• Applied Microscopy
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• 제2권1호
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• pp.39-46
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• 1972

There are many kinds of microscopes suitable for general studies; optical microscopes(OM), conventional transmission electron microscopes (TEM), and scanning electron microscopes(SEM). The optical microscopes and the conventional transmission electron microscopes are very familiar. The images of these microscopes are directly formed on an image plane with one or more image forming lenses. On the other hand, the image of the scanning electron microscope is formed on a fluorescent screen of a cathode ray tube using a scanning system similar to television technique. In this paper, the features and some applications of the scanning electron microscope will be discussed briefly. The recently available scanning electron microscope, combining a resolution of about $200{\AA}$ with great depth of field, is favorable when compared to the replica technique. It avoids the problem of specimen damage and the introduction of artifacts. In addition, it permits the examination of many samples that can not be replicated, and provides a broader range of information. The scanning electron microscope has found application in diverse fields of study including biology, chemistry, materials science, semiconductor technology, and many others. In scanning electron microscopy, the secondary electron method. the backscattererd electron method, and the electromotive force method are most widely used, and the transmitted electron method will become more useful. Change-over of magnification can be easily done by controlling the scanning width of the electron probe. It is possible. to continuously vary the magnification over the range from 100 times to 1.00,000 times without readjustment of focusing. Conclusion: With the development of a scanning. electron microscope, it is now possible to observe almost all-information produced through interactions between substances and electrons in the form of image. When the probe is properly focused on the specimen, changing magnification of specimen orientation does not require any change in focus. This is quite different from the conventional transmission electron microscope. It is worthwhile to note that the typical probe currents of $10^{-10}$ to $10^{-12}\;{\AA}$ are for below the $10^{-5}$ to $10^{-7}\;{\AA}$ of a conventional. transmission microscope. This reduces specimen contamination and specimen damage due to heatings. Outstanding features of the scanning electron microscope include the 'stereoscopic observation of a bulky or fiber specimen in high resolution' and 'observation of potential distribution and electromotive force in semiconductor devices'.

• 한국정보통신설비학회:학술대회논문집
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• 한국정보통신설비학회 2008년도 정보통신설비 학술대회
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• pp.186-189
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• 2008

In order to estimate cell images, high-performance electron microscopes are used nowadays. In this paper, we propose a new simple, fast and efficient method for real-time automatic focusing in electron microscopes. The proposed algorithm is based on the prediction-error variance, and demonstrates its feasibility by using extensive experiments. This method is fast, easy to implement, accurate, and not demanding on computation time.

• Applied Microscopy
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• 제33권2호
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• pp.93-104
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• 2003

Since the Ptolemaeos' discovery that glass has magnifying power, human desire to see the unseen with naked eyes has lead to the inventions of a series of microscopes. Since the Janssen's first compound microscope in 1595, through the Abbe's non-aberration microscopy, various microscopes using different principles are now being used in various biomedical researches. The discovery of electron by Thompson in 1897 has lead to the first invention of microscope using electron as an illumination source, the electron microscope, in 1931. Now we can see the objects as close as 0.05 nm using 1 MV FE-TEM constructed in 2000. In this review, the authors reviewed the predecessors efforts to develop better microscopes.

• Proceedings of the KSME Conference
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1271-1276
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• 2007

The most powerful analytical equipment usually comes at the cost of having the highest demand for space. Where electron microscopes has traditionally required a room to themselves, not just for reasons of their size but because of ancillary demands for pipes and service. The simple optical microscopes, of course, can occupy the desk-top, but because their performance is limited by the wavelength of light, their powers of magnification and resolution are inferior to that of the electron microscope. Mini SEM will sit comfortably on a desk-top but offers magnification and resolution performances much closer to that of a standard SEM. This new technique extends the scope of SEM as a high-resolution microscope, relatively cheap and widely available imaging tool, for a wider variety of samples.

• Journal of the Korea Academia-Industrial cooperation Society
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• 제11권11호
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• pp.4095-4099
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• 2010

Nano-measurement systems such as scanning probe microscopes should be protected against external disturbances. For the design of a scanning probe microscope, the external vibrations need to be characterized and the vibrational properties of the structural frame itself should be modeled. Also, the influences of the external vibration on the apparatus need to be known for its utmost precision. In this paper, the combined vibrational-characteristics of the floor and the structural frame are analyzed and experimentally investigated.

• Applied Microscopy
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• 제51권
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• pp.12.1-12.12
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• 2021

Intravital video microscopy permits the observation of microcirculatory blood flow. This often requires fluorescent probes to visualize structures and dynamic processes that cannot be observed with conventional bright-field microscopy. Conventional light microscopes do not allow for simultaneous bright-field and fluorescent imaging. Moreover, in conventional microscopes, only one type of fluorescent label can be observed. This study introduces multispectral intravital video microscopy, which combines bright-field and fluorescence microscopy in a standard light microscope. The technique enables simultaneous real-time observation of fluorescently-labeled structures in relation to their direct physical surroundings. The advancement provides context for the orientation, movement, and function of labeled structures in the microcirculation.

• Journal of the Korean Society for Precision Engineering
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• 제24권9호
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• pp.68-75
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• 2007

The pitch and orthogonality of two-dimensional (2D) gratings have been measured by using a metrological atomic force microscope (MAFM) and measurement uncertainty has been analyzed. Gratings are typical standard artifacts for the calibration of precision microscopes. Since the magnification and orthogonality in two perpendicular axes of microscopes can be calibrated simultaneously using 2D gratings, it is important to certify the pitch and orthogonality of 2D gratings accurately for nano-metrology using precision microscopes. In the measurement of 2D gratings, the MAFM can be used effectively for its nanometric resolution and uncertainty, but a new measurement scheme was required to overcome some limitations of current MAFM such as nonnegligible thermal drift and slow scan speed. Two kinds of 2D gratings, each with the nominal pitch of 300 nm and 1000 nm, were measured using line scans for the pitch measurement of each direction. The expanded uncertainties (k = 2) of measured pitch values were less than 0.2 nm and 0.4 nm for each specimen, and those of measured orthogonality were less than 0.09 degree and 0.05 degree respectively. The experimental results measured using the MAFM and optical diffractometer were coincident with each other within the expanded uncertainty of the MAFM. As a future work, we also proposed another scheme for the measurements of 2D gratings to increase the accuracy of calculated peak positions.

• Korean Journal of Optics and Photonics
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• 제15권6호
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• pp.583-590
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• 2004

The autofocus is one of the important processes in the automated vision inspection or measurements using optical microscopes, because it influences the measuring accuracy. In this paper, we used the confocal microscope configuration based on not a pinhole but a single-mode optical fiber. A single mode fiber has the functions of source and detector by applying the reciprocal scheme. As a result, we acquired a simple system configuration and easy alignment of the optical axis. Also, we embodied a fast autofocus system by acquiring the focus error signal through a source modulation technique. The source modulation technique can effectively reduce physical disturbances compared with objective lens modulation, and it is easily applicable to general optical microscopes. The focus error signal was measured with respect to the modulation amplitude, reflectance of the specimen and inclination angle of the measuring surface. The performance of the proposed autofocus system was verified through autofocusing flat mirror surface. In addition, we confirmed that source modulation rarely degrades the depth resolution by the comparison between the FWHMs of axial response curves.

• Proceedings of the Optical Society of Korea Conference
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• 한국광학회 2007년도 하계학술발표회 논문집
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• pp.245-246
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 한국정밀공학회 2007년도 춘계학술대회 논문집
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• pp.317-318
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• 2007