Method of Beam Alignment with the Rotation Axis for Laser Fabrication of Micro Cylindrical Structures

레이저를 이용한 미세 원통 구조물 제조를 위한 빔과 회전축 정렬 방법

An optical technique to align the laser beam with the rotation axis of a cylindrical microstructure is developed for laser microfabrication. The sample surface is first set normal to the rotation axis by applying a simple reflection law of geometrical optics and then the laser beam is aligned with the rotation axis using translation stages with quadrant photodiodes. Principle and the configuration of the alignment technique are described. An application of the present technique to laser microstereolithography showed that it could be effectively used for fabrication of micro cylindrical structures.