Measurements of Two-dimensional Gratings Using a Metrological Atomic Force Microscope and Uncertainty Evaluation |
Kim, Jong-Ahn
(한국표준과학연구원 기반표준부 길이/시간그룹)
Kim, Jae-Wan (한국표준과학연구원 기반표준부 길이/시간그룹) Kang, Chu-Shik (한국표준과학연구원 기반표준부 길이/시간그룹) Eom, Tae-Bong (한국표준과학연구원 기반표준부 길이/시간그룹) |
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