• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1537-1540
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• 2003

MEMS technology with micro scale is complete system utilized as the sensor. micro electro device. The metallization of MEMS is very important to transfer the power operating the sensor and signal induced from sensor part. But in the MEMS structures local stress concentration and deformation is often happened by geometrical shape and different constraint on the metallization. Therefore. this paper studies the effect of supporting type and thickness ratio about thin film thickness of the substrate thickness for the residual stress variation caused by thermal load in the multi-layer thin film. Specimens were made from materials such as Al, Au and Cu and uniform thermal load was applied, repeatedly. The residual stress was measured by FEA and nano-indentation using AFM. Generally, the specimen made of Al induced the large residual stress and the 1st layer made of Al reduced the residual stress about half percent than 2nd layer. Specimen made of Cu and Au being the lower thermal expansion coefficient induce the minimum residual stress. Similarly the lowest indentation length was measured in the Au_Cu specimen by nano-indentation.

• 한국초전도ㆍ저온공학회논문지
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• 제3권2호
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• pp.44-48
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• 2001

SMES consists of Superconducting magnet, a power converter, a cryostat and HTS current leads The prototype cryostat with HTS current leads and refrigerators was designed and manufactured for developing micro SMES. The temperature rise under dc current in HTS current leads was measured. The performances of helium boil-off and mechanical stress were evaluated during transfer and vibration tests. The results will be used to develope the micro-SMES system.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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• pp.352-357
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• 2001

In this study, residual stress was investigated to evaluate damaged layer in high speed machining through simulation. In machining steel(STDll), residual stress remaining in machined surface was mainly appeared as compressive stress. The scale of this damaged layer more depends on feed per tooth and radial depth than spindle speed. Damaged layer was measured by optical microscope and hardness method. The micro-structure of damaged layer was a martensite because of cutting force and cutting temperature. Thickness of damaged layer is increased with incresing of feed per tooth and radial depth.

• 한국정밀공학회지
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• 제22권10호
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• pp.210-217
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• 2005

This study examined the effect of cancellous bone microstructure on stress distribution within a premolar tooth and a dental implant against mastication force by the micro-finite element method (FEM). The mandibular specimen including a premolar was obtained from a cadaver and scanned with micro-CT to obtain CT images. FE models were reconstructed from CT images at mid-sagittal plane of the tooth. Six models were generated and analyzed for different structure and density in cancellous bone. Stress distributions fur each implant (or tooth) and the surrounding bone were compared. The study indicated that the microstructure of cancellous bone should be considered in finite element analysis to produce reasonable results and thus implant systems with high success rate.

• Transactions on Electrical and Electronic Materials
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• 제16권4호
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• pp.173-178
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• 2015

In lieu of the excellent radio frequency (RF) performance of microelectromechanical system ( MEMS) switches, these micro switches need higher actuation voltage for their operation. This requirement is secondary to concerns over the swtiches’ reliability. This paper reports high reliability operation of RF MEMS switches with low voltage requirements. The proposed switch is optimised to perform in the Q-band, which results in actuation voltage of just 16.4 V. The mechanical stress gradient in the thin micro membrane is computed by simulating von Mises stress in a multi-physics environment that results in 90.4 MPa stress. The computed spring constant for the membrane is 3.02 N/m. The switch results in excellent RF performance with simulated isolation of above 38 dB, insertion loss of less than 0.35 dB and return loss of above 30 dB in the Q-band.

• Structural Engineering and Mechanics
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• 제53권1호
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• pp.105-130
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• 2015

In this paper, the classical continuum mechanics is adopted and modified to be consistent with the unique behavior of micro/nano solids. At first, some kinematical principles are discussed to illustrate the effect of the discrete nature of the microstructure of micro/nano solids. The fundamental equations and relations of the modified couple stress theory are derived to illustrate the microstructural effects on nanostructures. Moreover, the effect of the material surface energy is incorporated into the modified continuum theory. Due to the reduced coordination of the surface atoms a residual stress field, namely surface pretension, is generated in the bulk structure of the continuum. The essential kinematical and kinetically relations of nano-continuums are derived and discussed. These essential relations are used to derive a size-dependent model for Mindlin functionally graded (FG) nano-plates. An analytical solution is derived to show the feasibility of the proposed size-dependent model. A parametric study is provided to express the effect of surface parameters and the effect of the microstructure couple stress on the bending behavior of a simply supported FG nano plate.

