• 제목/요약/키워드: micro device

검색결과 998건 처리시간 0.034초

Hexagonal Boron Nitride Monolayer Growth without Aminoborane Nanoparticles by Chemical Vapor Deposition

  • Han, Jaehyu;Yeo, Jong-Souk
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.409-409
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    • 2014
  • Recently hexagonal boron nitride (h-BN), III-V compound of boron and nitrogen with strong covalent $sp^2$ bond, is a 2 dimensional insulating material with a large direct band gap up to 6 eV. Its outstanding properties such as strong mechanical strength, high thermal conductivity, and chemical stability have been reported to be similar or superior to graphene. Because of these excellent properties, h-BN can potentially be used for variety of applications such as dielectric layer, deep UV optoelectronic device, and protective transparent substrate. Ultra flat and charge impurity-free surface of h-BN is also an ideal substrate to maintain electrical properties of 2 dimensional materials such as graphene. To synthesize a single or a few layered h-BN, chemical vapor deposition method (CVD) has been widely used by using an ammonia borane as a precursor. Ammonia borane decomposes into hydrogen (gas), monomeric aminoborane (solid), and borazine (gas) that is used for growing h-BN layer. However, very active monomeric aminoborane forms polymeric aminoborane nanoparticles that are white non-crystalline BN nanoparticles of 50~100 nm in diameter. The presence of these BN nanoparticles following the synthesis has been hampering the implementation of h-BN to various applications. Therefore, it is quite important to grow a clean and high quality h-BN layer free of BN particles without having to introduce complicated process steps. We have demonstrated a synthesis of a high quality h-BN monolayer free of BN nanoparticles in wafer-scale size of $7{\times}7cm^2$ by using CVD method incorporating a simple filter system. The measured results have shown that the filter can effectively remove BN nanoparticles by restricting them from reaching to Cu substrate. Layer thickness of about 0.48 nm measured by AFM, a Raman shift of $1,371{\sim}1,372cm^{-1}$ measured by micro Raman spectroscopy along with optical band gap of 6.06 eV estimated from UV-Vis Spectrophotometer confirm the formation of monolayer h-BN. Quantitative XPS analysis for the ratio of boron and nitrogen and CS-corrected HRTEM image of atomic resolution hexagonal lattices indicate a high quality stoichiometric h-BN. The method presented here provides a promising technique for the synthesis of high quality monolayer h-BN free of BN nanoparticles.

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Development of liquid target for beam-target neutron source & two-channel prototype ITER vacuum ultraviolet spectrometer

  • Ahn, B.N.;Lee, Y.M.;Dang, J.J.;Hwang, Y.S.;Seon, C.R.;Lee, H.G.;Biel, W.;Barnsley, R.;Kim, D.E.;Kim, J.G.
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.421-422
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    • 2011
  • The first part is about development of a liquid target for a neutron source, which is designed to overcome many of the limitations of traditional beam-target neutron generators by utilizing a liquid target neutron source. One of the most critical aspects of the beam-target neutron generator is the target integrity under the beam exposure. A liquid target can be a good solution to overcome damage to the target such as target erosion and depletion of hydrogen isotopes in the active layer, especially for the one operating at high neutron fluxes with no need for water cooling. There is no inherent target lifetime for the liquid target neutron generator when used with continuous refreshment of the target surface exposed to the energetic beam. In this work, liquid target containing hydrogen has been developed and tested in vacuum environment. Potentially, liquid targets could allow a point neutron source whose spatial extension is on the order of 1 to $10{\mu}m$. And the second is about the vacuum ultraviolet (VUV) spectrometer which is designed as a five-channel spectral system for ITER main plasma measurement. To develop and verify the design, a two-channel prototype system was fabricated with No. 3 (14.4 nm~31.8 nm) and No. 4 (29.0 nm~60.0 nm) among the five channels. For test of the prototype system, a hollow cathode lamp is used as a light source. The system is composed of a collimating mirror to collect the light from source to slit, and two holographic diffraction gratings with toroidal geometry to diffract and also to collimate the light from the common slit to detectors. The two gratings are positioned at different optical distances and heights as designed. To study the appropriate detector for ITER VUV system, two different electronic detectors of the back-illuminated charge coupled device and the micro-channel plate electron multiplier were installed and the performance has been investigated and compared in the same experimental conditions. The overall system performance was verified by measuring the spectrums.

