• The Transactions of The Korean Institute of Electrical Engineers
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• v.65 no.10
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• pp.1706-1711
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• 2016

Electromagnetic wave simulation was performed to predict characteristics of manufactured cutoff probe at low temperature magnetized plasma medium. Microwave cutoff probe is designed for research the properties of magnetized inductively coupled plasma. It was shown that the cutoff probe method can safely be used for weakly magnetized high density plasma sources. Cutoff probe system with two port network analyzer has been prepared and applied to measure electron density distributions in large area, 13.56MHz driven weakly magnetized inductively coupled plasma source. The results shown that, the plasma frequency confirmed cut-off characteristics in low temperature plasma. Especially, cut-off characteristics was found at upper hybrid resonance frequency in the environment of the magnetic field. In case of a induced weak magnetic field in inductively coupled plasma, plasma density estimated from the cutoff frequency in the same way at unmagnetized plasma due to nearly same plasma frequency and upper hybrid resonance frequency. The plasma density is increased and uniformity is improved by applying a induced weak magnetic field in inductively coupled plasma.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.184-184
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• 2012

We proposed a new measurement method of cutoff probe using the reactance spectrum of the plasma in cutoff probe system instead of transmission spectrum. The high accurate reactance spectrum of the plasma which is expected in previous circuit simulation of cutoff probe [1] was measured by using the automatic port extension method of the network analyzer. The measured reactance spectrum is good agreement with E/M wave simulation result (CST Microwave Studio). From the analysis of the measured reactance spectrum based on the circuit modeling, not only the electron density but also electron-neutral collision frequency can be simply obtained. The obtained results of electron density and e-n collision frequency were presented and discussed in wide range of experimental conditions, together with comparison result with previous methods (a previous cutoff probe using transmission spectrum and a single langmuir probe).

• Physical Therapy Korea
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• v.10 no.1
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• pp.15-27
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• 2003

Therapeutic ultrasound is commonly applied for deep heating in physical therapy setting. However, it is difficult to determine the exact application dosage and to confirm the immediate heating effect. Microwave Radio-Thermometer (MRT) can measure the temperature by the electromagnetic energy in the microwave region of the object that emits above absolute zero temperature. MRT was used for early diagnosis of breast cancer since it was not harmful, non-invasive, and non-ionizing to the human body. The purposes of this study were to investigate how accurately 1.1 GHz RTM (RES Ltd. Russia) measures the change of average temperature in the tissue, and to determine the depth of temperature change measurement. Therapeutic ultrasound was applied (continuous wave for 5 minutes, 1 MHz, intensity of 1.5 $W/cm^2$ [in vitro] and 1.0 $W/cm^2$ [in vivo]) in four different conditions: (1) 30 cases of in vitro specimen of pork, (2) 30 cases of in vitro specimen of pork ankle joint, (3) 10 cases of in vivo canine thigh, and (4) 30 cases of in vivo human body. Intraclass Correlation Coeffients (ICC[3,1]) between average needle probe thermometer below surface and MRT temperature was revealed as followed: (1) Before ultrasound application ICCs ranges above .8 in specimen of pork (15 mm underneath the skin) and above .82 in specimen of pork ankle joint (10~30 mm underneath the skin). (2) After ultrasound application ICCs ranges above .7 in both specimens of pork and pork ankle joint. (3) Before ultrasound application ICCs ranges above .8 in canine thigh (20 mm underneath the skin). (4) After ultrasound application ICCs ranges above .82 in canine thigh. The temperature of the human body increased significantly with the mean of $15^{\circ}C$ in muscle tissue and with the mean of $3.5^{\circ}C$ in joint (p<.00). It was revealed that the average depth of temperature measurement of the tissue by MRT was in between 10 and 35 mm, and determined that the proper temperature measurement band was $36.5{\sim}37.0^{\circ}C$.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.39C no.5
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• pp.418-424
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• 2014

We propose and experimentally demonstrate a photonic microwave notch filter with a negative coefficient. The negative coefficient is obtained by using cross gain modulation (XGM) in a reflective semiconductor optical amplifier (RSOA). When the RSOA is operated in saturated region, the signal carried on the pump wavelength is inversely copied to the probe wavelength by the XGM effect, showing a negative coefficient. Time delay between pump signal and probe signal is provided by single mode fiber (SMF) with wavelength dependent time delay. The proposed microwave notch filter shows notch dips of more than 35.1 dB and free spectral range (FSR) of about 380.6 MHz.

• 한국초전도학회:학술대회논문집
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• v.10
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• pp.173-178
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• 2000

A prototype for a highly sensitive, automated measurement system for the microwave surface resistance of high-T$_c$ superconductor films was set up, and tested by measuring the microwave surface resistances of high-T$_c$ YBa$_2$Cu$_3$O$_{7-{\delta}}$(YBCO) films at the frequency of about 19.6 GHz and the temperature of 30 K ${\sim}$ 90 K. An open-ended TE$_{011}$ mode sapphire-loaded cylindrical cavity resonator was used as the measurement probe, where YBCO films were used as the endplates of the cylindrical cavity. The characteristics of the measurement system include functions to display the unloaded ${\varrho}$ and the resonant frequency of the TE$_{011}$ mode resonator as well as the microwave surface resistance of the YBCO films, all simultaneously as a function of temperature. Applicability of the measurement system for investigating the homogeneity in the microwave properties of large high-T$_c$ superconductor films is discussed.

