• Title/Summary/Keyword: micro-patterning

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Observation of Growth Behavior of Induced Hillock for Nano/Micro Patterning on Surface of Borosilicate with Etching Time and Load (보로실리케이트 표면의 나노/마이크로 패터닝을 위한 식각 시간, 하중에 따른 유기 힐록의 성장거동 관찰)

  • Cho S. H.;Youn S. W.;Kang C. G.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.10a
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    • pp.182-185
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    • 2005
  • Indentation pattern and line pattern were machined on borosilicate(Pyrex 7740 glass) surface using the combination of mechanical machining by $Nanoi-indenter\circledR$ XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched and indented Pyrex 7740 glass surface was investigated. In this study, effects of indentation and scratch process with etching time on the morphologies of the indented and scratched surfaces after isotropic etching were investigated from an angle of deformation energies.

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One Step Fabrication of Organic Nanowires by using Direct Printing Method

  • Hwang, Jae.-K.;Sung, Myung-M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.158-158
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    • 2011
  • A wide range of techniques for the direct-printing of functional materials have been developed for the fabrication of micro- and nanoscale structures and devices. Here we report a new direct patterning method, liquid bridge-mediated nanotransfer molding (LB-nTM), for the formation of two- or three-dimensional structures with feature sized as small as tens of nanometers over large areas up to 4". LB-nTM is based on the direct transfer of various materials from a mold to a substrate via a liquid bridge between them. The LB-nTM method was applied to the preparation of organic nanowire FETs on flexible substrates.

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Soft-lithography for Preparing Patterned Liquid Crystal Orientations

  • Kim, Hak-Rim;Jung, Jong-Wook;Shin, Min-Soo;Kim, Myung-Eun;Lee, You-Jin;Kim, Jae-Hoon
    • Journal of Information Display
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    • v.8 no.2
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    • pp.5-9
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    • 2007
  • We demonstrate novel soft-lithographic techniques for preparing patterned liquid crystal (LC) orientations at an alignment layer. By controlling patterning conditions such as wetting property and operating temperature depending on polymeric materials, multi-directional or modified LC alignment conditions can be simply achieved.

Patterning of Diamond Micro-Columns

  • Cho, Hun-Suk;Baik, Young-Joon;Chung, Bo-Keon;Lee, Ju-Yong;Jeon, D.;So, Dae-Hwa
    • The Korean Journal of Ceramics
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    • v.3 no.1
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    • pp.34-36
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    • 1997
  • We have fabricated a patterned diamond field emitter on a silicon substrate. Fine diamond particles were planted on a silicon wafer using conventional scratch method. A silicon oxide film was deposited on the substrate seeded with diamond powder. An array of holes was patterned on the silicon oxide film using VLSI processing technology. Diamond grains were grown using a microwave plasma-assisted chemical vapor deposition. Because diamond could not grow on the silicon oxide barrier, diamond grains filled only the patterned holes in the silicon oxide film, resulting in an array of diamond tips.

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Micro Patterning of Roll using Fast Tool Servo System (FTS시스템을 이용한 룰외 미세 패턴 가공)

  • Lu, Hong;Choi, Soo-Chang;Lee, Sang-Min;Park, Chun-Hong;Lee, Deug-Woo
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.10 no.6
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    • pp.22-26
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    • 2011
  • The application of fast tool servo (FTS) for diamond turning has been investigated extensively. This paper focuses on the fabrication of the sinusoidal microstructure on a roller, which generated by a piezoelectric-assisted FTS. The influence of the machining parameters on the microstructure configuration was investigated. The experiment results point out that the configuration of the machined microstructure depends mainly on the spindle speed, the diameter of roller and the driving frequency of FTS. The calculation method of the microstructure dimension was reported. The turning test results show that the diamond tool can be moved up to 1kHz without any reinjected vibration in the machining and the peak-to-valley amplitude of the machined sinusoidal microstructure is about 12<${\mu}m$

A Study of Substrate Surface Treatment and Metal Pattern Formation using Inkjet Printing Technology (잉크젯 프린팅 기술을 이용한 기판 표면처리와 금속 패턴 형성에 관한 연구)

  • Jo, Yong-Min;Park, Sung-Jun
    • Journal of ILASS-Korea
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    • v.17 no.1
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    • pp.20-26
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    • 2012
  • Inkjet printing is one of the direct writing technologies and is able to form a pattern onto substrate by dispensing droplets in desired position. Also, by inkjet technology manufacturing time and production costs can be reduced, and procedures can be more efficient. To form a metal pattern, it must be harmonized with conductive nano ink, printing process, sintering, and surface treatment. In this study, micro patterning of conductive line has been investigated using the piezoelectric printhead driven by a bipolar voltage signal is used to dispense $20-40{\mu}m$ diameter droplets and silver nano ink which consists of 50 nm silver particles. In addition, hydrophobic treatment of surface, overlap printing techniques, and sintering conditions with changing temperature and times to achieve higher conductivity.

