• 제목/요약/키워드: microlens array

검색결과 94건 처리시간 0.023초

다중 광 프로브 특성 향상을 위한 비구면 마이크로렌즈 어레이의 개발 (Development of Aspheric Microlens Array to Improve the Properties of Multi Optical Probes)

  • 민중희;김홍민;최민석;김병욱;강신일
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 추계학술대회 논문집
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    • pp.104-107
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    • 2007
  • An aspheric microlens array to improve the properties of multi optical probes was designed and fabricated. To generate multi optical probes with good qualities, a microlens array with the minimum spherical aberration was designed by ray tracing. Using the reflow process, a master pattern of aspheric microlens array was made and finally with the ultraviolet-imprinting (UV-imprinting) method, the aspheric microlens array was replicated. The reflow condition was optimized to realize the master pattern of the microlens array with the designed aspheric shape. The intensity distribution of the optical probes at the focal plane showed a diffraction-limited shape.

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UV 임프린팅을 이용한 이미지 센서용 웨이퍼 스케일 마이크로렌즈 어레이 설계 및 제작 (Design and fabrication of wafer scale microlens array for image sensor using UV-imprinting)

  • 김호관;김석민;임지석;강신일
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2007년도 추계학술대회 논문집
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    • pp.100-103
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    • 2007
  • A microlens array has been required to improve light conversion efficiency in image sensors. A microlens array can be usually fabricated by photoresist reflow, hot-embossing, micro injection molding, and UV-imprinting. Among these processes, a UV-imprinting, which is operated at room temperature with relatively low applied pressure, can be a desirable process to integrate microlens array on image sensors, because this process provides the components with low thermal expansion, enhanced stability, and low birefringence, furthermore, it is more suitable for mass production of high quality microlens array. In this study, to analyze the optical properties of the wafer scale microlens array integrated image sensor, another wafer scale simulated image sensor chip array was designed and fabricated. An aspherical square microlens was designed and integrated on a simulated image sensor chip array using a UV-imprinting process. Finally, the optical performances were measured and analyzed.

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Covered Microlens Structure for Quad Color Filter Array of CMOS Image Sensor

  • Jae-Hyeok Hwang;Yunkyung Kim
    • Current Optics and Photonics
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    • 제7권5호
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    • pp.485-495
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    • 2023
  • The pixel size in high-resolution complementary metal-oxide-semiconductor (CMOS) image sensors continues to shrink due to chip size limitations. However, the pixel pitch's miniaturization causes deterioration of optical performance. As one solution, a quad color filter (CF) array with pixel binning has been developed to enhance sensitivity. For high sensitivity, the microlens structure also needs to be optimized as the CF arrays change. In this paper, the covered microlens, which consist of four microlenses covered by one large microlens, are proposed for the quad CF array in the backside illumination pixel structure. To evaluate the optical performance, the suggested microlens structure was simulated from 0.5 ㎛ to 1.0 ㎛ pixels at the center and edge of the sensors. Moreover, all pixel structures were compared with and without in-pixel deep trench isolation (DTI), which works to distribute incident light uniformly into each photodiode. The suggested structure was evaluated with an optical simulation using the finite-difference time-domain method for numerical analysis of the optical characteristics. Compared to the conventional microlens, the suggested microlens show 29.1% and 33.9% maximum enhancement of sensitivity at the center and edge of the sensor, respectively. Therefore, the covered microlens demonstrated the highly sensitive image sensor with a quad CF array.

광통신 용 VCSEL Array상에 Microlens Array를 집적하기 위한 UV성형 공정기술 개발 (Development of UV molding Process to Integrate Microlens Array on VCSEL Array for Optical Communication)

  • 한정원;김석민;김홍민;이지승;임지석;강신일
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2004년도 추계학술대회 논문집
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    • pp.840-843
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    • 2004
  • UV molding is a process for integrating micro/nano polymeric optical components on optoelectronic modules. In the present study, a microlens array for vertical cavity surface emitting laser(VCSEL) to fiber coupling was designed, integrated and tested. At the design stage, design variables ware optimized to maximize the coupling efficiency, and tolerance analysis was carried out. At the integration stage, the UV transparent mold was fabricated and the microlens array on VCSEL array was integrated by UV molding process. Finally the coupling efficiency of VCSEL to fiber was measured and analyzed.

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모사 광전자 소자 상에 적용한 마이크로렌즈 어레이의 UV 성형 (UV molding of Microlens Array on the Simulated Optoelectronic Device)

  • 구승완;김석민;강신일;손현주
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 2003년도 추계학술대회논문집
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    • pp.377-380
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    • 2003
  • Recently, demand of digital products with optoelectronic device is increasing rapidly. A microlens array is applied to improve optical efficiency on optoelectronic device, and it is usually fabricated by photolithography and reflow process after planarization layer coating process. UV molding process is more suitable for mass production of high quality microlens array than photolithography and reflow process. In the present study, microlens array was fabricated on the simulated optoelectronic device with planarization layer by aligned UV molding process. The shape of replicated microlens was measured, and the section image of molded part was examined.