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임베디드 커패시터로의 응용을 위해 상온에서 RF 스퍼터링법에 의한 증착된 bismuth magnesium niobate 다층 박막의 특성평가 (The characteristics of bismuth magnesium niobate multi layers deposited by sputtering at room temperature for appling to embedded capacitor)

  • 안준구;조현진;유택희;박경우;웬지긍;허성기;성낙진;윤순길
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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    • pp.62-62
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    • 2008
  • As micro-system move toward higher speed and miniaturization, requirements for embedding the passive components into printed circuit boards (PCBs) grow consistently. They should be fabricated in smaller size with maintaining and even improving the overall performance. Miniaturization potential steps from the replacement of surface-mount components and the subsequent reduction of the required wiring-board real estate. Among the embedded passive components, capacitors are most widely studied because they are the major components in terms of size and number. Embedding of passive components such as capacitors into polymer-based PCB is becoming an important strategy for electronics miniaturization, device reliability, and manufacturing cost reduction Now days, the dielectric films deposited directly on the polymer substrate are also studied widely. The processing temperature below $200^{\circ}C$ is required for polymer substrates. For a low temperature deposition, bismuth-based pyrochlore materials are known as promising candidate for capacitor $B_2Mg_{2/3}Nb_{4/3}O_7$ ($B_2MN$) multi layers were deposited on Pt/$TiO_2/SiO_2$/Si substrates by radio frequency magnetron sputtering system at room temperature. The physical and structural properties of them are investigated by SEM, AFM, TEM, XPS. The dielectric properties of MIM structured capacitors were evaluated by impedance analyzer (Agilent HP4194A). The leakage current characteristics of MIM structured capacitor were measured by semiconductor parameter analysis (Agilent HP4145B). 200 nm-thick $B_2MN$ muti layer were deposited at room temperature had capacitance density about $1{\mu}F/cm^2$ at 100kHz, dissipation factor of < 1% and dielectric constant of > 100 at 100kHz.

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필렛효과에 따른 미세혈관 문합커플러(AnaFix®) 마이크로핀의 응력분포 (Stress Distribution in Microvascular Anastomotic Coupler (AnaFix®) Micropins with Respect to the Fillet Radius)

  • 지대원;김철웅
    • 대한기계학회논문집B
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    • 제35권11호
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    • pp.1139-1145
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    • 2011
  • 기존 봉합사를 이용한 미세혈관수술의 단점을 개선한 기계식 미세혈관 문합시스템은 크게 문합링-핀 시스템 및 디바이스로 구분된다. 유한요소해석을 이용한 본 연구에서 문합링파트는 생체적합성과 사출성형 가공성이 우수한 High Density Polyethylene(HDPE)가 적용되었고, 마이크로핀은 SUS316, Ti-6Al-4Nb, Ti-6Al-4V, unalloyed titanium 이상 4가지 재료가 적용되었다. 미세혈관 문합링 마이크로핀의 fillet radius, neck length가 von Mises stress 변화에 미치는 영향을 평가하기 위해 Short Neck(SN)과 Long Neck(LN)으로 구분하고, 필렛이 존재하지 않는 경우(SN-1, LN-1)와 존재하는 경우(SN-2, SN-3, LN-2, LN-3)로 구분하였다. 필렛 유무와 형상에 대한 von Mises stress의 변화비인 Fillet Radius Rate(FRR)와 동일 필렛형상 내에서 neck 길이변화에 따른 von Mises stress의 변화비인 Neck Length Rate(NLR)의 결과를 종합해본 결과 SN-3의 마이크로핀 neck 형상이 가장 안전한 설계 형상임을 파악할 수 있었다.