• Computers and Concrete
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• 제22권1호
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• pp.93-100
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• 2018

It is seldom possible that geotechnical materials like rocks and concretes found without joints, cracks, or discontinuities. Thereby, the impact of micro-cracks on the mechanical properties of them is to be considered. In the present study, the effect of micro-crack on the failure mechanism of rock specimens under uniaxial compression was investigated experimentally. For this purpose, thermal stress was used to induce micro-cracks in the specimens. Several cylindrical and disk shape specimens were drilled from granite collected from Zanjan granite mine, Iran. Some of the prepared specimens were kept in room temperature and the others were heated by a laboratory furnace to different temperature levels (200, 400, 600, 800 and 1000 degree Celsius). During the experimental tests, Acoustic Emission (AE) sensors were used to monitor specimen failure at the different loading sequences. Also, Scanning Electron Microscope (SEM) was used to distinguish the induced micro-crack by heating in the specimens. The fractographic analysis revealed that the thin sections heated to $800^{\circ}C$ and $1000^{\circ}C$ contain some induced micro-fractures, but in the thin sections heated to $200^{\circ}C$, $400^{\circ}C$ and $600^{\circ}C$ have not been observed any micro-fracture. In the next, a comprehensive experimental investigation was made to evaluate mechanical properties of heated and unheated specimens. Results of experimental tests showed that induced micro-cracks significantly influence on the failure mode of specimens. The specimens kept at room temperature failed in the splitting mode, while the failure mode of specimens heated to $800^{\circ}C$ are shearing and the specimens heated to $1000^{\circ}C$ failed in the spalling mode. On the basis of AE monitoring, it is found that with increasing of the micro-crack density, the ratio of the number of shear cracks to the number of tensile cracks increases, under loading sequences.

• Steel and Composite Structures
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• 제38권3호
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• pp.337-353
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• 2021

Micro-electro-mechanical systems (MEMS) are widely employed in sensors, biomedical devices, optic sectors, and micro-accelerometers. New reinforcement materials such as carbon nanotubes as well as graphene platelets provide stiffer structures with controllable mechanical specifications by changing the graphene platelet features. This paper deals with buckling analyses of functionally graded graphene platelets micro plates with two piezoelectric layers subjected to external applied voltage. Governing equations are based on Kirchhoff plate theory assumptions beside the modified couple stress theory to incorporate the micro scale influences. A uniform temperature change and external electric field are regarded along the micro plate thickness. Moreover, an external in-plane mechanical load is uniformly distributed along the micro plate edges. The Hamilton's principle is employed to extract the governing equations. The material properties of each composite layer reinforced with graphene platelets of the considered micro plate are evaluated by the Halpin-Tsai micromechanical model. The governing equations are solved by the Navier's approach for the case of simply-supported boundary condition. The effects of the external applied voltage, the material length scale parameter, the thickness of the piezoelectric layers, the side, the length and the weight fraction of the graphene platelets as well as the graphene platelets distribution pattern on the critical buckling temperature change and on the critical buckling in-plane load are investigated. The outcomes illustrate the reduction of the thermal buckling strength independent of the graphene platelets distribution pattern while meanwhile the mechanical buckling strength is promoted. Furthermore, a negative voltage, -50 Volt, strengthens the micro plate stability against the thermal buckling occurrence about 9% while a positive voltage, 50 Volt, decreases the critical buckling load about 9% independent of the graphene platelet distribution pattern.

• Steel and Composite Structures
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• 제18권6호
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• pp.1541-1555
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• 2015

In this paper mechanical behavior of the functional gradient materials (FGM) micro-gripper under thermal load and DC voltage is numerically investigated taking into account the effect of intermolecular forces. In contrary to the similar previous works, which have been conducted for homogenous material, here, the FGM material has been implemented. It is assumed that the FGM micro-gripper is made of metal and ceramic and that material properties are changed continuously along the beam thickness according to a given function. The nonlinear governing equations of the static and dynamic deflection of microbeams have been derived using the coupled stress theory. The equations have been solved using the Galerkin based step-by-step linearization method (SSLM). The solution procedure has been evaluated against available data of literature showing good agreement. A parametric study has been conducted, focusing on the combined effects of important parameters included DC voltage, temperature variation, geometrical dimensions and ceramic volume concentration on the dynamic response and stability of the FGM micro-gripper.

• 한국정밀공학회지
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• 제29권11호
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• pp.1221-1227
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• 2012

As demands on micro-products increase significantly with raising functional integration and increasing complexity, microfoming attracts a lot of attention in the manufacture of micro-products. Since the conventional big forming systems are not adequate to achieve sufficient tolerances of micro-scale parts, it is necessary to reduce the scale of the forming equipment and devices. In addition, understandings on the size effects, which exist in the material behavior and process characterization of microforming processes, need to be expanded. In this study, a miniaturized forming system based on the ball screw and servo motor actuator was developed for the efficient micro-parts production. In addition, tensile tests and cylindrical upsetting experiments were performed to evaluate the performance of the microforming system and to investigate the flow stress and friction size effects in microforming processes.