한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 2001년도 춘계학술대회 논문집
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- Pages.465-468
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- 2001
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- 2005-8446(pISSN)
초정밀스테이지의 위치결정정도 향상에 관한 연구
A Study on the Improvement of Positioning accuracy of ultra-precision stage
초록
An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%(
키워드