• 제목/요약/키워드: micro/nano-scale contact

검색결과 31건 처리시간 0.025초

Fabrication of 1-${\mu}m$ channel length OTFTs by microcontact printing

  • Shin, Hong-Sik;Baek, Kyu-Ha;Yun, Ho-Jin;Ham, Yong-Hyun;Park, Kun-Sik;Lee, Ga-Won;Lee, Hi-Deok;Wang, Jin-Suk;Lee, Ki-Jun;Do, Lee-Mi
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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    • pp.1118-1121
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    • 2009
  • We have fabricated inverted staggered pentacene Thin Film Transistor (TFT) with 1-${\mu}m$ channel length by micro contact printing (${\mu}$-CP) method. Patterning of micro-scale source/drain electrodes without etching was successfully achieved using silver nano particle ink, Polydimethylsiloxane (PDMS) stamp and FC-150 flip chip aligner-bonder. Sheet resistance of the printed Ag nano particle films were effectively reduced by two step annealing at $180^{\circ}C$.

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Submicron-scale Polymeric Patterns for Tribological Application in MEMS/NEMS

  • Singh R. Arvind;Yoon Eui-Sung;Kim Hong Joon;Kong Hosung;Jeong Hoon Eui;Suh Kahp Y.
    • KSTLE International Journal
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    • 제6권2호
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    • pp.33-38
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    • 2005
  • Submicron-scale patterns made of polymethyl methacrylate (PMMA) were fabricated on silicon-wafer using a capillarity-directed soft lithographic technique. Polyurethane acrylate (PUA) stamps (Master molds) were used to fabricate the patterns. Patterns with three different aspect ratios were fabricated by varying the holding time. The patterns fabricated were the negative replica of the master mold. The patterns so obtained were investigated for their adhesion and friction properties at nano-scale using AFM. Friction tests were conducted in the range of 0-80 nN. Glass (Borosilicate) balls of diameter 1.25 mm mounted on cantilever (Contact Mode type NPS) were used as tips. Further, micro-friction tests were performed using a ball-on-flat type micro-tribe tester, under reciprocating motion, using a soda lime ball (1 mm diameter) under a normal load of 3,000 mN. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C$) and relative humidity ($45{\pm}5\%$). Results showed that the patterned samples exhibited superior tribological properties when compared to the silicon wafer and non-patterned sample (PMMA thin film) both at the nano and micro-scales, owing to their increased hydrophobicity and reduced real area of contact. In the case of patterns it was observed that their morphology (shape factor and size factor) was decisive in defining the real area of contact.

Estimation of Surface Forces in Micro Rough Surface Contacts

  • Kim, Doo-In;Ahn, Hyo-Sok;Choi, Dong-Hoon
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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    • pp.63-64
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    • 2002
  • In a micro-scale contact, surface forces such as capillary force and van der Waals Interaction significantly Influence the contact between asperities of rough surfaces. Little is, however, known about the variation of these surface forces as a function of chemical property of the surface (hydrophilicity), relative humidity and deformation of asperities In the real area of contact. A better understanding of these surface forces is of great necessity in order to find an optimal solution for reducing friction and adhesion of micro surfaces. We proposed an effective method to analyze capillary and van der Waals forces In nano-scale contact. In this method, Winklerian foundation model was employed to analyze the contact of rough surfaces that were obtained from atomic force microscopy (AFM) height Images. Self-mated contact of diamond-like-carbon (DLC) coatings was analyzed, as an example, by the proposed model. It was shown that the capillary force was significantly influenced by relative humidify and wet angle of the DLC surface. The deformation of asperities to a critical magnitude by external loading led to a considerable increase of both capillary and van der Waals forces.

