• 한국세라믹학회지
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• 제23권6호
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• pp.52-58
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• 1986

$Pb(Zr_{0.525} Ti_{0.475})O_3$ piezoelectric ceramics both unmodified and doped with NiO were prepared by the conventional oxide techniques using sintering temperature from 900 to to 125$0^{\circ}C$. The difference in densification process between unmodified and NiO doped PZT ceramics was studied by shrinkage vs. firing temperatures and it was caused by increasing defect concentration in calcining process of NiO doped PZT ceramics. And nickel oxide solubility limit for $Pb(Zr_{0.525} Ti_{0.475})O_3$ ceramics is shown to be at the range from 0.2wt% to 0.5wt% from this defect model micro-structures dielectric and piezolectric properties of Nio doped PZT ceramics.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1296-1301
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• 2003

The chemical mechanical polishing(CMP) is necessarily applied to manufacturing the dielectric layer and metal line in the semiconductor device. The conditioning of polishing pad in CMP process additionally operates for maintaining the removal rate, within wafer non-uniformity, and wafer to wafer non-uniformity. But the fixed abrasive pad(FAP) using the hydrophilic polymer with abrasive that has the swelling characteristic by water owns the self-conditioning advantage as compared with the general CMP. FAP also takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing due to the reduction of abrasive concentration. This paper introduces the manufacturing technique of FAP. And the tungsten CMP using FAP achieved the good conclusion in point of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.661-665
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• 2000

In this study, the control of mounting system for MLGA package was developed using machine vision for the control of rotating position compensation and mounting position of X-Y table. Two type of material (polymer, alumina )were used for the dielectric insulator of the MLGA. And the illumination system and the algorithm of position compensation that be suitable for these materials was developed. Also, the position control order that compensated by machine vision actuated to micro stepping motor and X-Y servo motor by controlled PC and mounted the MLGA on PCB in resolution to$\pm10\mum$ .

• Journal of Mechanical Science and Technology
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• 제16권5호
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• pp.666-675
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• 2002

Piezoelectric Fiber Composites with Interdigitated Electrodes (PFCIDE) were previously introduced as an alternative to monolithic wafers with conventional electrodes for applications of structural actuation. This paper is an investigation into the performance improvement of piezoelectric fiber composite actuators by changing the matrix material. This paper presents a modified micro-electromechanical model and numerical analyses of piezoelectric fiber/piezopolymer matrix composite actuator with interdigitated electrodes (PFPMIDE). Various concepts from different backgrounds including three-dimensional linear elastic and dielectric theories have been incorporated into the present linear piezoelectric model. The rule of mixture and the modified method to calculate effective properties of fiber composites were extended to apply to the PFPMIDE model. The new model was validated when compared with available experimental data and other analytical results. To see the structural responses of a composite plate integrated with the PFPMIDE, three-dimensional finite element formulations were derived. Numerical analyses show that the shape of the graphite/epoxy composite plate with the PFPMIDE may be controlled by judicious choice of voltages, piezoelectric fiber angles, and elastic tailoring of the composite plate.

• 한국항해항만학회지
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• 제28권4호
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• pp.293-297
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• 2004

In this papers, an S-band oscillator of the low phase noise property using a miniaturized micro-strip hairpin shaped ring resonator is presented The substrate has a dielectric constant $\epsilon_\gamma$＝3.5, a thickness h＝0.508 mm, and loss tangent $tan\delta$＝0.002. A designed and fabricated oscillator shows low phase noise performance of 99. 71 dBc/Hz at 100 KHz offset frequency and of output power 19.584 dBm at center frequency 2.450 GHz. This circuit was fabricated with hybrid technique, but can be fully compatible with the MMIC due to its entirely planar structure.

• 진공이야기
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• 제2권4호
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• pp.9-15
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• 2015

Nonthermal bio-compatible plasma (bioplasma) sources and their characteristics operating at atmospheric pressure could be used for biological cell interactions, especially for plasma bioscience and medicines. The electron temperatures and plasma densities of this bioplasma are measured to be 0.7 ~ 1.8 eV and $(3-5){\times}10^{14-15}cm^{-3}$, respectively. Herein, we introduced general schematic view of the plasma-initiated ultraviolet photolysis of water inside the biological solutions or living tissue for the essential generation mechanism of the reactive hydroxyl radical [OH] and hydrogen peroxide [$H_2O_2$], which may result in apoptotic cell death in plasma bioscience and medicines. Further, we surveyed the various nonthermal bioplasma sources including plasma jet, micro-DBD (dielectric barrier discharge) and nanosecond discharged plasma. The diseased biological protein, cancer, and mutated cells could be treated by these bioplasma sources or bioplasma activated water to result in their apoptosis for new paradigm of plasma bioscience and medicines.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권1호
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• pp.245-248
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• 2007

We report a novel optical structure for bottomemitting white OLEDs. The structure includes, reformulated color filter, dielectric mirror to enforce cavity resonance, and micro-scatterer to extract more light and diffuse the viewing angle dependency. With the new structure, the color gamut was 104% of that of NTSC, the combined transmission efficiency of the color filter was 83%/3 and the color shift at $45^{\circ}$ was maintained below 0.02 in the 1976 CIE color space. The color performance of White OLED + color filter system can match comparably that of RGB OLED + microcavity system.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 춘계학술대회 논문집
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• pp.411-414
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• 1998

In this paper, the silicon-nitride membrane structure for IR sensor was fabricated through the etching and the direct bonding. The PT layer as a IR detection layer was deposited on the membrane and its characteristics were measured. The attack of PT layer during the etching of silicon wafer as well as the thermal isolation of the IR detection layer can be solved through the method of bonding/etching of silicon wafer. Because the PT layer of c-axial orientation rained thermal polarization without polling, the more integration capability can be achieved. The surface roughness of the membrane was measured by AFM, the micro voids and the non-contacted area were inspected by IR detector, and the bonding interface was observed by SEM. The polarization characteristics and the dielectric characteristics of the PT layer were measured, too.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.144-149
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• 2004

Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometerscale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective method to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.

• 대한전자공학회논문지
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• 제22권6호
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• pp.46-52
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• 1985

본 논문은 구형 마이크로스트립 안테나의 H-plane 상호결합에 관한 연구이다. 두 안테나의 상호결합을 계산하기 위해서 단일 마이크로스트립 패치의 교사저항을 구하였으며 결합된 전송선로를 even mode와 add mode로 분발하여 각 mode의 특성저항와 실효 유전률을 계산하였다. 이로부터 자계적으로 결합된 안테나를 S-band 주파수에서 S-parameter를 구한 결과 이론치와 실험치가 거의 일치함을 확인할 수 있었다.