• Journal of the Korean Society for Precision Engineering
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• v.21 no.4
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• pp.24-31
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• 2004

The objective of this work is to suggest a mastless pattern fabrication technique using the combination of machining by Nanoindenter(equation omitted) XP and HF wet etching. Sample line patterns were machined on a borosilicate surface by constant load scratch (CLS) of the Nanoindenter(equation omitted) XP with a Berkovich diamond tip, and they were etched in HF solution to investigate chemical characteristics of the machined borosilicate surface. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.21 no.4
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• pp.20-25
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• 2020

As nanoscience and nanotechnology advance, techniques for selective pattern growth have attracted significant attention. Silica nanoparticles (NPs) are used as a promising nanomaterials for bio-labeling, bio-imaging, and bio-sensing. In this study, silica NPs were synthesized by a sol-gel process using a modified Stöber method. In addition, the selective pattern growth of silica NPs was achieved by the surface functionalization of the substrate using a micro-contact printing technique of a hydrophobic treatment. The particle size of the as-synthesized silica NPs and morphology of selective pattern growth of silica NPs were characterized by FE-SEM. The contact angle by surface functionalization of the substrate was investigated using a contact angle analyzer. As a result, silica NPs were not observed on the hydrophobic surface of the OTS solution treatment, which was coated by spin coating. In contrast, the silica NPs were well coated on the hydrophilic surface after the KOH solution treatment. FE-SEM confirmed the selective pattern growth of silica NPs on a hydrophilic surface, which was functionalized using the micro-contact printing technique. If the characteristics of the selective pattern growth of silica NPs can be applied to dye-doped silica NPs, they will find applications in the bio imaging, and bio sensing fields.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.617-618
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• 2008

• Journal of the Korean Society for Precision Engineering
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• v.22 no.5 s.170
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• pp.16-20
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• 2005

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.508-515
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• 2005

We propose a fabrication method for refractive lens by variable velocity moving mask lithography and slit pattern. Distribution of exposure dose should be controlled for the curved photoresist surface that works as a refractive surface. We analyze theoretically the distribution of exposure dose by change of moving velocity, moving direction of mask and the shape of mask pattern, and confirm for the curved surface experimentally. The lens could have sag height of a few of hundreds ${\mu}m$, by using thick photoresist or Deep RIE process.

• Transactions of Materials Processing
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• v.20 no.1
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• pp.17-22
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• 2011

Recently, analyzing system is studying for applying to biomedical engineering field, actively. Micro fluidics control system has been manufactured using LIGA (Lithographie Galvanoformung und Abformung), Etching, Lithography and Laser etc. However, it is difficult that above-mentioned methods are applied to fabrication of precision mold master efficiently because of long processing time and rising cost of equipments. Therefore, in this study, micro EDM and micro WEDG system were developed to analyze machining characteristics with tool wear, surface roughness and process time. Then, optimal machining conditions could be obtained from the results of analysis. As the results, mold master of staggered herringbone mixer which has a high mixing efficiency, one of passive mixer of Lab-on-a-chip, could be fabricated from micro pattern(< 50um) using micro EDM successfully.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.55-59
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• 2007

Technologies of super-precision micro pattern mold machining and high-performance optical films manufacturing using thereof forms the basis of recent display industries which have developed remarkably. Especially, it is the light guide plates and high luminous intensity prism sheets at BLU or FLU in LCD and lenses at virtual keyboard's display to be manufactured by micro machining technology. One way the industry requires to do that is by developing high-performance light guide plates or films which are existing light guide plates, diffusion films and luminance enhancement prism films all in one. In this research effort, basic processing of the micro pyramid structure by shaping method is proposed. Experiments of mold machining of pitch $20{\mu}m$ tetrahedral pyramid and pitch $100{\mu}m$ trihedral pyramid using a $90^{\circ}$ diamond tool were conducted to identify a variety of machining features, such as cutting forces, conditions of the surface, shapes of chips, and influence of materials.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2009.10a
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• pp.254-258
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• 2009

In this paper, the low frequency vibration forming system is developed for micro-patterns formation on the metal substrate. many researchers have studied about micro-forming technologies such as micro deep drawing, press forming, forging, extrusion etc. for the formation of precise micro-patterns on the surface of metal substrates, multi-step forming process must be used to improve qualifies of the deformed patterns. Since the low frequency vibration forming system could easily deform the surface of metal substrates, several steps of multi-step forming process should be removed by using the low frequency vibration forming system. In order to find optimal process conditions, we have carried out low frequency vibration forming process with varying the vibration frequency from 110Hz to 500Hz.

• Journal of Industrial Technology
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• v.39 no.1
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• pp.33-39
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• 2019

This paper addresses effects of nanoscale structures on structural colors of micropatterned transparent substrate by light diffraction. Structural colors is widely investigated because they present colors without any chemical pigments. Typically structural colors is presented by diffraction of light on a micropatterned surface or by multiple interference of light on a surface containing a periodic or quasi-periodic nano-structures. In this paper, each structural colors induced by quasi-periodic nano-structures, periodic micro-structures, and nano/micro dual structures is measured in order to investigate effects of nanoscale and microscale structures on structural colors in the transparent substrate. Using pre-fabricated pattern mold and hot-embossing process, nanoscale and microscale structures are replicated on the transparent PMMA(Poly methyl methacrylate) substrate. Nanoscale and microscale pattern molds are prepared by anodic oxidation process of aluminum sheet and by reactive ion etching process of silicon wafer, respectively. Structural colors are captured by digital camera, and their optical transmittance spectrum are measured by UV/visible spectrometer. From experimental results, we found that nano-structures provide monotonic colors by multiple interference, and micro-structures induce iridescent colors by diffraction of light. Structural colors is permanent and unchangeable, thus it can be used in various application field such as security, color filter and so on.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.878-881
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• 2005

A Stereolithography technology is based on stacking of sliced layer from STL file that is converted from 3-dimensional CAD data. A microstereolithography technology is evolved from conventional stereolithography to fabricate microstructures. In this technology, we have to consider influence of resin flow to make refresh surface. To generate new resin surface, stage has to be moved downward deeply and upward to desired position. At this time, resin flow affects to refresh surface of resin. And resin viscosity is the key factor in simulation of resin flow. By setting optimal refresh time for resin surface, total fabrication time is reduced and there is no damage to fabricated layers. In this research, we simulate resin flow using CFD software and derive optimal stage moving time and dwelling time.