• Resources Recycling
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• v.26 no.6
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• pp.97-101
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• 2017

Metal foams have a cellular structure consisting of a solid metal containing a large volume fraction of pores. In particular, open pores which are penetrable pores are necessary for industrial applications such as in high temperature filters and as support for catalysts. In this study, Fe foam with greater than 90% porosity and 2-mm pore size was successfully fabricated using a slurry coating process and the pore properties were characterized. The Fe and $Fe_2O_3$ powder mixing ratios were controlled to produce Fe foam samples with different pore sizes and porosity. First, the slurry was prepared through the uniform mixing of powders, distilled water, and polyvinyl alcohol(PVA). The amount of slurry coated with the PU foam increased with increasing $Fe_2O_3$ mixing powder ratio, but the shrinkage and porosity of the Fe foams decreased, respectively, with increasing $Fe_2O_3$ mixing powder ratio.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.5
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• pp.191-195
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• 2002

Chemical mechanical Polishing (CMP) process is widely used for the global planarization of inter-metal dielectric (IMD) layer and inter-layer dielectric (ILD) for deep sub-micron technology. However, as the IMD and ILD layer gets thinner, defects such as micro-scratch lead to severe circuit failure, which affect yield. In this paper, for the improvement of CMP process, deionized water (DIW) pressure, purified $N_2$ ($PN_2$) gas, point of use (POU) slurry filler and high spray bar (HSB) were installed. Our experimental results show that DW pressure and P$N_2$ gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. Also, the filter installation in CMP polisher could reduce defects after CMP process, it is shown that slurry filter plays an important role in determining consumable pad lifetime. The filter lifetime is dominated by the defects. However, the slurry filter is impossible to prevent defect-causing particles perfectly. Thus, we suggest that it is necessary to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of slurry filter Finally, we could expect the improvements of throughput, yield and stability in the ULSI fabrication process.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2251-2253
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• 2000

MEMS기술을 이용하여 단층 실리콘 나이트라이드($Si_{3}N_4$) 다이아프램을 제조하고, 이 다이아프램상에 저항성 가열 진공증착법과 고주파 마그네트론 스퍼터링법을 이용하여 차례로 In막과 ZnO막을 증착하고, In의 도핑을 위해 열처리하여 $NH_3$ 가스 감지용 마이크로센서를 제작하였다. 감지막의 열처리온도에 따른 구조적 및 전기적 특성은 XRD, SEM, AFM, 4-point probe 및 Electrometer를 통하여 각각 조사하였다. 제작된 센서의 열처리온도와 인가전력에 따라 $NH_3$ 가스에 대한 감도, 선택성 및 시간응답 특성을 조사하였다. 감지막 두께 3000 ${\AA}$, 열처리온도 400$^{\circ}C$로 제조된 마이크로 센서가 히터 인가전력 366 mW에서 100 ppm의 $NH_3$ 가스농도에서 대하여 16 %, 350 ppm의 가스농도에서 대하여 23 %의 가장 우수한 감도를 나타내었다. 그러나 CO 가스 및 $NO_x$ 가스에 대한 감지특성은 관찰되지 않았다.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.1
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• pp.1-6
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• 2009

Air core based transformers have been designed, simulated and fabricated by using micromachining process for the application of wireless power transmission with the range of frequency from 1 GHz to 20 GHz. Fabricated transformers are the types of solenoid transformers with primary and secondary coils. the size of fabricated transformer is $1.1{\times}1.5{\sim}2.15\;mm$ including ground shield. Transformers have been measured by dividing two groups based on the turns ratio between primary coil and secondary coil which are 1:1 transformers(the number of turns of primary coil and secondary coil: 3/3, 5/5, 7/7) and l:n transformers(the number of turns of primary coil and secondary coil: 3/3, 3/6, 3/9). As a result of the measurement, the lowest insertion loss of transformers ranged from 2 dB to 2.8 dB according to the number of turns between primary coil and secondary coil. And the lowest insertion loss from the transformers was measured at the frequency from 7 GHz to 11 GHz according to the number of turns between primary coil and secondary coil. Based on the measurement data from the microfabricated transformers, the transformer with the 3/3 turns in the primary coil and secondary coil showed best performance compared to others in terms of lowest insertion loss, lowest insertion loss frequency and bandwidth.

• Journal of IKEEE
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• v.17 no.2
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• pp.182-188
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• 2013

Using a ceramic target ZnO:In with In doping concentration of 2%, hetero-junctions of n-ZnO:In/p-Si and p-ZnO:(In, N)/n-Si were fabricated by depositing Indium doped n - type ZnO (ZnO:In or IZO) and Indium-nitrogen co-doped p - type ZnO (ZnO:(In, N)) films on wafers of p-Si (100) and n-Si (100) by DC magnetron sputtering, respectively. These films with the best electrical and optical properties were then obtained. The micro-structural, optical and electrical properties of the n-type and p-type semiconductor thinfilms were characterized by X-ray diffraction (XRD), RBS, UV-vis; four-point probe resistance and room-temperature Hall effect measurements, respectively. Typical rectifying behaviors of p-n junction were observed by the current-voltage (I-V) measurement. It shows fairly good rectifying behavior with the fact that the ideality factor and the saturation current of diode are n=11.5, Is=1.5108.10-7 (A) for n-ZnO:In/p-Si hetero-jucntion; n=10.14, Is=3.2689.10-5 (A) for p-ZnO:(In, N)/n-Si, respectively. These results demonstrated the formation of a diode between n-type thin film and p-Si, as well as between p-type thin film and n-Si..

