• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.2
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• pp.140-148
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• 2000

In this paper, using surface micromachining technology with thick photoresist and aluminum, an SLM(Spatial Light Modulator), which is applied to the fields of adaptive optics and pattern recognition system, was fabricated and the electromechanical properties of the fabricated micro SLM are measured. In order to maximize fill-factor and remove mechanical coupling between micro SLM actuators, the micro SLM is composed of three aluminum layers so that spring structure and upper electrode are placed beneath the mirror plate, and $10\times10$ each mirror plate is individually actuated. Also, the micro SLM was designed to be able to modulate phase and amplitude of incoming light in order to have a continuity of phase modulation of incoming light. In the case of amplitude and phase modulation, maximum vertical displacement is 4$\mum$, and maximum angular displacement is $\pm4.6^{\corc}$ respectively. The height difference of the fabricated mirror plate was able to be reduced to 1100A with mirror plate planarization method using negative photoresist(AZ5214). The electromechanical properties of the fabricated micro SLM were measured with the optical measurement system using He-Ne laser and PSD(position sensitive device).

• Transactions on Electrical and Electronic Materials
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• v.3 no.1
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• pp.30-37
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• 2002

A focusing grating coupler (FGC) was not fabricated by the 'Continuous Path Control'writing strategy but by an electron-beam lithography system of more general exposure mode, which matches not only the address grid with the grating period but also an integer multiple of the address grid resolution (5 nm). To more simplify the fabrication, we are able to reduce a process step without large decrease of pattern quality by excluding a conducting material or layer such as metal (Al, Cr, Au), which are deposited on top or bottom of an e-beam resist to prevent charge build-up during e-beam exposure. A grating pitch period and an aperture feature size of the FGC designed and fabricated by e-beam lithography and reactive ion etching were ranged over 384.3 nm to 448.2 nm, and 0.5 $\times$ 0.5 mm$^2$area, respectively. This fabrication method presented will reduce processing time and improve the grating quality by means of a consideration of the address grid resolution, grating direction, pitch size and shapes when exposing. Here our investigations concentrate on the design and efficient fabrication results of the FGC for coupling from slab waveguide to a spot in free space.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.163-169
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• 2005

Micro hole is ode of basic elements for micro device or micro parts. Micro electrochemical machining (ECM) can be applied to the machining of micro holes less than 50 ${\mu}m$ in diameter, which it is not easy to apply other techniques to. For the machining of passivating metals such as stainless steel, machining conditions should be chosen carefully to prevent a passive layer. The machining conditions also affect the machining resolution, In this paper, machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.3
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• pp.228-233
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• 2001

This paper presents the optimized design, fabrication and thermal characteristics of micro-heaters for thermal MEMS (micro elelctro mechanical system) applications usign SOI (Si-on-insulator) and trench structures. The micro-heater is based on a thermal measurement principle and contains for thermal isolation regions a 10㎛ thick Si membrane with oxide-filled trenches in the SOI membrane rim. The micro-heater was fabricated with Pt-RTD (resistance thermometer device) on the same substrate by suing MgO as medium layer. The thermal characteristics of the micro-heater wit the SOI membrane is 280$\^{C}$ at input power 0.9W; for the SOI membrane with 10 trenches, it is 580$\^{C}$ due to reduction of the external thermal loss. Therefore, the micro-heater with trenches in SOI membrane rim provides a powerful and versatile alternative technology for improving the performance of micro-thermal sensors and actuators.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2014.10a
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• pp.900-903
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• 2014

Fly-wheel, Gimbal antenna, CMG, Spaceborne cyrocooler generate micro-vibration during their on-orbit operation as well as implementing their own function. To comply with the mission requirement of high resolution observation satellite, additional technical efforts have been required to isolate the micro-vibration derived from such payloads by applying the vibration isolator. In this study, we proposed a passive isolator using SMA mesh washer, which guarantees the structural safety of both micro-vibration disturbance source and itself under harsh launch vibration loads without an additional holding mechanism and the micro-vibration isolation performance on orbit environment. To verify the micro-vibration isolation performance of the proposed vibration isolator, we performed the micro-vibration isolation measurement test using the dedicated micro-vibration measurement device proposed in this study.

• 한국가시화정보학회:학술대회논문집
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• 2004.12a
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• pp.111-118
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• 2004

A new micro-resolution PIV (Particle Image. Velocimetry) has been developed. To investigate transient phenomena in a microfluidic device, Dynamic micro-PIV system was realized by combining a high-speed camera and a CW(Continuous Wave) laser. The technique was applied to a micro-counter-current flow, consisting of water and butyl acetate. The velocity fields of water in the micro counter-current flow were visualized for a time resolution of 500 $\{mu}s$ and a spatial resolution of 2.2 x 2.2 $\{mu}m$. Using the Dynamic micro-PIV technique, the vortex-like motions of fluorescent particles at the water-butyl acetate interface were captured clearly

• Proceedings of the IEEK Conference
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• 2000.11a
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• pp.263-266
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• 2000

In this paper we develop a dual storage device to store a lot of data safely and reliably in communication system. The device consists of micro-controller, FPGA and hard disk. It provides many functions those are rebuilding, automatic remapping, host service and remote host service. The developed device can be used instead of expensive storage device like flash memory in various communication systems.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.411-414
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• 2005

The most recent trend on digital hearing aid is to increase the ratio of signal to noise by directivity or to develop noise reduction algorithm inside DSP IC chip. This paper designed, fabricated and tested a digital hearing aid directivity testing device in which a micro-mouse-like the stepping motor with a speaker rotates around an examinant. Both ears of the examinant were fixed with ITE hearing aids in order to response to receiving sound. The diameter of the directivity testing device was 2 [m] and the micro-mouse was precisely controlled by PICBASIC micro processor.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.1 s.106
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• pp.81-88
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• 2006

The most recent trend on digital hearing aid is to increase the ratio of signal to noise by directivity or to develop noise reduction algorithm inside DSP IC chip. This paper designed, fabricated and tested a digital hearing aid directivity testing device in which a micro-mouse-like the stepping motor with a speaker rotates around an examinant. Both ears of the examinant were fixed with ITE hearing aids in order to respond to receiving sound. The experimental results were compared with those of a boundary element method program for verification. The diameter of the directivity testing device was 2 m and the micro-mouse was precisely controlled by PICBASIC micro processor.

• 한국정보디스플레이학회:학술대회논문집
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• 2000.01a
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• pp.37-38
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• 2000

The ZnS:Tb thin-film electroluminescent devices were grown by atomic layer deposition with utilizing single-layer aluminum oxide and/or multilayered tantalum aluminum oxide, $Ta_xAl_yO$, as upper and lower insulating layers. These devices were investigated in terms of the luminescent and electrical characteristics. From this analysis, the devices using the $Ta_xAl_yO$ instead of $Al_2O_3$ were observed to have a lower threshold voltage for emission due to the higher relative dielectric constant of $Ta_xAl_yO$ insulators than that of the $Al_2O_3$ device. And there was a large amount of dynamic space charge generation in the phosphor of the device with the $Ta_xAl_yO$ insulators seemingly due to electron multiplication such as trap ionization.