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극대면적 UV-NIL 공정에서의 균일 가압 시스템 개발 (The Development of Uniform Pressurizing System for Extremely Large Area UV-NIL)

  • 최원호;신윤혁;여민구;임홍재;신동훈;장시열;정재일;이기성;임시형
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2008년도 추계학술대회A
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    • pp.1917-1921
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    • 2008
  • Ultraviolet-nanoimprint lithography (UV-NIL) is promising technology for cost effectively defining micro/nano scale structure at room temperature and low pressure. In addition, this technology is fascinating because of it's possibility for high-throughput patterning without complex processes. However, to acquire good micro/nano patterns using this technology, there are some challenges such as uniformity and fidelity of patterns, etc. In this paper, we have focused on uniform contact mechanism and performed contact mechanics analysis. The dimension of the flexible sheet to get adequate uniform contact area has been obtained from contact mechanics simulation. Based on this analysis, we have made a uniform pressurizing device and confirmed its uniform pressurized zone using a pressure sensing paper.

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Micro/nano Tribological and Water Wetting Characteristics of Ion Beam Treated PTFE Surfaces

  • Yoon, Eui-Sung;Oh, Hyun-Jin;Yang, Seung-Ho;Kong, Hosung
    • KSTLE International Journal
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    • 제3권1호
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    • pp.12-16
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    • 2002
  • Micro/nano tribological and water wetting characteristics of ion beam treated PTFE (polytetrafluoroethylene) surfaces were experimentally studied. The ion beam treatment was performed with a hollow cathode ion gun at different argon ion dose conditions in a vacuum chamber to modify the topography of PTFE surface. Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribe tester, SPM (scanning probe microscope), contact anglemeter and profilometer, respectively. Results showed that surface roughness increased with the argon ion dose. Water wetting angle of the ion beam treated samples increased with the ion dose, so the surface shows an ultra-hydrophobic nature. Micro-adhesion and micro-friction depend on the wetting characteristics of the PTFE samples. However, nano-tribological characteristics showed different results. The scale effect of surface topography on tribological characteristics was discussed. Also, the water wetting characteristics of modified PTFE samples were discussed in terms of the surface topographic characteristics.

Nano/Micro-scale friction properties of Silicon and Silicon coated with Chemical Vapor Deposited (CVD) Self-assembled monolayers

  • 윤의성;;오현진;한흥구;공호성
    • KSTLE International Journal
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    • 제5권2호
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    • pp.37-43
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    • 2004
  • Abstract : Nano/micro-scale friction properties were investigated on Si (100) and three self-assembled monolayers (SAMs) (PFOTC, DMDM, DPDM) coated on Si-wafer by chemical vapor deposition technique. Experiments were conducted at ambient temperature(24$pm$1$circ$C) and humidity(45$pm$5%). Friction at nano-scale was measured using Atomic Force Microscopy (AFM) in the range of 0-40nN normal loads. In both Si-wafer and SAMs, friction increased linearly as a function of applied normal load. Results showed that friction was affected by the inherent adhesion in Ssi-wafer, and in the case of SAMs the physical/chemical structures had a major influence. Coefficient of friction of these test samples at the micro-scale was also energies. In order to study the effect of contact area on coefficient of friction at the micro-scale, friction was measured for Si-wafer and DPDM against Soda Lime balls (Duke Scientiffic Corporation) of different radii (0.25 mm, 0.5 mm and 1 mm) at different applied normal loads (1500, 3000 and 4800 mN). Results showed that Si-wafer had higher coefficient of friction than DPDM. Further, unlike that in the case of DPDM, friction in Si-wafer was severely influenced by its wear. SEM evidences showed that solid-solid adhesion was the wear mechanism in Si-wafer.

