• Transactions on Electrical and Electronic Materials
• /
• 제7권4호
• /
• pp.157-162
• /
• 2006

Chemical-mechanical polishing (CMP), one of the dominant technology for ULSI planarization, is used to flatten the micro electro-mechanical systems (MEMS) structures. The objective of this paper is to achieve good planarization of the deposited film and to improve deposition efficiency of subsequent layer structures by using surface-micromachining process in MEMS technology. Planarization characteristic of poly-Si film deposited on thin oxide layer with MEMS structures is evaluated with different slurries. Patterns used for this research have shapes of square, density, line, hole, pillar, and micro engine part. Advantages of CMP process for MEMS structures are observed respectively by using the test patterns with structures larger than 1 urn line width. Preliminary tests for material selectivity of poly-Si and oxide are conducted with two types of silica slurries: $ILD1300^{TM}\;and\;Nalco2371^{TM}$. And then, the experiments were conducted based on the pretest. A selectivity and pH adjustment of slurry affected largely step heights of MEMS structures. These results would be anticipated as an important bridge stone to manufacture MEMS CMP slurry.

• Korean Chemical Engineering Research
• /
• 제45권6호
• /
• pp.611-618
• /
• 2007

아민기로 코팅된 단분산 폴리스티렌 입자를 제조한 뒤 톨루엔-물로 구성된 유중수 액적(oil-in-water emulsion) 내부에서 입자를 자기 조립(self-assembly)시켜 다양한 다면체(polyhedra) 구조의 콜로이드 클러스터(colloidal cluster)를 제조하였다. 콜로이드 클러스터의 표면에서 솔-젤(sol-gel) 반응을 유발한 뒤 표면이 실리카로 코팅된 복합(composite) 콜로이드 클러스터를 제조할 수 있었고 이를 주형(template)으로 활용하여 고온 소성에 의해 내부의 폴리스티렌 입자를 제거하고 마이크로미터 크기의 다양한 구조의 비구형상 공동 입자(hollow particle)를 제조하였다. 밀도구배원심분리법 (density gradient centrifugation)에 의해 폴리스티렌 구성 입자의 수와 구조가 균일한 콜로이드 클러스터를 제조할 수 있었으며 표면 솔-젤 반응에 의해 비구형상 구조의 공동 입자를 제조하였다.

• Applied Biological Chemistry
• /
• 제27권1호
• /
• pp.40-44
• /
• 1984

고등식물(高等植物)이 균근균(菌根菌)과 공생관계(共生關係)를 이루면 생장촉진(生長促進)의 특이현상(特異現象)을 보이는데, 이러한 생리현상(生理現象)을 구명(究明)하기 위하여 침엽수의 외생균근(外生菌根)의 주형성균(主形成菌)인 Pisolithus tinctorius가 생산(生産)하는 GA활성(活性)을 검색(檢索)하였다. P. tinctorius 배양액(培養液)에서 추출(抽出), 용매분획(溶媒分劃), Sephadex LH-20관(管)크로마토그래피, Silica gel분배(分配) 크로마토그래피, TLC에 의(依)해 분획(分劃), 정제(精製)된 추출물(抽出物)을 단은방주(短銀坊主)를 사용(使用)한 생물검정(生物檢定)에 의(依)해 GA활성(活性)을 조사한 결과 Silica gel 분배(分配) 크로마토그래피의 초산(醋酸)에칠 $30{\sim}60%$ 용출구(溶出區)와 TLC의 Rf $0.1{\sim}0.4,\;0.6{\sim}0.8$에서 GA활성(活性)을 나타냈다. GA활성(活性)은 유묘개체당(幼苗個體當) 배양추출액(培養抽出液)의 처리양을 증가하면 활성(活性)도 따라서 증가하였으며, 활성(活性)은 P. tinctorius 100ml당(當) $GA_3$ 0.1ng에 상당(相當)하였다.

• Design & Manufacturing
• /
• 제13권4호
• /
• pp.10-16
• /
• 2019

Semiconductor chip is bonded to the substrate by melting solder bumps. In general, the chip bonding is applied by a Reflow process or a Thermo-Compression(TC) bonding process. In this paper, we introduce a Laser Assisted Thermo-Compression bonding (LATCB) process to improve the anxiety of the existing process(Reflow, TC bonding). In the LATCB process, the chip is bonded to the substrate by irradiating a laser with a uniform energy density in the same area as the chip to melt only the solder bumps and press the chip with a Transparent Compression Module (TCM). The TCM consists of a fused silica header for penetrating the laser and pressurizing the chip, and a piezoelectric actuator (P.A.) coupled to both ends of the header for micro displacement control of the header. In addition, TCM is a structure that can pressurize the chip and deliver it to the chip and solder bumps without losing the energy of the laser. Fused silica, which is brittle, is vulnerable to deformation, so the header may be damaged when an external force is applied for pressurization or a displacement differenced is caused by piezoelectric actuators at both ends. On the other hand, in order to avoid interference between the header and the adjacent chip when pressing the chip using the TCM, the header has a notch at the bottom, and breakage due to stress concentration of the notch is expected. In this study, the thickness and notch length that the header does not break when the external force (500 N) is applied to both ends of the header are optimized using structural analysis and Coulomb-Mohr failure theory. In addition, the maximum displacement difference of the P.A.s at both ends where no break occurred in the header was derived. As a result, the thickness of the header is 11 mm, and the maximum displacement difference between both ends is 8 um.

