• Title/Summary/Keyword: microstereolithography

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Fabrication of Elliptical Micro-lens Array with Large Surface Using ${\mu}SL$ (마이크로광조형을 이용한 대면적의 타원형 마이크로 렌즈 어레이 제작)

  • Park, In-Baek;Lee, Su-Do;Kwon, Tae-Wan;Choi, Jae-Won;Lee, Seok-Hee
    • Journal of the Korean Society for Precision Engineering
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    • v.25 no.2
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    • pp.123-130
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    • 2008
  • A 3D structure production method for microstereolithography is a useful way that produces complex structures with flexible processes and low cost. Several UV curable resins were blended and the optimal resin for micro-lens fabricate was selected through viscosity, workability and transmission tests. It consists of 1, 6 - Hexanediol diacrylate with 15 Apha and Isobornyl acrylate for reducing some shrinkage. When fabricating a micro-lens array on large surface, some distortion of shape occurred because of the surface tension between cured part. To overcome this problem, the optimal processing conditions were derived from considering amount of the resin and surface tension. Large surface Micro-lens array, which are a type of elliptical convex and consist of 18,000 micro-lens in the range of 2cm*2cm were fabricated. The focal length to the X-axis and Y-axis were calculated. To verify the performance, measure an energy distribution of transmitted light from the Large surface Micro-lens array.

A Study on a Microreplication Process for Real 3D Structures Using a Soft Lithography (동분말이 함유된 에폭시 수지를 이용한 마이크로 기어의 제작에 관한 연구)

  • Chung Sungil;Park Sunjoon;Lee Inhwan;Jeong Haedo;Cho Dongwoo
    • Journal of the Korean Society for Precision Engineering
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    • v.21 no.12
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    • pp.29-36
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    • 2004
  • In this paper, a new replication technique for a real 3D microstructure was introduced, in which a master Pattern WES made of photo-curable epoxy using a microstereolithography technology, and then it was transferred onto an epoxy-copper particle composite. A helical gear was selected as one of the real 3D microstructure for this study, and it was replicated from a pure epoxy to an epoxy composite. In addition, the transferability of the microreplication process was evaluated, and the properties of :he epoxy composite were compared to that of the pure epoxy, including hardness, wear-resistance and thermal conductivity.

Method of Beam Alignment with the Rotation Axis for Laser Fabrication of Micro Cylindrical Structures (레이저를 이용한 미세 원통 구조물 제조를 위한 빔과 회전축 정렬 방법)

  • 정성진;정성호;이선규
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1997.10a
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    • pp.1056-1060
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    • 1997
  • An optical technique to align the laser beam with the rotation axis of a cylindrical microstructure is developed for laser microfabrication. The sample surface is first set normal to the rotation axis by applying a simple reflection law of geometrical optics and then the laser beam is aligned with the rotation axis using translation stages with quadrant photodiodes. Principle and the configuration of the alignment technique are described. An application of the present technique to laser microstereolithography showed that it could be effectively used for fabrication of micro cylindrical structures.

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Development of Micro-opto-mechanical Accelerometer using Optical fiber (광섬유를 이용한 미세 광 기계식 가속도 센서의 개발)

  • Lee, Seung-Jae
    • Journal of the Korean Society of Mechanical Technology
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    • v.13 no.4
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    • pp.93-99
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    • 2011
  • This paper presents a new type of optical silicon accelerometer using deep reactive ion etching (DRIE) and micro-stereolithography technology. Optical silicon accelerometer is based on a mass suspended by four vertical beams. A vertical shutter at the end of the mass can only moves along the sensing axis in the optical path between two single-mode optical fibers. The shutter modulates intensity of light from a laser diode reaching a photo detector. With the DRIE technique for (100) silicon, it is possible to etch a vertical shutter and beam. This ensures low sensitivity to accelerations that are not along the sensing axis. The microstructure for sensor packaging and optical fiber fixing was fabricated using micro stereolithography technology. Designed sensors are two types and each resonant frequency is about 15 kHz and 5 kHz.