• KSTLE International Journal
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• 제3권2호
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• pp.95-100
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• 2002

Electrochemical discharge machining is a very recent technique for non-conducting materials such as ceramics and glasses. ECDM is conducted in the NaOH solution and the cathode electrode is separated from the solution by H$_2$ gas bubble. Then the discharge is appeared and the non-conductive material is removed by spark and some chemical reactions. In the ECDM technology, the H$_2$ bubble control is the most important factor to stabilize the discharging condition. In this paper we proposed the discharge peak monitoring/discharging duty feedback algorithms fur the discharge stabilization and the feasibility of this algorithm is verified by various pattern machining in the constant preload conditions for the cathode electrode.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.926-931
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• 2002

Although ceramic plates with many micro-hales are used as MCP (Micro-channel plate) for electron amplification, catalytic converters, filters, electrical insulators and thermal conductors in integrated circuits, the drilling of micro-hales in the ceramics is difficult because of their low thermal conductivity, high hardness and brittleness. Therefore, in this work, the machining of ceramic green body fellowed by sintering of green body was employed fur fabricating ceramic plates with many micro-holes. The micro-drilling of alumina green body was performed with diamond abrasive WC drills, and the cutting force w.r.t. drilling times was measured for the determination of toot life. From the investigation of the wear of micro-drill tip w.r.t. drilling times, the wear mechanism of tip during micro-drilling of ceramic green body was suggested.

• 한국생산제조학회지
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• 제24권2호
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• pp.198-202
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• 2015

We present a series of simple but novel nanopatterning methodologies inspired by traditional mechanical machining processes involving rolling, pullout, and forging. First, we introduce roll-to-roll nanopatterning, which adapts conventional rolling for continuous nanopatterning. Then, nano-inscribing and nano-channel lithography are demonstrated, whereby seamless nanogratings can be continuously pulled out, as in a pullout process. Finally, we discuss vibrational indentation micro- and nanopatterning. Similarly to the forging/indentation process, this technique employs high-frequency vertical vibration to indent periodic micro/nanogratings onto a horizontally fed substrate. We discuss the basic principles of each process, along with its advantages, disadvantages, and potential applications. Adopting mature and reliable traditional technologies for small-scale machining may allow continuous nanopatterning techniques to cope with scalable and low-cost nanomanufacturing in a more productive and trustworthy way.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2002년도 춘계학술대회 논문집
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• pp.603-607
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• 2002

Recently, the need leer transporting and manipulating minute amount of fluids in microscale channels (so-called micro-fluidics) has been increasing, especially in biotechnology and biochemical processing. This work demonstrates that the mechano-chemical process which consists of mechanical abrasive action combined with chemical process can be used to fabricate micro-fluidic channels more rapidly and cost effectively than other methods. In this work, capillary filling of fluids in micro-channels was investigated by theoretical approaches and experiments. From the experimental results, it is expected that a complex micro-fluidic system can be fabricated using the micro- fabrication technique and microsystem packaging method described in this work.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1277-1280
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• 2005

A high-aspect-ratio and high-resolution stainless steel shadow mask for organic thin-film transistors (OTFTs) circuit has been fabricated by a new method which combines photochemical machining, micro-electrical discharge machining (micro-EDM), and electrochemical etching (ECE). First, connection lines and source-drain holes are roughly machined by photochemical etching, and then the part of source and drain holes is finished by the combination of micro-EDM and ECE processes. Using this method a $100\;\mu{m}$ thick stainless steel (AISI 304) shadow mask for inverter can be fabricated with the channel length of $30\;\mu{m}\;and\;10\;\mu{m}\;respectively.\;The\;width\;of\;connection line\;is\;150\;\mu{m}$. The aspect ratio of the wall is about 5 and 15, respectively. Metal lines and source-drain electrodes of OTFTs were successfully deposited through the fabricated shadow mask.