하악골 신장술에서 압축자극을 통한 골 재생방식에 대한 생체 역학적 평가 (BIOMECHANICAL EVALUATION ON BONE REGENERATION IN MANDIBULAR DISTRACTION OSTEOGENESIS COMBINED WITH COMPRESSION STIMULATION)

  • 허준;김욱규;황대석;김용덕;신상훈;정인교;김철훈;윤석영
    • Journal of the Korean Association of Oral and Maxillofacial Surgeons
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    • 제33권5호
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    • pp.470-478
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    • 2007
  • The purpose of this study was to investigate the clinical, biomechanical, and histologic changes in new distraction osteogenesis(DO) technique combined with a compression stimulation in accordance to different compression-distraction force ratio. 23 adult male rabbits underwent open-osteotomy at the mandibular body area and a external distraction device was applied. In the control group of 8 rabbits, only a 8 mm of distraction was performed by conventional DO technique. In an experimental group of 15 rabbits, a distraction followed by a compression force was performed according to the ratio of compression-distraction suggested by authors. The rate of experimental group I was set up as a 2 mm compression versus 10 mm distraction and the rate of experimental group II was set up as a 3 mm compression versus 11 mm distraction. All the rabbits were sacrificed for a gross finding, biomechanical, histomorphometric and histologic findings at the time of 55 days from the operation day. The results were as follows: 1. On the gross findings, because all rabbits had a sufficient healing time, every distracted new bone had good bone quality and we could not find any difference among all three groups. 2. In the histologic findings, rapid bone maturation(wide lamellar bone formation in the cancellous and cortical bone areas) was observed in two experimental groups compared to the control group. 3. On the bone density tests, the experimental group II showed higher bone density than the other experimental group and control group(control group-$0,2906g/cm^2$, experimental group I-$0.2961g/cm^2$, experimental group II-$0.3328g/cm^2$). 4. On the biomechanical tests, the experimental group II had significantly higher bone microhardness than the other experimental group and control group(control group-252.7 MPa, experimental group I-263.5 MPa, experimental group II-426.0 MPa). 5. On the microhardness tests, when we compared the hardness ratio of distracted bone versus normal bone, we could find experimental group II had significantly higher hardness ratio than the other experimental group and control group(control group-0.47, experimental group I-0.575, experimental group II-0.80). From this study, we could deduce that the modified distraction osteogenesis method with a compression stimulation might improve the quality of bone regeneration and shorten the consolidation period in comparison with conventional distraction osteogenesis techniques.

모바일용 저잡음 6축 관성센서 IC의 설계 (Design of a Low Noise 6-Axis Inertial Sensor IC for Mobile Devices)

  • 김창현;정종문
    • 한국통신학회논문지
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    • 제40권2호
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    • pp.397-407
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    • 2015
  • 본 논문에서는 최근 스마트폰이나 웨어러블 디바이스처럼 IoT/M2M 을 위한 여러 종류의 모바일 기기에 사용되는 센서 중에서 각속도를 검출하는데 사용되는 3축 자이로스코프 센서 IC와 가속도를 검출하는데 사용되는 3축 가속도 센서IC를 1 chip으로 하는 6축 관성센서 IC를 설계하였다. 특히 본 논문에는 자이로스코프 센서의 잡음을 분석하고 이를 효과적으로 제거하기 위한 구조를 제안하였다. 자이로스코프 센서는 가속도 센서, 지자기 센서와 더불어 사용자의 동작을 인식하고, 상대적 위치를 추정하기 위한 용도로 사용되는 센서이다. 위치를 추정할 때 사용되는 센서는 아주 작은 잡음이라도 오차로 누적되기 때문에, 정확도를 높이기 위해서 저잡음 IC 설계가 아주 중요한 요소이다. 본 논문에서는 자이로스코프 센서를 모델링하고 MEMS(micro-electro-mechanical system)와 회로에서 발생하는 잡음의 주파수 특성을 분석하여 이를 효과적으로 제거하기 위한 회로 구조를 제안하였으며, 초소형, 저전력 환경에서 사용 가능하면서 잡음 수준이 아주 낮은 3축 자이로스코프 센서와 3축 가속도 센서를 포함하는 6축 1 chip IC를 제작하였다. 제작된 IC는 자이로스코프 센서 잡음의 주요 원인이 되는 quadrature error를 효과적으로 제거하기 위한 회로 구조를 사용하였고, 0.18um CMOS공정을 이용하여 0.01dps/${\sqrt{Hz}}$의 자이로스코프 센서 잡음밀도를 가지는 IC를 제작하였다.

