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http://dx.doi.org/10.3795/KSME-A.2007.31.10.993

Real-time Measurement and Analysis for Micro Circular Path of Two-Axes Stage Using Machine Vision  

Kim, Ju-Kyung (충북대학교 대학원 기계공학부)
Park, Jong-Jin (충북대학교 대학원 기계공학부)
Lee, Eung-Suk (충북대학교 기계공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.31, no.10, 2007 , pp. 993-998 More about this Journal
Abstract
To verify the 2D or 3D positioning accuracy of a multi-axes stage is not easy, particularly, in the case the moving path of the stage is not linear. This paper is a study on a measuring method for the curved path accurately. A machine vision technique is used to trace the moving path of two-axes stage. To improve the accuracy of machine vision, a zoom lens is used for the 2D micro moving path. The accuracy of this method depends of the CCD resolution and array align accuracy with the zoom lens system. Also, a further study for software algorithm is required to increase the tracing speed. This technique will be useful to trace a small object in the 2D micro path in real-time accurately.
Keywords
Ball-Bar Test; Machine Vision; Path Tracing; Real-Time; Two-Axes Stage;
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