• Progress in Superconductivity
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• v.2 no.1
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• pp.27-32
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• 2000

A prototype for a highly sensitive, automated measurement system for the microwave surface resistance of high-$T_c$ superconductor films was set up, and tested by measuring the microwave surface resistances of high-$T_c$ $YBa_2Cu_3O_{7-\delta}$ (YBCO) films at the frequency of about 19.6 GHz and the temperature of 30 K $\sim$ 90 K. An open-ended $TE_{011}$ mode sapphire-loaded cylindrical cavity resonator was used as the measurement probe, where YBCO films were used as the endplates of the cylindrical cavity. The characteristics of the measurement system include functions to display the unloaded Q and the resonant frequency of the $TE_{011}$ mode resonator as well as the microwave surface resistance of the YBCO films, all simultaneously as a function of temperature. Applicability of the measurement system for investigating the homogeneity in the microwave properties of large high-$T_c$ superconductor films is discussed.

• ETRI Journal
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• v.17 no.2
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• pp.11-19
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• 1995

The plasma densities generated from a semiconductor bridge (SCB) device employing a capacitor discharge firing set have been measured by a novel diagnostic technique employing a microwave resonator probe. The spatial resolution of the probe is comparable to the separation between the two wires of the transmission lines (${\approx}$3 mm). This method is superior to Langmuir probes in this application because Langmuir probe measurements are affected by sheath effects, small bridge area, and unknown fraction of multiple ions. Measured electron densities are related to the land material and input energy. Although electron densities in the plasma generated by aluminum or tungsten-land SCB devices show a general tendency to increase steadily with power, at the higher energies, the electron densities generated from tungsten-land SCB devices are found to remain constant.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07a
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• pp.105-109
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• 2004

[ $BaTi_4O_9$ ]계 유전체 박막을 Si 기판위에 RF Sputtering으로 성장시켜 유전체 박막의 두께 변화에 따른 마이크로파 대역에서 유전체 박막의 유전율 및 유전손실을 측정하였다. 유전체 박막의 두께가 증가함에 따라 유전율은 약간 증가하였으며 마이크로파 대역에서 벌크 유전체와 같은 38의 유전율 값을 얻을 수 있었다. 또한 probe와 상두 전극사이의 접촉 저항을 고려한 값들을 보정함으로서 6GHz의 주파수 대역까지 $BaTi_4O_9$ 박막의 유전손실 값을 안정적으로 측정한 수 있었으며 유전체 박막의 두께가 증가함에 따라 최대 0.0001의 양호한 유전손실 값을 얻을 수 있었다.

• Journal of the Korean Society for Nondestructive Testing
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• v.27 no.1
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• pp.23-30
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• 2007

We observed the NaCl concentration of solutions using a near-field microwave microprobe(NFMM). Instead of the usual technique, we take advantage of the noncontact evaluation capabilities of a NFMM. A NFMM with a high Q dielectric resonator allows observation of small variations of the permittivity due to changes in the NaCl concentration. The changes of NaCl concentration due to a change of permittivity of the NaCl solution were investigated by measuring the microwave reflection coefficient $S_{11}$ of the resonator. The NaCl sensor consisted of a dielectric resonator coupled to a probe tip at an operating frequency of about f=4 GHz. The change of the NaCl concentration is directly related to the change of the reflection coefficient due to a near field electromagnetic interaction between the probe tip and the NaCl solution. In order to determine the probe selectivity, we measured a mixture solution of NaCl and glucose.

• Journal of the Korean Vacuum Society
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• v.11 no.1
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• pp.68-75
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• 2002

It is observed the characteristic of the microwave air plasma in the wide range of the operating pressure, 1 mTorr ~ 760 Torr. The microwave air plasma was generated by an AC-type microwave source manufactured with a magnetron taken from a commertial microwave oven and the input power was fixed at 370 W. Characteristics of the plasmas were observed by an injection Langmuir probe and an OES(Optical Emission Spectroscopy). The breakdown electric field is drastically changed at 500 mTorr. For < 500 mTorr, the ratio of the breakdown electric field and the pressure decreased inversely to the pressure, $5.7\times10^4$V/m-Torr.However, the ratio increased linearly as 43 V/m-Torr for the operating pressure, > 500 mTorr. The minimum breakdown electric field was observed about 12. kV/m at 500 mTorr. It corresponds that the input frequency equals to the collision frequency. The effective collision cross section of the air at this pressure was calculated as $9.23\times10^{-l6}\textrm{cm}^2$.The results of the OES measurement revealed that the main ions were composed of the oxygen, argon, and nitrogen for > 500 mTorr. In contrast, only oxygen and argon ions were dominated for < 500 mTorr. ion temperature of oxygen (O(II)) in the air was decreased from about 1.2 eV to 0.5 eV as the pressure increased. Langmuir probe data shows that the plasma density for < 500 mTorr was higher that for > 500 mTorr.