• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.343-346
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• 2000

This paper presents the characteristics of low consumption, high-response time hot-film type micro-flowsensors with SOI(Si-on-insulator) and trench structures. Output voltages increased due to increase of heat-loss from sensor to external. Compared with no-trench on the SOI structure, the micro-flowsensors with trench structures have properties of high output voltage and low consume power. Output voltage of micro-flowsensors with SOI and trench structures was 250 mV at $N_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time was about 85 msec when input flow was step-input.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.8
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• pp.658-662
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• 2001

This paper describes on the fabrication and characteristics of hot-film type micro-flowsensors integrated with Pt-RTD(resistance thermometer device) and micro-heater on the SOI(Si-on-insulator) membrane and trench structures, in which MGO thin-film was used as medium layer in order to improve adhesion of Pt thin-film to SiO$_2$ layer. Output voltages increased due to increase of heat-loss from sensor to external. The output voltage was 250 nV at N$_2$ flow rate of 2000 sccm/min, heating power of 0.3 W. The response time($\tau$:63%) was about 42 msec when input flow was step-input. The results indicated that micro-flowsensors with the SOI membrane and trench structures have properties of a high-resolution and ow consume power.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.175-178
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aemstatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured. aiming at investigating positioning characteristic of aerostatic stage, especially position error and repeatability, we analyze positioning behavior with other factors such as angular error, temperature. Experimemal results show that the aerostatic stage has a l0nm micro step response. Comparing experimental results and calculated abbe's error, we confirm that mean of position error is owing to angular error. And, also we confirm the temperature is dominant factor of repeatability in ten nm order.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.610-614
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• 1996

As the run out error and misalignment of ball screw connected directly to guide table largely affect the motion accuracy of guideway, floating coupling that releases the table from screw nut except feed and rotational direction is needed todecrease its influences. The purpose of this study is to propose a practical model floating coupling of ball serew for high precision feeding system. The straightness, dynanic characteristics and micro step response of hydrostatic guideway, mounted with three types of coupling fixed type, leaf spring type and hydrostatic type, are tested and compared. From the resuts of experiments, it is proved that a hydrostatic type floating coupling is superior to other couplings and is available to high precision feeding system with ball screw.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.668-671
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into driven mechanism such as ballscrew. In this paper, fur investigating positioning characteristic of ballscrew and feedback device in aerostatic stage, we compare the positioning characteristic between full-closed(laser scale) and semi-closed(encoder) system. Experimental results show that the aerostatic stage has a 10nm micro step response and repeatability is improved up to 1.00${\mu}{\textrm}{m}$ using laser scale. We confirm the laser scale compensate error motion of ballscrew, so acquire 1.12${\mu}{\textrm}{m}$ positioning accuracy.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.5
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• pp.157-163
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• 1997

In the case of direct connecting the nut of ballscrew to guide table, machining error and misalignment of ballscrew largely affect to the motional accuracy of guideway. For decreasing these influences, two type of floating couplings: leaf spring type and hybrid type which releases the table from nut of ballscrew except feed and rotational direction is proposed in this study. In order to verify practical availability of the proposed floating couplings, motional accuracy, dynamic characteristics and micro step response of hydrostatic guideway, mounted with each type of couplings are tested. The conventional fixed type coupling is also tested as the reference in characteristics. From the results of experiments, it is proved that the hybrid type coupling is superior to other couplings and is available to high precision feeding system with ballscrew.

• Steel and Composite Structures
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• v.18 no.6
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• pp.1541-1555
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• 2015

In this paper mechanical behavior of the functional gradient materials (FGM) micro-gripper under thermal load and DC voltage is numerically investigated taking into account the effect of intermolecular forces. In contrary to the similar previous works, which have been conducted for homogenous material, here, the FGM material has been implemented. It is assumed that the FGM micro-gripper is made of metal and ceramic and that material properties are changed continuously along the beam thickness according to a given function. The nonlinear governing equations of the static and dynamic deflection of microbeams have been derived using the coupled stress theory. The equations have been solved using the Galerkin based step-by-step linearization method (SSLM). The solution procedure has been evaluated against available data of literature showing good agreement. A parametric study has been conducted, focusing on the combined effects of important parameters included DC voltage, temperature variation, geometrical dimensions and ceramic volume concentration on the dynamic response and stability of the FGM micro-gripper.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• The Transactions of the Korean Institute of Electrical Engineers
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• v.41 no.5
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• pp.474-482
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• 1992

This paper describes the speed control system of an induction type ac servomotor drive on the vector control basis of slip frequency and constant secondary flux control for a quick torque response. The system is composed of a digital controller using a SCB-V50 microprocessor and a PWM inverter with power MOSFETs for high speed switching. And, for the measurement of actual instantaneous currents, MDCS A070-051 hall sensors are employed. The rising time of step responce by this system through the test of a 600[W] ac servomotor is 30[ms]. Overall experimental result shows that the drive performance of the system is similar to that of a separately excited armature current control of a dc motior.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.465-468
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• 2001

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%($0.095{\mu}$) of the normal condition.