• 전자공학회논문지D
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• 제35D권9호
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• pp.48-53
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• 1998

실리콘 벌크 마이크로머시닝과 표면 마이크로머시닝기술을 혼합하여 새로운 구조의 정전렌즈를 제작하였다. 표면 마이크로머시닝을 위한 구조층과 희생층으로는 폴리실리콘을 사용하였으며 구조층을 열산화막으로 보호하여 실리콘 습식 식각시 손상되지 않도록 하였다. 이전의 마이크로컬럼에 사용되던 정전렌즈에 비하여 이 구조가 갖는 장점은 1) 양극 접합의 수를 줄일 수 있어 구멍간 정렬, 렌즈의 생산성, 신뢰도, 손상 면에서 우수하고, 2) 마이크로컬럼의 집적화를 통한 arrayed lithography에도 유리하다는 것이다.

• 센서학회지
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• 제14권1호
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• pp.1-6
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• 2005

This paper describes a novel concept of a chemically sensitive scanning force microscope (CS-SFM). It consists of the conventional SFM and the time-of-flight mass spectrometer (TOF-MS). A switchable cantilever (SC) fabricated by the micromachining technology combines each advantage of two completely different systems, SFM and TOF-MS. The CS-SFM offers to produce both images of topography and chemical information simultaneously. First we employed a rotatable tip holder based on 4 piezotube actuators for demonstration of the possibility of the CS-SFM concept. Second the CS-SFM concept is optimized with the micromachining technology. The micromachined SC with an integrated bimorph actuator and a piezoresistive strain sensor provides a reasonable switching speed of ${\sim}10$ ms which is very attractive for the CS-SFM application. The SC is currently being integrated in an ultra-high-vacuum system to perform various experiments.

• 대한기계학회논문집B
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• 제26권6호
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• pp.868-874
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• 2002

A high-impulse, low-power, digital microthruster has been developed using low-boiling-temperature liquid propellant with high-viscosity fluid plug. The viscous fiction force of the fluid plug increases the blast pressure and the low-boiling-temperature liquid propellant is intended to reduce input power consumption. The three-layer microthruster has been fabricated by surface micromachining as well as bulk micromachining in the size of 7$\times$13$\times$1.5㎣. A digital output impulse bit of 6.4$\times$10$^{-8}$ Nsec has been obtained from the fabricated microthruster using perfluoro normal hexane (FC72) propellant and oil plug, resulting in about ten times increase of the impulse bit using one hundredth electrical input energy compared to the conventional multiple-shot microthruster.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 춘계학술대회논문집C
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• pp.59-63
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• 2001

A high-impulse, low-power, continuous-shot microthruster has been developed using low boiling temperature liquid-propellant with high viscous fluid-plug. The viscous friction force of the fluid-plug increases the blast pressure and the low boiling temperature liquid-propellant is intended to reduce input power consumption. The three-layer microthruster has been fabricated by surface micromachining as well as bulk micromachining in the size of $7{\times}13{\times}1.5mm^{3}$. A continuous output impulse bit of $6.4{\times}10^{-8}N{\cdot}sec$ has been obtained from the fabricated microthruster using perfluoro normal hexane (FC72) propellant and oil plug, resulting in about ten times increase of the impulse bit using one hundredth electrical input energy compared to the conventional continuous microthruster.

• 한국자동차공학회논문집
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• 제4권5호
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• pp.9-15
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• 1996

A silicon microaccelerometer is designed and fabricated using silicon epitaxial layers for automotive electronic airbag applications. A cantilever structure is chosen for high sensitivity and piezoresistive detection method is adopted for circuit simplicity and low cost. An optimum design is used to find optimum microstructure sizes for maximum sensitivity subject to performance requirements and design constraints on natural frequency, damping ratio, maximum allowable stress and microfabrication limitations. The microaccelerometer is fabricated by micromachining processing steps, composed of material-selective and orientation-dependent chemical etching techniques. Fabricated prototype shows a sensitivity of 88.6$\mu\textrm{V}$/g within a resonant frequency of 1.75KHz. Estimated performance of the microaccelerometer is compared with measured one. Discrepancy between the theoretical values and the experimental values is discussed together with possible sources of the errors.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.497-502
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• 2002

This paper describes a design methodology of a tri-axial silicon-based farce sensor with square membrane by using micromachining technology (MEMS). The sensor has a maximum farce range of 5 N and a minimum force range of 0.1N in the three-axis directions. A simple beam theory was adopted to design the shape of the micro-force sensor. Also the optimal positions of piezoresistors were determined by the strain distribution obtained from the commercial finite element analysis program, ANSYS. The Wheatstone bridge circuits were designed to consider the sensitivity of the force sensor and its temperature compensation. Finally the process for microfabrication was designed using micromachining technology.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.932-937
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• 2002

The polyimide nozzle and silicon restrictor inside a thermal micro actuator have been fabricated using state of the art laser micromachining methods. Numerical models of fluid dynamics inside the actuator chamber and nozzle are presented. The models include fluid flow from reservoir, bubble formation and growth, ejection through the nozzle, and dynamics of refill through restrictor. Since high tapered nozzle and restrictor are very important parameters for overall actuator performance design, a special setup for the beam delivery system has been developed. The effects of variations of nozzle thickness, diameter, taper angles, and restrictor shapes are simulated and some results are compared with the experimental results. It is fecund that the fluid ejection through the thinner and high tapered nozzle is more steady, fast, and robust and the tapered restrictor shows more satisfying refill than the zero taper one.

• 한국정밀공학회지
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• 제21권12호
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• pp.160-166
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• 2004

Self-Assembled Monolayers(SAMs) by alkanethiol adsorption to thin metal film are widely being investigated fer applications as coating layer for anti-stiction or friction reduction and in fabrication of micro structure of molecule and bio molecule. Recently, there have been many researches on micro patterning using the advantages of very thin thickness and etching resistance of Self-Assembled Monolayers in selective etching of thin metal film. In this report, we present the several machining method to form the nanoscale structure by Mask-Less laser patterning using alknanethiolate Self-Assembled Monolayers such as thin metal film etching and heterogeneous SAMs structure formation.

• 한국정밀공학회지
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• 제31권1호
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• pp.75-81
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• 2014

Laser beam machining has been known as efficient for glass micromachining. It is usually used the ultra-short pulsed laser which is time-consuming and uneconomic process. In order to use economic and powerful long pulsed laser, indirect processing called laser-induced backside wet etching (LIBWE) is good alternative method. In this paper, micromachining of glass using Nd:YAG laser with nanosecond pulsed beam has been attempted. In order to improve shape accuracy, combined processing with magnetic stirrer has been widely used. Magnetic stirrer acts to circulate the solution and remove the bubble but it is not suitable for deep hole machining. To get better effect, ultrasonic vibration was applied for improving shape accuracy.

• Journal of Electrical Engineering and Technology
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• 제3권1호
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• pp.121-124
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• 2008

This paper presents the fabrication and field emission of carbon nanotube field emitters for a micro mass spectrometer. The carbon nanotube is an adequate material as a field emitter since it has good characteristics. We have successfully fabricated a diode field emitter and a triode field emitter. Each field emitter has been constructed using several micromachining processes and a thermal CVD process. In the case of the diode field emitter, to increase the electric field, the carbon nanotubes are selectively grown on the patterned nickel catalyst layer. The electron current of the diode field emitter is 73.2 ${\mu}A$ when the anode voltage is 1100V. That of the triode field emitter is 3.4 pA when the anode voltage is 1000V.