Proceedings of the KSME Conference (대한기계학회:학술대회논문집)
- 2004.04a
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- Pages.144-149
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- 2004
The study on properties of AAO(Anodic Aluminum Oxide) structures using nano indentation
나노 인텐테이션을 이용한 산화알루미늄(AAO, Anodic Aluminum Oxide)구조물의 물성치에 대한 연구
- Ko, Seung-Hyun ;
- Lee, Dae-Woong ;
- Jee, Sang-Eun ;
- Park, Hyun-Chul ;
- Lee, Kun-Hong ;
- Hwang, Woong-Bong
- 고성현 (포항공대 기계공학과) ;
- 이대웅 (포항공대 기계공학과) ;
- 지상은 (포항공대 화학공학과) ;
- 박현철 (포항공대 기계공학과) ;
- 이건홍 (포항공대 화학공학과) ;
- 황운봉 (포항공대 기계공학과)
- Published : 2004.04.28
Abstract
Porous anodic alumina has been used widely for corrosion protection of aluminum surfaces or as dielectric material in micro-electronics applications. It exhibits a homogeneous morphology of parallel pores which can easily be controlled between 10 and 400nm. It has been applied as a template for fabrication of the nanometerscale composite. In this study, mechanical properties of the AAO structures are measured by the nano indentation method. Nano indentation technique is one of the most effective method to measure the mechanical properties of nano-structures. Basically, hardness and elastic modulus can be obtained by the nano-indentation. Using the nano-indentation method, we investigated the mechanical properties of the AAO structure with different size of nano-holes. In results, we find the hole effect that changes the mechanical properties as size of nano hole.