• 대한기계학회논문집B
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• 제37권12호
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• pp.1159-1165
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• 2013

파우더 블라스팅은 미세 유리가공법으로서 가공속도가 빠르고 저비용의 장점이 있지만 유리를 취성파괴 시키기 때문에 표면거칠기가 좋지않다. 블라스팅된 표면에 저압의 워터젯을 분사하여 표면에서의 연마 슬러리의 흐름을 통해 표면거칠기를 저감할 수 있다. 본 연구에서는 소다라임 유리에 블라스팅으로 마이크로 채널을 가공한 후 워터젯을 연속 적용하고, 마이크로 채널의 표면거칠기 및 단면 형상의 변화의 과정을 관찰하였다. 워터젯의 적용결과, 초기단계에서는 블라스팅에 의한 미세 요철이 제거되었고, 이후 표면하부의 크랙이 제거되어 평균 표면거칠기 50 nm 근방의 매끈한 표면을 얻을 수 있었다. 표면거칠기 저감에 동반하여 채널단면의 확장 과정도 함께 관측하였다. 마지막으로 제안한 방법에 의해 미세유체칩의 가공 결과를 제시하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.422-425
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• 2005

This study predicts the heat-affected zone (HAZ) after electrical discharge machining. To predict HAZ, the temperature distribution is calculated using FEM. Heat flux is calculated from electrical energy, and it can be assumed Gaussian distribution. Plasma channel expands as time goes. Copper and NAK80 are used as the workpiece material. The depth of HAZ in simulation is determined by temperature distribution. The simulation results were compared with a developed actual single discharge crater. Through investigating the cross section of simulated & actual craters, the depth of HAZ in simulation and experiment are compared. Simulation model can predict the crater shape.

• 한국연소학회지
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• 제11권2호
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• pp.7-14
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• 2006

Catalytic combustion is one of the suitable methods for micro power source due to high energy density and it can be applied to micro structured chamber without consideration of quenching since it is flameless combustion. Catalyst loading in the micro structured combustion chamber is one of the most important issues in the development of micro catalytic combustors. In this research, to coat catalyst on the chamber wall, two methods were investigated. First, $Al_2O_3$ was selected as a support of Pt and $Pt/Al_2O_3$ was synthesized through the alumina sol-gel procedure. To improve the coating thickness and adhesion between catalyst and substrate, heat resistant and water solvable organic-inorganic hybrid binder was used. Porous silicon was also investigated as a catalyst support for platinum. Through the parametric studies of current density and etching time, fabrication process of $1{\sim}2{\mu}m$ of diameter and about $25{\mu}m$ depth pores was confirmed. Coated substrates were test in the micro channel combustor which was fabricated by the wet etching and machining of SUS 304. Using $Pt/Al_2O_3$ coated substrate and Pt coated porous silicon substrate, conversion rate of fuel was over 95 % for $H_2/Air$ premixed gas.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2006년도 제33회 KOSCO SYMPOSIUM 논문집
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• pp.235-241
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• 2006

Catalytic combustion is one of the suitable methods for micro power source due to high energy density and no flame quenching. Catalyst loading in the micro structured combustion chamber is one of the most important issues in the development of micro catalytic combustors. In this research, to coat catalyst on the chamber wall, two methods were investigated. First, $Al_2O_3$ was selected as a support of Pt and $Pt/Al_2O_3$ was synthesized through the alumina sol-gel procedure. To improve the coating thickness and adhesion between catalyst and substrate, heat resistant and water solvable organic-inorganic hybrid binder was used. Porous silicon was also investigated as a catalyst support for platinum. Through the parametric studies of current density and etching time, fabrication process of $1{\sim}2{\mu}m$ of diameter and about $25{\mu}m$ depth pores was confirmed. Coated substrates were test in the micro channel combustor which was fabricated by the wet etching and machining of SUS 304. Using $Pt/Al_2O_3$ coated substrate and Pt coated porous silicon substrate, conversion rate of fuel was over 95% for $H_2$/Air premixed gas.

• 한국기계가공학회지
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• 제18권7호
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• pp.8-13
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• 2019

As increasing demand for precise machining in advanced disciplines, especially in semi-conductor, aeronautical and automotive industries, the magnetic abrasive deburring(MAD) which is able to eliminate micro-sized burr on complex surface in less time has drawn the attention in the last decades. However, the performance of MAD is subject to shape and size of a tool. Therefore, this study aim to identify deburring behavior of MAD in U-type flow channel by measuring the length rate of burr removal in radial distance of the cylindrical tool under four process factors. In order to evaluate the deburring effect of MAD on the surface, finishing regions are divided based on center of the circular cutting tool. As a results, it was defined that the amount of burr removal in a downward direction moving toward flow channel from the top surface was higher than upward direction. This is because the magnetic abrasives were detached from magnetic lines of force due to geometrical shape.