• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2245-2247
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• 2000

The purpose of this paper is to demonstrate for the design and the fabrication of suspended spiral inductors using the micromachining technology. Also. the characteristics of spiral inductors with substrate lossless are simulated by lumped-element model. The absence of the lossy silicon substrate after micormachining results in significantly improved quality factor characteristics of 14. Micromachined spiral inductors have the improvement of a quality factor of about 60% than spiral inductors on silicon which is not micromachined.

• KIEE International Transactions on Electrophysics and Applications
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• v.5C no.6
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• pp.270-275
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• 2005

In order for the application of the in-vivo endoscopic biopsy, a micromirror which can be driven at a low voltage is required. In this paper, a two-step micromirror composed of bottom electrodes, moving plate and top mirror plate is proposed. Because an electrical wiring of two plates are separated, they can be actuated separately. Therefore, an intermediate moving plate plays an important role in reducing the driving voltage in half. The designed device was fabricated by the surface micromachining. Maximum rotation angle of $6.3^{\circ}$ was obtained by applying DC 48V, while a conventional one-step mirror pulled down at DC 120V. The designed structure can be used in microphotonic applications requiring low driving voltage.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.12
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• pp.633-638
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• 2001

The paper presents the fabrication and test of a micro scent injector module. A micro scent injector module consists of an injector fabricated by micromachining, a scent cartridge and a controller. If a scent injection signal triggers the controller, it heats the scent liquid in the injector chamber and a scent liquid is vaporized. The increased vapor pressure opens a normally closed boss valve, and the scent vapor is injected through the opened nozzle. The liquid volume injected by the fabricated module is about $1\muell$ for one second at 2 W.

• Proceedings of the KIEE Conference
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• 1999.07g
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• pp.3331-3333
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• 1999

A novel antistiction method using photo resist is proposed and verified to improve the yield of polysilicon micromachining process. $7.5{\mu}m-thick$ polysilicon is used as a structural layer. Residual stress and stress gradient originated from polysilicon deposition with LPCVD process is relaxed by doping and thermal treatment. The stress gradient of stress-free polysilicon layer is $-0.755MPa/{\mu}m$.

• Journal of Sensor Science and Technology
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• v.21 no.2
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• pp.121-126
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• 2012

Piezoresistive type contact force sensor array is fabricated by (111) Silicon bulk micromachining for continuous blood pressure monitoring. Length and width of the unit sensor structure is $200{\mu}m$ and $190{\mu}m$, respectively. The gap between sensing elements is only $10{\mu}m$. To achieve wafer level packaging, the sensor structure is capped by PDMS soft cap using wafer molding and bonding process with $10{\mu}m$ alignment precision. The resistance change over contact force was measured to verify the feasibility of the proposed sensor scheme. The maximum measurement range and resolution is 900 mm Hg and 0.57 mm Hg, respectively.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.09a
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• pp.124-128
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• 2005

To produce a highly sensitive uncooled microbolometer, the development of a high-performance thermometric material is essential. In this work, amorphous vanadium-tungsten oxide was developed as a thermometric material at a low temperature of $300^{\circ}C$, and the microbolometer, coupled with the material, was designed and fabricated using surface micromachining technology. The vanadium-tungsten oxide showed good properties for application to the microbolometer, Such as a high temperature coefficient of resistance of over -4.0 $\%$/K and good compatibility with the surface micromachining and integrated circuit fabrication process due to its low fabrication temperature. As a result, the uncooled microbolometer could be fabricated with high detectivity over $1.0\;{\times}\;10^9\;cmHz^{1/2}/W$ at a bias current of $7.5\;{\mu}A$ and a chopper frequency of 10-20 Hz

• Proceedings of the Optical Society of Korea Conference
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• 2007.07a
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• pp.71-72
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.10a
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• pp.247-248
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• 2009

• Proceedings of the Korean Society of Laser Processing Conference
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• 2005.06a
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• pp.77-80
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• 2005

• Proceedings of the Korean Society of Laser Processing Conference
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• 2001.05a
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• pp.27-30
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• 2001