가변 시상수를 이용한 자동 노출제어 시스템 (Auto Exposure Control System using Variable Time Constants)

  • 김현식;이성목;장원우;하주영;김주현;강봉순;이기동
    • 한국정보통신학회논문지
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    • 제11권2호
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    • pp.257-264
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    • 2007
  • 사진을 찍을 때 카메라는 보기 좋은 사진을 얻을 수 있도록 많은 기능을 제공하고 있다. 대표적인 기능으로 자동 초점거리 조정(Auto Focus), 자동 색온도 보정(Auto White Balance), 자동 노출 조정(Auto Exposure)이 있다. 본 논문에서는 편리한 기능들 중 하나로서 새로운 자동 노출제어 시스템을 제안한다. 본 논문에서 제안하는 자동 노출제어 시스템은 가변 시상수(Variable Time Constant)를 가지는 IIR Filter를 이용한다. 먼저 노출제어의 기준을 정하기 위해서 사진에서 밝기변화와 Zone System에서 보여주는 사물의 휘도정보를 비교하여 이상적인 휘도변화 특성 그래프를 얻는다. 얻어진 이상적인 휘도 변화 그래프와 현재의 노출설정을 비교하여 적정 노출의 설정을 찾는다. 제안하는 자동 노출제어 시스템은 적정 노출을 얻을 수 있는 설정으로 조정하기 위해 기존의 마이크로 콘트롤러 등을 이용하여 구현하는 방법과 달리 IIR Filter를 사용하므로 간단한 구성을 가지며 콤팩트 이미지 센서모듈(ISM)를 구성하기 위하여 사용할 수 있다.

Syringe Connector를 이용하여 조영제를 자동 주입장치에 연결 시 분쇄물 혼입에 관한 연구 (A Study on the Mixing of Pulverization Matters when the Contrast Medium is connected to the Automatic Injection Device using the Syringe Connector)

  • 김현주;김지은;한유빈;최승현;강윤기;정유진;정민영;이후민
    • 한국방사선학회논문지
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    • 제12권6호
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    • pp.777-783
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    • 2018
  • 고무화합물 형태로 구성된 조영제의 병에 Syringe Connector의 Spike를 연결 시 고무의 찢김 정도를 알아 보고 찢김 및 분쇄로 인한 합성고무의 혼입 유무와 분쇄된 합성고무가 검출 시 분쇄물의 크기를 실험을 통해 알아보고자 하였다. 그 결과 찢김 정도의 경우 Syringe Connector의 끝과 최초 접촉하는 앞면이 약 $3.14{\pm}0.04mm$로 뒷면 보다 많이 찢겼으며, 실험 대상인 10 병의 조영제에서 평균 7 개에서 15 개로 모두 분쇄물이 검출되었다. 검출된 분쇄물을 이용하여 크기를 측정한 결과 평균크기는 약 $7.89{\pm}0.31{\mu}m$이었다. 향 후 다양한 실험 및 분석방법을 통한 추가실험과 더불어 흡인된 분쇄물 차단을 위한 미세 필터타입 자동주입장치의 개발이 필요하며, 분쇄물 유입 시 치명적 사고를 대비하여 관련기관의 관심 또한 필요할 것으로 사료된다.

