• 마이크로전자및패키징학회지
• /
• 제22권4호
• /
• pp.31-36
• /
• 2015

전자소자의 다기능, 고밀도, 고성능, 그리고 소형화는 전자 패키지 기술에 초미세 피치 플립 칩, 3D 패키지, 유연 패키지, 등 새로운 기술 패러다임 전환을 가져왔으며, 이로 인해 패키지 된 칩의 열 관리는 소자의 성능을 좌우하는 중요한 요소로 대두되고 있다. Heat sink, heat spreader, TIM, 열전 냉각기, 등 많은 소자 냉각 방법들 중 본 연구에서는 냉매를 이용한 on-chip 액체 냉각 모듈을 Si 웨이퍼에 제작하고, 마이크로 채널 디자인에 따른 냉각 효과를 분석하였다. 마이크로 채널은 딥 반응성 이온 에칭을 이용하여 형성하였고, 3 종류 디자인(straight MC, serpentine MC, zigzag MC)으로 제작하여 마이크로 채널 디자인이 냉각 효율에 미치는 영향을 관찰하였다. 가열온도 $200^{\circ}C$, 냉매 유동속도 150 ml/min의 경우에서 straight MC가 약 $44^{\circ}C$의 높은 냉각 전후의 온도 차를 보였다. 냉매의 흐름과 상 변화는 형광현미경으로 관찰하였으며, 냉각 전후의 온도 차는 적외선현미경을 이용하여 분석하였다.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2007년도 춘계학술대회B
• /
• pp.2200-2205
• /
• 2007

In order to investigate the variation on a heat transfer coefficient during evaporation of $CO_2$, basic experiment on the evaporation heat transfer characteristics in a horizontal micro-channel tube was performed. Hydraulic diameters of micro-channels were 0.68 and 1.46 mm. The experiment apparatus consisted of a test section, a DC power supply, a heater, a chiller, a mass flow meter, a pump and a measurement system. Experiments were conducted for various mass fluxes of 300 to 800 kg/$m^2s$, heat fluxes of 10 to 40 kW/$m^2$ and saturation temperatures of -5 to 5$^{\circ}C$. With the increase heat flux, the evaporation heat transfer coefficient increased. And the significantly change of the heat transfer coefficient was observed at any heat flux and mass flux. As the saturation temperature increased and the hydraulic diameter decreased, the heat transfer coefficient increased.

• Journal of Mechanical Science and Technology
• /
• 제20권8호
• /
• pp.1284-1291
• /
• 2006

Single phase pressure drops in micro tubes were investigated through an experimental measurement and a numerical simulation. Experimental Po was obtained in circular micro tubes with 87 and $118{\mu}m$ diameter with distilled water. Experiments were carried out in laminar flow region with varying the Re 15-450 for the $87{\mu}m$ diameter tubes and 60-1300 for the $118{\mu}m$ diameter tube. No early transition from laminar to turbulent flow was detected for the experimental range. The computational estimation of pressure drop in the $87{\mu}m$ diameter tube was performed with the aid of CFD software. Boundary conditions from experiments were used for the numerical simulation. The results of experimental and numerical studies showed a good agreement with the conventional macro theory.

• 한국가시화정보학회지
• /
• 제8권3호
• /
• pp.29-34
• /
• 2010

This paper proposes a design method to provide uniform flow in a microreactor. Uniform momentum approach is adopted with 10 pillars before and after the chamber having a different slope inlet channel. The slope and number of pillars are two factors to make a uniform flow in the microreactor, covering the hexagonal gold layer. The CFD analysis about the designed microreactor is carried out and the velocity vector field measurements are made in the fabricated microreactor by micro PIV technique. The uniformity of microreactor flow was confirmed by both numerical simulation and experimental results.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2002년도 학술대회지
• /
• pp.423-426
• /
• 2002

A custom micro-PIV optics assembly has been used to measure the flow field inside a T-shaped microchannel. The micro-PIV system consists of microscope objectives of various magnifications, a dichroic cube, and an 8-bit CCD camera. Fluorescent particles of diameters 620nm have been used with a Nd:YAG laser and color filters. A programmable syringe pump with Teflon tubings were used to inject particle-seeded distilled water into the channel at flow rates of $420,\;40,\;60{\mu}L/hr$. The microchannels are fabricated with PDMS with a silicon mold, then $O_2-ion$ bonded onto a slide glass. Results show differences in flow characteristics and resolution according to fluid injection rates, and magnifications, respectively. The results show PIV results with vector-to-vector distances of $2{\mu}m$ with 32 pixel-square interrogation windows at $50{\%}$ overlap.

