Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2004.07b
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- Pages.1042-1045
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- 2004
Nondestructive measurement of sheet resistance of indium tin oxide(ITO) thin films by using a near-field scanning microwave microscope
근접장 마이크로파 현미경을 이용한 ITO 박막 면저항의 비파괴 관측 특성 연구
- Published : 2004.07.05
Abstract
ITO thin films (
Keywords
- Indium-tin-oxide (ITO);
- near-field scanning microscope (NSMM);
- X-ray diffraction (XRD);
- reflection coefficient ($S_{11}$);
- atomic force microscope (AFM)