Aspiration-Retriever Technique for Stroke with Large Bore Intermediate Catheter : A Single Center Experience

  • Nam, Ji Won;Jung, Na Young;Park, Eun Suk;Kwon, Soon Chan
    • Journal of Korean Neurosurgical Society
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    • 제64권5호
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    • pp.732-739
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    • 2021
  • Objective : Early successful reperfusion is associated with favorable outcomes in acute ischemic stroke (AIS). The purpose of this study was to achieve successful recanalization by a combined mechanical thrombectomy technique, the Aspiration-Retriever Technique for Stroke (ARTS), which is composed of a flexible large lumen distal access catheter and a retrievable stent as the first-line strategy of mechanical thrombectomy. Methods : We retrospectively reviewed 62 patients with AIS who underwent mechanical thrombectomy from 2018 to 2019 at our institute by a senior neurointerventionalist. Among them, patients who were treated using the ARTS technique with the soft torqueable catheter optimized for intracranial access (SOFIA®; MicroVention-Terumo, Tustin, CA, USA) as the first-line treatment were included. Patients who had tandem occlusions or underlying intracranial artery stenosis were excluded. The angiographic and clinical outcomes were evaluated. The angiographic outcome was analyzed by the rate of successful recanalization, defined as a Thrombolysis in Cerebral Infarction score of 2b or 3 at the end of all procedures and the rate of successfully achieving the first pass effect (FPE), defined as complete recanalization with a single pass of the device. The clinical outcomes included the National Institutes of Health Stroke Scale (NIHSS) score, modified Rankin Scale (mRS), and mortality. Results : A total of 27 patients (mean age, 59.3 years) fulfilled the inclusion criteria. The successful recanalization rate was 96% (n=26) while the FPE rate was 41% (n=11). The mean post-procedural NIHSS change was -3.0. Thirteen patients (48%) showed good clinical outcomes after thrombectomy with the ARTS technique (mRS at 90 days ≤2). Postoperative complications occurred in seven of 25 patients : hemorrhagic transformation in six patients (22%) and distal embolization in one patient (4%). Mortality was 15% (n=4). Conclusion : Although the clinical outcomes using the ARTS technique with a flexible large lumen distal access catheter performed as the frontline thrombectomy in patients with AIS were not significantly superior than those of other studies, this study showed a high rate of successful endovascular recanalization which was comparable to that of other studies. Therefore, ARTS using the SOFIA® catheter can be considered as the first choice of treatment for AIS due to large vessel occlusion.

탄소섬유 배합비에 따른 전도성 그라우트 재료의 주입특성평가 (Injection Characteristics Evaluation of Conductive Grout Material According to Carbon Fiber Mixing Ratio)

  • 최효준;조완제;허형석;방태완;윤찬영
    • 한국지반환경공학회 논문집
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    • 제24권1호
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    • pp.15-23
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    • 2023
  • 그라우팅 공법은 연약지반의 차수 및 보강을 목적으로 시공되는 공법이다. 그라우트가 지반 내에 주입될 때, 지반을 구성하는 지반의 형태, 토립자의 크기, 공극율 및 지하수의 유무에 따라 그라우트가 침투 및 확산하는 형태가 다양하게 나타나고 있으나, 그라우팅 설계 시에는 이러한 요인을 적용하기 어려운 실정이다. 따라서, 본 연구에서는 전도성 재료를 함유한 그라우트를 지반내로 주입하는데 있어서 전도성 재료 첨가에 따른 그라우트의 침투 성능을 파악하기 위하여 실내시험을 수행하였다. 주입시험에서는 전도성 재료를 혼합수의 0%, 3% 및 5%를 그라우트에 첨가하고, 원지반 조건을 자갈과 규사로 구성된 다양한 지반으로 조성하였다. 전도성 그라우트는 전용주입장치를 사용하여 모형지반 내로 압력에 의해 주입되면서 주입시간(t), 압력(p), 유속(v) 및 주입량(q)를 계측하고, 모형지반 내 주입된 경화체를 채취하여 침투성능을 평가하였다. 그라우트 주입실험 결과에서는 전도성 재료의 사용량과 그라우트 주입율은 역의 관계를 나타내었으며, 모형지반 토립자 크기에 따라 침투형태가 변화되는 것을 확인하였다. 전도성 재료를 함유한 그라우트는 지반 내 침투가 비교적 양호하고 경화체의 강도 및 내구성이 우수하여 그라우트의 침투범위 측정을 위한 첨가제로 사용하는 것이 가능하다고 판단하였다.