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Optical Card 시스템에서의 마이크로렌즈 조사 광프로브 어레이 설계 및 제작 (Design and Fabrication of Microlens Illuminated Aperture Array for Optical ROM Card System)

  • 강신일;김석민;김홍민;이지승;임지석
    • 정보저장시스템학회논문집
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    • 제2권1호
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    • pp.1-6
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    • 2006
  • An optical ROM card system which using an optical probe array generated by Talbot effect was proposed as new robust storage solution. To improve the optical density and to decrease the power consumption of the system, it is very important to make the spot sizes of optical probes smaller as well as to increase the optical efficiency from the light source to optical probes. In this study, a microlens illuminated aperture array for generating high efficiency optical probe away with small beam spot was designed and fabricated using monolithic lithography integration method. The maximum intensity of optical probes of microlens illuminated aperture array increased about 12 times of that of aperture array, and the full width half maximum of the optical probe at Talbot plane generated by microlens illuminated aperture array was $0.77{\mu}m$.

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배면개구형 집광시트의 자체 정렬 특성 (Self-aligning Characteristics of Optical Sheets with Apertures)

  • 박경주;김영규;최계훈;백상훈;황성기;곽진석;이종훈;권진혁;박이순
    • 한국광학회지
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    • 제20권5호
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    • pp.301-307
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    • 2009
  • 액정표시장치의 고효율 백라이트 집광시트로 활용하기 위하여 배면 개구형 집광시트를 설계 및 분석하였다. Microlens array sheet, 피라미드 array sheet, 그리고 cone array sheet에 대해서 자체 정렬에 의한 배면 개구 형성 특성을 비교 분석한 결과, microlens array sheet가 가장 우수하였고, 다음으로 피라미드 array sheet였으며, cone array sheet가 가장 부적합하였다.

Photoresist Thermal Reflow를 이용한 Microlens Array 제작 (Fabrication of Microlens Array Using Photoresist Thermal Reflow)

  • 황성기;백상훈;권진혁;박이순
    • 한국광학회지
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    • 제20권2호
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    • pp.118-122
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    • 2009
  • PET 필름 위에 LCD 백라이트의 프리즘 집광시트의 역할을 대체 할 수 있는 microlens array(MLA) 시트를 설계하고 제작하였다. Photoresist thermal reflow 공정으로 두께 $100{\mu}m$ PET 필름 위에 MLA를 제작하였고, 노광 시간과 reflow의 온도, 시간 등의 변수에 따른 MLA의 형상 변화를 측정하였다.

A New Shack-Hartmann Type Wavefront Sensor Using Liquid Crystal Panels

  • Xiaoxi, Chen;Xu, Liu
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2005년도 International Meeting on Information Displayvol.I
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    • pp.528-530
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    • 2005
  • In this paper, we present a new and practical method for achieving real-time wavefront measurement, dramatically increasing the resolution, dynamic range of Shack-Hartmann wavefront sensor and improving the wavefront reconstruction quality. In proposal method, a liquid crystal display panel (LCD) for the generation of an array of Fresnel microlenses is use instead of the static microlens array of the conventional Shack-Hartmann type sensor. An off-axis holographic microlens array is designed instead of the normal microlens array to increase the effective array and then the dynamic range. The focus properties of the off-axis lens are studied.

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마이크로 렌즈 어레이를 이용한 유기 발광 소자의 광추출 효율 향상에 관한 연구 (Improvement of Outcoupled Light Efficiency of Organic Light-emitting Diodes with a Use of Microlens Array)

  • 김혜숙;황덕현;홍진웅;송민종;한원근;김태완
    • 한국전기전자재료학회논문지
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    • 제27권5호
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    • pp.307-311
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    • 2014
  • Because of a waveguiding effect and total internal reflection caused by a difference in refractive indices, only 20% of generated light is emitted to the air and the rest is trapped or absorbed in the device. An improvement of outcoupled efficiency of organic light-emitting diodes was studied using a microlens array. Mold of microlens array was fabricated by using photo-lithography with the AZ9260 photoresist, and the microlens array was formed onto the glass substrate using the UV curing agent named ZPU13-440. Device structure consists of microlens/glass/ITO/TPD/$Alq_3$/LiF/Al. It was found that there is an improvement of external quantum efficiency by about 20% at the same current density for the device with the microlens array compared to that of the reference one. Simulated outcoupled efficiency shows the improvement by about 20% for the device with the microlens array compared to that of the reference one. These results are consistent with the experimental ones.