Fabrication of an Electromagnetic Actuator with the Planar Coil (평면 코일을 이용한 전자 구동기 제작)

  • Jeong, Hyun-Ku;Kwon, Ki-Young;Jeong, Ok-Chan;Yang, Sang-Sik
    • Proceedings of the KIEE Conference
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    • 1999.07g
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    • pp.3295-3297
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    • 1999
  • This paper presents the fabrication of an electromagnetic micro actuator consisting of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The copper coil is fabricated by electroplating and patterning. The frequency response of the actuator are obtained using a laser vibrometer. When the input voltage is 3 V, the DC deflection is 5 ${\mu}m$, and the resonance frequency is about 35 Hz. Also, the mechanical sensitivity of the actuator diaphragm is 69 ${\mu}m/V$.

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Micromachined Properties of a polyimide by a femtosecond laser (펨토초 레이저에 의한 폴리이마이드 가공 특성)

  • Min, Chul-Ki;Lee, Man-Seop
    • Laser Solutions
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    • v.11 no.2
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    • pp.20-25
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    • 2008
  • Polyimide is one of the useful materials in industry. The surface treatment of polyimide by a femtosecond laser can help accurate and fine fabrication of microstructure. And it can change the transmittance and reflectance of polyimide, too. We put femtosecond laser pulses on polyimide for rectangular or square type surface treaments and observe the change of transmittance and reflectance. Pulsewidth is 172 fs, laser power changes for fabrication are from 5 mW to 20 mW, and transmittance and reflectance are measured under 20m W, 300m W, and 920 mW. Pulse patterning is stable and almost no unwanted surface damage is shown. As power increases, working depth increases but working line width does not increase significantly. As speed changes, they also have same results. It shows the efficiency of a femtosecond laser is good and thermal damage is small for polyimide.

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Growth behavior of copper on micro patterning copper plating by anodic and cathodic electrode shape (미세배선 구리도금에서 양극.음극 형상에 따른 구리의 성장 거동)

  • Hwang, Yang-Jin;Lee, Gyu-Hwan
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2009.10a
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    • pp.168-168
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    • 2009
  • 핸드폰, 노트북과 같이 최신경량 전자재료로 만들어지는 전자제품의 수요가 급증함에 따라 반도체 배선의 폭이 점점 작아지고, 이로 인해 프린팅공정을 이용한 미세 배선기술이 활발히 개발되고 있다. 이에 본 연구는 미세배선에 높은 전기전도도를 부여하기 위하여 전기도금을 실시하였으며, 균일한 도금층을 얻기 위하여 첨가제에 따른 분극거동을 분석하고 이를 바탕으로 양극 및 음극 형상에 따른 구리의 성장 거동을 시뮬레이션을 통하여 분석하였다. 균일한 증착을 위해서는 첨가제의 역할도 중요하지만 양극과 음극의 형상에 따라서도 구리성장 거동에 영향을 미치는 것을 알 수 있었다.

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Bouncing Phenomena of Micro-droplet Train in Inkjet Printing (잉크젯 프린팅에서 발생하는 연속 미소 액적의 바운싱 현상)

  • Ara Jo;Hyoungsoo Kim
    • Journal of the Korean Society of Visualization
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    • v.21 no.1
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    • pp.26-30
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    • 2023
  • Interaction of a droplet and substrate is important to determine the coating and final deposition pattern in inkjet printing system. In particular, an accurate deposition of the droplet should be guaranteed for high-resolution patterning. In this study, we performed high-speed shadowgraph experiments on droplet train impact in inkjet system. From the high-speed images, we observed an unexpected bouncing phenomenon. We have found two factors affecting bouncing regime; the Weber number and the curvature of deposited droplet. Experimental results indicate that there is a critical curvature diameter of deposited droplet, which splits into bouncing and merging regime. From this result, we obtained a power-law behavior between the Weber number and the curvature. The understanding of bouncing phenomena helps to improve the accuracy and productivity of inkjet printing.