• 한국공작기계학회논문집
• /
• 제17권5호
• /
• pp.95-100
• /
• 2008

An active micro-mixer, which is composed of an oscillating micro-stirrer in the micro-channel to provide effective mixing was optimized. The effects of molecular diffusion and disturbance by the stirrer were considered with regard to two types of mixer models: the simple straight micro-channel and micro-channel with an oscillating stirrer. Two types of mixer models were studied by analyzing mixing behaviors such as their interaction after the stirrer. The mixing was calculated by Lattice Boltzmann methods using the D2Q9 model. In this study, the time-averaged mixing index formula was used to estimate the mixing performance of time-dependent flow. The mixing indices of the two models were compared. From the results, it was found that the mixer with an oscillating stirrer was much more enhanced and stabilized. Therefore, an approximate optimization of an active micro-mixer with an oscillating stirrer was performed using Kriging method with OLHD(Optimal Latin Hypercube Design) in order to determine the optimal design variables. The design parameters were established as the frequency, the length and the angle of the stirrer. The optimal values were obtained as 1.0346, 0.66D and $\pm45^{\circ}$, respectively. It was found that the mixing index of the optimal design increased by 88.72% compared with that of the original design.

• 한국가시화정보학회:학술대회논문집
• /
• 한국가시화정보학회 2007년도 추계학술대회
• /
• pp.55-58
• /
• 2007

To improve the conventional optical chromatography, the continuous particle separator, the cross-type optical chromatography, is fabricated using micro-channel and fiber optics. A laser beam irradiates into the liquid solution containing particles in the perpendicular to the liquid flow direction. The different sized polystyrene latex micro-spheres, $2.0\;{\mu}m\;{\pm}\;0.02\;{\mu}m$, $5.0\;{\mu}m\;{\pm}\;0.05\;{\mu}m$, and $10.0\;{\mu}m\;{\pm}\;0.09\;{\mu}m$ diameter, are separated in cross-type optical chromatography. The separated particles are delivered to down stream in the micro-channel maintaining the retention distance continuously. The measured retention distances for different sized particles well agree with theoretical predictions.

• 한국기계가공학회지
• /
• 제20권11호
• /
• pp.121-126
• /
• 2021

In this study, the effect of thermal contact resistance between pin-channel tubes on the heat transfer characteristics was analytically examined around the channel tubes with the pins attached to two consecutive arranged channel pipes. The numerical results showed that the heat transfer coefficient decreased geometrically as the thermal contact resistance increased, and the corresponding temperature change on the contact surface increased as the thermal contact resistance increased. The thinner the pin, the more pronounced the geometric drop in the heat transfer coefficient. It was confirmed that the higher the height of the pin, the higher was the heat transfer coefficient, however, the greater the size of the thermal contact resistance, the smaller was the heat transfer coefficient. It was found that the temperature change in the inner wall of the channel tube did not significantly affect the heat transfer characteristics owing to the thermal contact resistance. Furthermore, the velocity of air at the entrance of the channel tube was proportional to the heat transfer coefficient due to a decrease in the convective heat resistance corresponding to an increase in the flow rate.

• 대한기계학회:학술대회논문집
• /
• 대한기계학회 2008년도 추계학술대회A
• /
• pp.1902-1907
• /
• 2008

The current work presents a design and fabrication technique for a microchannel system to measure the local temperature distribution inside microchannel. This micro channel system fabricated by MEMS technique is integrated with a heater and an array of temperature sensors so that detailed heat transfer phenomena inside micro-scale channel can be studied. Materials widely used in semiconductor process were selected to fabricate a heater and temperature sensors on a silicon wafer. On these heater and sensors a channel wall was fabricated with SU-8. The friction constant and the local Nusselt number distribution measured for the deionized water flow in the microchannel is presented.

• 한국기계가공학회지
• /
• 제18권7호
• /
• pp.8-13
• /
• 2019

As increasing demand for precise machining in advanced disciplines, especially in semi-conductor, aeronautical and automotive industries, the magnetic abrasive deburring(MAD) which is able to eliminate micro-sized burr on complex surface in less time has drawn the attention in the last decades. However, the performance of MAD is subject to shape and size of a tool. Therefore, this study aim to identify deburring behavior of MAD in U-type flow channel by measuring the length rate of burr removal in radial distance of the cylindrical tool under four process factors. In order to evaluate the deburring effect of MAD on the surface, finishing regions are divided based on center of the circular cutting tool. As a results, it was defined that the amount of burr removal in a downward direction moving toward flow channel from the top surface was higher than upward direction. This is because the magnetic abrasives were detached from magnetic lines of force due to geometrical shape.