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.41 no.8
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• pp.37-44
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• 2004

This paper describes a new GaAs-based surface-micromachined microstrip line supported by dielectric post and air-gapped signal line with ground metal. This new type of dielectric-supported air-gapped microstripline(DAML) structure is developed using surface micromachining techniques to provide easy means of airbridge connection between the signal lines and to archive low losses at millimeter-wave frequency band with wide impedance range. Each DAMLs with the length of 5 mm are fabricated and the measured characteristics are compared with those of the conventional microstrip transmission line. These transmission lines are composed of 10 ${\mu}{\textrm}{m}$ height of signal line, post size of 10 ${\mu}{\textrm}{m}$ ${\times}$ 10 ${\mu}{\textrm}{m}$ and post height of 9 ${\mu}{\textrm}{m}$. By elevating the signal lines from the substrate using the micromachining technology, the substrate dielectric loss can be reduced Compared with of the conventional microstrip transmission line showing 7.5 dB/cm loss at 50 GHz, the loss can be reduced to 1.1 dB/cm loss at 50 GHz.

• Polymer(Korea)
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• v.33 no.6
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• pp.620-624
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• 2009

Biomedical metal implants have been used clinically for replacement, restoration, or improvement of injury bodies based on high mechanical properties, but it has some risks such as the inflammatory, late thrombosis, or restenosis due to the low biocompatibility and toxicity. In various techniques of surface treatment developed to preserve these drawbacks, this study examined the electrospray coating technology with biodegradable poly (lactic-co-glycoic acid) (PLGA) on metal surface. Based on fundamental examination of electrospraying and solution parameters, the surface morphology of coated film was closely related to the boiling point of solvent, in-flight distance, and droplet size. The thickness of polymer film was linearly proportional to the emerged volume. This result exhibits that the polymeric droplets were continuously deposited on the polymer film. Therefore, the electrospray coating technology might be applied into the fabrication of single/multi-layered polymer film in nano-/micro-thickness and the control of the topology for biomedical metal implants including stents.

• Korean Journal of Optics and Photonics
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• v.18 no.3
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• pp.216-220
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• 2007

A widely tunable add/drop filter composed of double ring resonators is implemented with high-index-contrast polymer waveguide. To enhance the productivity, directional couplers are designed to have good fabrication tolerance. The refractive indices of the core and cladding in the 1550 nm wavelength are 1.51 and 1.378, respectively. Drop response in comparison with neighborhood peak gets enhanced by more than 2.9 dB at the wavelength where both rings resonate. This filter can be used to build widely tunable laser diode through hybrid-integration with reflective SOA.

• KSBB Journal
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• v.22 no.6
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• pp.433-437
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• 2007

A constant desire has been to fabricate nanopatterns for biochip and the Ultraviolet-nano imprint lithography (UV-NIL) is promising technology especially compared with thermal type in view of cost effectiveness. By using this method, nano-scale to micro-scale structures also called nanopore structures can be fabricated on large scale gold plate at normal conditions such as room temperature or low pressure which is not possible in thermal type lithography. One of the most important methods in fabricating biochips, immobilizing, was processed successfully by using this technology. That means immobilizing proteins only on the nanopore structures based on gold, not on hardened resin by UV is now possible by utilizing this method. So this selective nano-patterning process of protein can be useful method fabricating nanoscale protein chip.

• Korean Chemical Engineering Research
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• v.54 no.2
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• pp.223-228
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• 2016

In this study, we described a simple and facile method to generate uniform microwells poly(dimethyl siloxane) (PDMS) microstamps through micro-molding for efficient, rapid and reliable cell patterning of adipocyte differentiation. In contrast to the conventional methods, the microstamp technologies are low expensive, non-toxic, and using a small amount of solution. Recently, Orlistat known as tetrahydrolipstatin is a prescription drug designed to treat obesity which is used to aid in weight loss and help to reduce overweight obesity. Here, 3T3-L1 cells were treated under various concentration manners of Orlistat $0.2{\mu}M{\sim}5.0{\mu}M$. and it was confirmed maximum 26.5% inhibition activity compared to control. Thus, we elucidated this platform can be used for the real-time analyzing of cell proliferation, adipocyte differentiation for evaluation of anti-obesity agents on cell chip. Furthermore, we except that this platform technology designed here might be readily be expanded to discover a wider variety of anti-obesity agents.