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Institute of Korean Electrical and Electronics Engineers (한국전기전자학회)
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Fabrication and characterization of n-IZO / p-Si and p-ZnO:(In, N) / n-Si thin film hetero-junctions by dc magnetron sputtering

  • Dao, Anh Tuan (Department of Applied Physics, Faculty of Physics and Engineering Physics, University of Science) ;
  • Phan, Thi Kieu Loan (Department of Applied Physics, Faculty of Physics and Engineering Physics, University of Science) ;
  • Nguyen, Van Hieu (Department of Physics and electronics, Faculty of Physics and Engineering Physics, University of Science) ;
  • Le, Vu Tuan Hung (Department of Applied Physics, Faculty of Physics and Engineering Physics, University of Science)
  • Received : 2013.05.13
  • Accepted : 2013.06.17
  • Published : 2013.06.30
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Abstract

Using a ceramic target ZnO:In with In doping concentration of 2%, hetero-junctions of n-ZnO:In/p-Si and p-ZnO:(In, N)/n-Si were fabricated by depositing Indium doped n - type ZnO (ZnO:In or IZO) and Indium-nitrogen co-doped p - type ZnO (ZnO:(In, N)) films on wafers of p-Si (100) and n-Si (100) by DC magnetron sputtering, respectively. These films with the best electrical and optical properties were then obtained. The micro-structural, optical and electrical properties of the n-type and p-type semiconductor thinfilms were characterized by X-ray diffraction (XRD), RBS, UV-vis; four-point probe resistance and room-temperature Hall effect measurements, respectively. Typical rectifying behaviors of p-n junction were observed by the current-voltage (I-V) measurement. It shows fairly good rectifying behavior with the fact that the ideality factor and the saturation current of diode are n=11.5, Is=1.5108.10-7 (A) for n-ZnO:In/p-Si hetero-jucntion; n=10.14, Is=3.2689.10-5 (A) for p-ZnO:(In, N)/n-Si, respectively. These results demonstrated the formation of a diode between n-type thin film and p-Si, as well as between p-type thin film and n-Si..

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