• 마이크로전자및패키징학회지
• /
• 제12권2호
• /
• pp.175-179
• /
• 2005

본 논문에서는 평행 결합선로를 이용하여 구조가 간단하고 광대역 특성을 갖는 $180^{\circ}$ bit X-대역 위상 변이기를 설계하고 마이크로머시닝 (micromachining) 공정을 이용하여 제작하였다. 이 위상 변이 기는 한쪽 끝이 접지된 $90^{\circ}$ 평행 결합선로와 한쪽 끝이 단락된 $90^{\circ}$ 평행 결합선로를 병렬로 연결한 구조를 갖는다. 이분법 이론에 의해 $180^{\circ}$ bit 위상 변이기에 대한설계 공식을 유도하고, 이를 적용하여 중심주파수 10GHz에서 대역폭 6GHz, ${\pm}5^{\circ}$의 위상 변이를 갖는 광대역 $180^{\circ}$ bit위상 변이기를 설계, 제작하였다.

• 한국재료학회:학술대회논문집
• /
• 한국재료학회 2003년도 춘계학술발표강연 및 논문개요집
• /
• pp.20-20
• /
• 2003

• 한국레이저가공학회:학술대회논문집
• /
• 한국레이저가공학회 2001년도 추계학술발표대회 논문개요집
• /
• pp.37-41
• /
• 2001

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 1999년도 춘계학술대회 논문집
• /
• pp.1-14
• /
• 1999

• 한국광학회:학술대회논문집
• /
• 한국광학회 1997년도 Advance Program of 14th optics andquantum Electronics conference, 1997제14 회 광학 및 양자전자 학술 발표회 논문 요약집
• /
• pp.96-96
• /
• 1997

• Journal of Mechanical Science and Technology
• /
• 제20권4호
• /
• pp.554-560
• /
• 2006

This paper describes the demonstration of successful fabrication and initial characterization of micromachined pressure sensors and micromachined jets (microjets) fabricated for use in macro flow control and other applications. In this work, the microfabrication technology was investigated to create a micromachined fluidic control system with a goal of application in practical fluids problems, such as UAV (Unmanned Aerial Vehicle)-scale aerodynamic control. Approaches of this work include: (1) the development of suitable micromachined synthetic jets (microjets) as actuators, which obviate the need to physically extend micromachined structures into an external flow; and (2) a non-silicon alternative micromachining fabrication technology based on metallic substrates and lamination (in addition to traditional MEMS technologies) which will allow the realization of larger scale, more robust structures and larger array active areas for fluidic systems. As an initial study, an array of MEMS pressure sensors and an array of MEMS modulators for orifice-based control of microjets have been fabricated, and characterized. Both pressure sensors and modulators have been built using stainless steel as a substrate and a combination of lamination and traditional micromachining processes as fabrication technologies.

• KIEE International Transactions on Electrophysics and Applications
• /
• 제4C권4호
• /
• pp.149-154
• /
• 2004

This paper presents a silicon probe tip for vertical probe card application. The silicon probe tip was fabricated using MEMS technology such as porous silicon micromachining and deep- RIE (reactive ion etching). The thickness of the silicon epitaxial layers was 5 ${\mu}{\textrm}{m}$ and 7 ${\mu}{\textrm}{m}$, respectively. The width and length were 40 ${\mu}{\textrm}{m}$ and 600 ${\mu}{\textrm}{m}$, respectively. The probe structure was a multilayered structure and was composed of Au/Ni-Cr/Si$_3$N$_4$/n-epi layers. The height of the curled probe tip was measured as a function of the annealing temperature and time. Resistance characteristics of the probe tip were measured using a touchdown test.

• International Journal of Precision Engineering and Manufacturing
• /
• 제7권1호
• /
• pp.13-17
• /
• 2006

Self-Assembled Monolayers (SAMs) formed by alkanethiol adsorption to thin metal film are widely being investigated for applications as coating layer for anti-stiction or friction reduction and in fabrication of micro structure of molecules and bio molecules. Recently, there have been many researches on micro patterning using the advantages of very thin thickness and etching resistance of Self-Assembled Monolayers in selective etching of thin metal film. In this report, we present the several machining method to form the nanoscale structure by Mask-Less laser patterning using alknanethiolate Self-Assembled Monolayers such as thin metal film etching and heterogeneous SAM structure formation.

• Journal of the Optical Society of Korea
• /
• 제7권3호
• /
• pp.166-173
• /
• 2003

This paper presents micromachining results on planar-lightwave-circuit (PLC) chips with Si substrate and the quartz substrate by using Ti:Sapphire femtosecond-pulsed laser. The ablation process with femtosecond laser pulses generates nothing of contamination, molten zone, microcracks, shock wave, delamination and recast layer. We also showed that the micromachine for PLC using femtosecond pulsed lasers is superior to that using nanosecond pulsed lasers. The insertion loss and the optical return loss of the 1 ${\times}$ 8 optical power splitters packaged with micromachined input- and output-port U-grooves were less than 11.0 ㏈ and more than 55 ㏈, respectively. The wavelength dependent loss (WDL) was distributed within $\pm$0.6 ㏈ and the polarization dependent loss (PDL) was less than 0.2 ㏈.

• 대한전기학회:학술대회논문집
• /
• 대한전기학회 2004년도 하계학술대회 논문집 C
• /
• pp.2134-2136
• /
• 2004

A microcantilever-based biosensor with piezoresistor has been fabricated using surface micromachining technique, which is cost effective and simplifies a fabrication procedure. To evaluate the characteristics of the cantilever, the cystamine terminated with thiol was covalently immobilized on the gold-coated side of the cantilever and glutaraldehyde that would be bonded with amine group in the cystamine was injected subsequently. This process was characterized by measuring the deflection of the cantilever in real time monitoring. Using a piezoresistive read-out and a well-known optical beam deflection method as well carried out the measurement of deflection.