• Structural Engineering and Mechanics
• /
• 제32권5호
• /
• pp.685-699
• /
• 2009

Current research and development of high performance concrete, together with study of phenomena that are pertinent to impact resistance, have lead to a new generation of barriers with improved properties to resist impact loads. The paper reviews major properties and mechanisms that affect impact resistance of concrete barriers as per criteria that characterize the resistance. These criteria are the perforation limit, penetration depth and the amount of front and rear face damage. From the long-known, single strength parameter that used to represent the barriers' impact resistance, more of the concrete mix ingredients are now considered to be effective in determining it. It is shown that the size and hardness of the aggregates, use of steel fibers and micro-silica have different effects on performance under impact and on the resistance. Additional pertinent phenomena, such as the rate and size effects, confinement and local versus global response, are pointed out with their reference to possible future developments in the design of impact resisting concrete barriers.

• 한국정보디스플레이학회:학술대회논문집
• /
• 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
• /
• pp.552-554
• /
• 2004

Barrier ribs of plasma display panel (PDP) are glass matrix composite reinforced with alumina particles. Mechanical properties of the ribs are very crucial for the improvement in reliability of the panel as the ribs might fracture during transportation and service. In this study, therefore, the effects of filler type and content on the mechanical properties of the ribs were investigated. The fillers used include $Al_2O_3$, $TiO_2$, $ZrO_2$ and fused silica. The content of the filler was changed from 0 to 40 vol.%. The mechanical properties of the ribs measured were hardness, Young's modulus, fracture toughness, and 3-point bending modulus. The fracture toughness evaluated by micro-Vicker's indentation of the composites, in general, was measured to increase with the content of the filler until the sintered density does not decrease significantly. The improvement, however, was dependent on the type of filler employed.

• 한국콘크리트학회:학술대회논문집
• /
• 한국콘크리트학회 2001년도 가을 학술발표회 논문집
• /
• pp.787-792
• /
• 2001

The chloride ion penetrating into concrete is classified as the fixed chloride ion being bound in reacting to cement hydrate and the free chloride ion having a direct effect on rebar corrosion because being in solution inside porosity of concrete. Therefore, in order to study the diffusion properties of chloride ion, it is needed to evaluate binding chloride ion in concrete. In this study, we tried to give a fundamental information on diffusion of chloride ion in concrete with mineral admixtures through analysis of micro-structure transformations in concrete and effects on binding of chloride ion in cement paste when mixed with fly-ash, blast furnace slag, silica fume etc. which are used to improve durability and permeability of concrete

• 동력기계공학회지
• /
• 제19권3호
• /
• pp.5-10
• /
• 2015

Femtosecond laser machining has been applied for creating a sensor function in silica glass optical fibers. Femtosecond laser pulses make it possible to fabricate micro structures in processed regions of a very thin glass fiber line because femtosecond laser pulses can extremely minimize thermal effects. With the laser machining to optical fiber using a single shot of 210-fs laser at a wavelength of 800 nm, it was observed that a processed region surrounded a thin layer which seemed to be a hollow cavity monitored by scanning electron microscopy (SEM). This study aims at a theoretical investigation for the processed region by using a numerical analysis in order to embed sensing function to optical fibers. Numerical methods based finite element method (FEM) has been used for an optical waveguide modeling. This report suggests two types modeling and describes a comparative study on optical losses obtained by the experiment and the numerical analysis.

• 한국응용약물학회:학술대회논문집
• /
• 한국응용약물학회 2006년도 Spring Conference
• /
• pp.95-105
• /
• 2006

Alzheimer's disease (AD) is an irreversible, progressive brain disorder that is characterized by dementia. Amounts of p25 and cdk5 kinase activity are specifically upregulated in AD patient's brain samples. Considerable evidence now points importance of p25/cdk5 in generation of A$\beta$ peptides and hyperphosphorylation of tau linking amyloid plaques and neurofibrillary tangles, two major pathological hallmarks of AD. We demonstrated that P25/CDK5 phosphorylates BACE1, the first step protease to produce A$\beta$. P25/CDK5 inhibitors to reduce BACE1 phosphorylation and the secretion of A$\beta$ are screened through in silica, in vitro, and cell-based assays. Out of 4.3 million chemicals we finally selected two compounds to have IC50 of 10 microM in cell-based assays. The inhibitors block Tau phosphrorylation as well as BACE1 phosphorylation. In conclusion P25 should be one of the best targets for AD therapeutics.

• 한국광물학회지
• /
• 제9권2호
• /
• pp.93-101
• /
• 1996

Behavior of platinum group elements during crystallization within ore magma is of interest. In this study platinum is selected and its mineralogical and geochemical behavior in the presence of antimony and tellurium is investigated at 600$^{\circ}C$. High purity Pt, Sb, and Te are used as starting material and silica quartz tubings are as container. Rection products have been examined by use of ore microscope, X-ray diffractometer, electron microprobe analyser and micro-indentation hardness tester. stable phases at 600$^{\circ}C$ are platinum (Pt), Pt5Sb, Pt3Sb, PtSb, stumpflite (PtSb), geversite (PtSb), PtTe, Pt3Te4, Pt2Te3, moncheite (PtTe2), tellurantimony (Sb2Te3), and antimony (Sb). Geversite is the mineral showing the most significant extent of solid solution by up to 27 at% between Sb and Te elements. Isothermal section of 600$^{\circ}C$ is established in this study. It is noted that platinum cannot coexists with stumpflite or geversite under equilibrium condition, and stumpflite composition in equilibrium with geversite may be used as geothermometer.