Double Resonance Spectra Involving Torsional Excited Levels and CO Stretch Band Transitions of $CD_3OH$

  • Choi, Sung-Eul
    • 한국광학회지
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    • 제6권2호
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    • pp.165-171
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    • 1995
  • Infrared-Radio frequency double resonance (IRRFDR) and Infrared-Microwave double resonance (IRMWDR) spectroscopy have been used to probe a level of A symmetry for $CD_{3}$OH. Double resonance spectra of $CD_{3}$OH have been investigated over the range of 940 to 1020 $cm ^{-1}$ . Twenty K-type doublet transitions have been observed in both the radio frequency region, which covers 50 MHz to 1 GHz, and the microwave region, which covers 8 GHz to 12 GHz. The results propose new assignments of infrared (IR) absorption transitions and far-infrared (FIR) laser emission lines. These involve torsional excited levels and CO stretch states. Measurements of the A state splitting have permitted the determination of the asymmetry splitting parameters $S^{o}$(n, K) and $^{co}$ (n, K) for (n, K)=(0.3) and (1.3)

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근접장 마이크로파 현미경을 이용한 ITO 박막 면저항의 비파괴 관측 특성 연구 (Nondestructive measurement of sheet resistance of indium tin oxide(ITO) thin films by using a near-field scanning microwave microscope)

  • 윤순일;나승욱;유현준;이영주;김현정;이기진
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.1042-1045
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    • 2004
  • ITO thin films ($\sim150nm$) are deposited on glass substrates by different deposition condition. The sheet resistance of ITO thin films measured by using a four probe station. The microstructure of these films is determined using a X-ray diffractometer (XRD) and a scanning electron microscope (SEM) and a atomic force microscope (AEM). The sheet resistance of ITO thin films compared $s_11$ values by using a near field scanning microwave microscope.

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Simulation Study on Measuring Pulverized Coal Concentration in Power Plant Boiler

  • Chen, Lijun;Wang, Yang;Su, Cheng
    • Journal of Information Processing Systems
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    • 제15권1호
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    • pp.189-202
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    • 2019
  • During thermal power coal-fired boiler operation, it is very important to detect the pulverized coal concentration in the air pipeline for the boiler combustion stability and economic security. Because the current measurement methods used by power plants are often involved with large measurement errors and unable to monitor the pulverized coal concentration in real-time, a new method is needed. In this paper, a new method based on microwave circular waveguide is presented. High Frequency Electromagnetic Simulation (HFSS) software was used to construct a simulation model for measuring pulverized coal concentration in power plant pipeline. Theoretical analysis and simulation experiments were done to find the effective microwave emission frequency, installation angle, the type of antenna probe, antenna installation distance and other important parameters. Finally, field experiment in Jilin Thermal Power Plant proved that with selected parameters, the measuring device accurately reflected the changes in the concentration of pulverized coal.

Relationships between dielectric properties and characteristics of impregnated and activated samples of potassium carbonate-and sodium hydroxide-modified palm kernel shell for microwave- assisted activation

  • Alias, Norulaina;Zaini, Muhammad Abbas Ahmad;Kamaruddin, Mohd Johari
    • Carbon letters
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    • 제24권
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    • pp.62-72
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    • 2017
  • The aim of this work was to evaluate the dielectric properties of impregnated and activated palm kernel shells (PKSs) samples using two activating agents, potassium carbonate ($K_2CO_3$) and sodium hydroxide (NaOH), at three impregnation ratios. The materials were characterized by moisture content, carbon content, ash content, thermal profile and functional groups. The dielectric properties were examined using an open-ended coaxial probe method at various microwave frequencies (1-6 GHz) and temperatures (25, 35, and $45^{\circ}C$). The results show that the dielectric properties varied with frequency, temperature, moisture content, carbon content and mass ratio of the ionic solids. PKSK1.75 (PKS impregnated with $K_2CO_3$ at a mass ratio of 1.75) and PKSN1.5 (PKS impregnated with NaOH at a mass ratio of 1.5) exhibited a high loss tangent ($tan{\delta}$) indicating the effectiveness of these materials to be heated by microwaves. $K_2CO_3$ and NaOH can act as a microwave absorber to enhance the efficiency of microwave heating for low loss PKSs. Materials with a high moisture content exhibit a high loss tangent but low penetration depth. The interplay of multiple operating frequencies is suggested to promote better microwave heating by considering the changes in the materials characteristics.