• 한국기계가공학회지
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• 제5권1호
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• pp.39-44
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• 2006

Ultra precision positioning mechanism has been widely used on semiconductor manufacturing equipments, optical spectrum analyzers and cell manipulations. Ultra precision positioning mechanism consists of several actuators, sensors, guides and control systems. Its efficiency depends on each performance of components. The object of this study is to design and analyze the micro stage that is one of the equipments embodied in ultra precision positioning mechanism. The micro stage consists of PZT actuators and flexure hinges. The structural design of flexure hinge is optimized by using RSM and FEM. The control factors concerned with the design of flexure hinges of stage and arms are optimized by minimizing the equivalent stress on the hinge and maximizing 1st natural frequency based on RSM and FEM simulation under various kinds of design conditions.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2238-2243
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• 2007

A new microcombustor configuration for a micro fuel-cell reformer integrated with a micro evaporator was studied experimentally and computationally. The present microcombustor is simply cylindrical to be easily fabricated but two-staged, expending downstream, to feasibly control ignition and stable burning. Results show that the aspect ratio of the first stage and the wall thickness of the microcombustors substantially affect ignition and thermal characteristics. For the optimized design conditions, a premixed microflame was easily ignited in the expanded second stage combustor, moved into the smaller first stage combustor, and finally stabilized therein. The measured and predicted temperature distributions across the microcombustor walls indicated that heat generated in the microcombustor is well transferred. Thus, the present microcombustor configuration could be applied to the practical micro reformers integrated with a micro evaporator for use of fuel cells.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1995년도 추계학술대회 논문집
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.336-340
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• 1997

For optimal design of micro stage, we were measured to displacement of piezo-electric transducer that was based on voltage value. And then researchers were analyzed to microstage through FEM with displacement data including voltage value of piezo-electric transducer. For verification of analyzing results, we were gauged on displacement by using Laser-interferometer. And researchers were confirmed to propriety of micro stage design with FEM, were obtained error rate that are 3.5% between measurement results and analyzing results.

• 한국정밀공학회지
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• 제16권3호통권96호
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• pp.154-163
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• 1999

In this paper, an ultra precision positioning system has been developed using dual servo loop control. For positioning system having long distance with ultra precision , the combination of global stage and micro stage was required. A servo motor based ball screw is used as a global stage and the piezo actuator as a micro stage. For the improvement of positional precision, the digital Chebyshev filter is implemented in the developed to dual servo system. Therefore, the positional repeatability has been achieved within ${\pm}$ 10 mm, and this technique can be applied to develop precision semiconductor equipments such as lithography steppers and probers.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2005년도 춘계학술대회 논문집
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2009년도 추계학술대회 논문집
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• pp.41-44
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• 2009

A multi-stage gear mold including gears of 2mm and 1.5mm diameter was designed and machined in this research for developing micro gear mold manufacturing technology with micro endmill. Mechanical shapes having differential micro teeth were analyzed to be formed as designed and processing conditions were optimized by analyzing machined surface chip and cutting force. Based on the results, a prototype of micro multi-stage gear mold was manufactured.

• 대한기계학회논문집A
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• 제31권10호
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• pp.993-998
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• 2007

To verify the 2D or 3D positioning accuracy of a multi-axes stage is not easy, particularly, in the case the moving path of the stage is not linear. This paper is a study on a measuring method for the curved path accurately. A machine vision technique is used to trace the moving path of two-axes stage. To improve the accuracy of machine vision, a zoom lens is used for the 2D micro moving path. The accuracy of this method depends of the CCD resolution and array align accuracy with the zoom lens system. Also, a further study for software algorithm is required to increase the tracing speed. This technique will be useful to trace a small object in the 2D micro path in real-time accurately.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• 설비공학논문집
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• 제27권10호
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• pp.552-557
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• 2015

The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.