나노 미터 크기 유막에서의 탄성유체윤활 (Thin Film Elastohydrodynamcic Lubrication of Nanometer Scale)

  • 장시열
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 1997년도 제26회 추계학술대회
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    • pp.173-182
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    • 1997
  • In many practical lubricated contacts such as a rough concentrated contact on the sliding of nominally flat surfaces, the fluid may be of molecular (nanometer) scale owing to the asperity interactions on the surfaces. Under this condition, there is insufficient lubricant on the concentrated contact spot to maintain a realistic continuum. Rheological behavior for this kind of concentrated contact was studied to know whether the application of viscous fluid model is appropriate. The interaction of two rough surfaces is simplified as perfectly flat-rough surfaces contact under certain conditions by "composite topography" and for a nanometer scale fluid film, three kinds of rheological fluid behavior are analyzed in elastohydrodynamic asperity point contact.t contact.

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Nano/Micro-friction properties or Chemical Vapor Deposited (CVD) Self-assembled monolayers on Si-wafer

  • Yoon Eui-Sung;Singh R.Arvind;Han Hung-Gu;Kong Hosung
    • 한국윤활학회:학술대회논문집
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    • 한국윤활학회 2004년도 학술대회지
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    • pp.90-98
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    • 2004
  • Nano/micro-scale studies on friction properties were conducted on Si (100) and three self-assembled monolayers (SAMs) (PFOTC, DMDM, DPDM) coated on Si-wafer by chemical vapor deposition technique. Experiments were conducted at ambient temperature $(24{\pm}1^{\circ}C)$ and humidity $(45{\pm}5\%)$. Nano-friction was evaluated using Atomic Force Microscopy (AFM) in the range of 0-40nN normal loads. In both Si-wafer and SAMs, friction increased linearly as a function of applied normal load. Results showed that friction was affected by the inherent adhesion in Si-wafer, and in the case of SAMs the physical/chemical structures had a major influence. Coefficient of friction of these test samples was also evaluated at the micro-scale using a micro-tribotester. It was observed that SAMs had superior frictional property due to their low interfacial energies. In order to study of the effect of contact area on friction coefficient at the micro-scale, friction was measured for Si-wafer and DPDM against Soda Lime balls (Duke Scientific Corporation) of different radii 0.25 mm, 0.5 mm and 1 mm at different applied normal loads $(1500,\;3000\;and\;4800{\mu}N)$. Results showed that Si-wafer had higher friction coefficient than DPDM. Furthermore, unlike that in the case of DPDM, friction was severely influenced by wear in the case of Si-wafer. SEM evidences showed that solid-solid adhesion to be the wear mechanism in Si-wafer.

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열가소성 폴리머 필름의 마이크로 점착 거동에 대한 온도의 영향 (Effect of Temperature on the Micro-scale Adhesion Behavior of Thermoplastic Polymer Film)

  • 김광섭;허정철;김경웅
    • Tribology and Lubricants
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    • 제25권2호
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    • pp.86-95
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    • 2009
  • Adhesion tests were carried out in order to investigate the effect of temperature on the adhesion behavior between a PMMA film and a fused silica lens in the micro scale. For the tests, a microtribometer system was specially designed and constructed. The pull-off forces on the PMMA film were measured under atmospheric condition as the temperature of the PMMA film was increased from 300 K to 443 K and decreased to 300 K. The contact area between the PMMA film and the lens was observed during the test. The adhesion behavior was changed with the change of the PMMA surface state as the temperature increased. In glassy state below 363 K, the pull-off force did not change with the increase of temperature. In rubbery state from 383 K to 413 K, the pull-off force increased greatly as the temperature increased. In addition, the area of contact was enlarged. In viscous state above 423 K, the fingering instability was observed in the area of contact when the PMMA film contacted with the lens. It was also found that the adhesion behavior can be varied with the thermal history of the PMMA film. The residual solvent in the PMMA film could emerge to the PMMA surface due to the heating and reduced the pull-off force.

미세입자의 트라이볼로지적 응용을 위한 마찰특성 고찰 (Study on the Frictional Characteristics of Micro-particles for Tribological Application)

  • 성인하;한흥구;공호성
    • Tribology and Lubricants
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    • 제25권2호
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    • pp.81-85
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    • 2009
  • Interests in micro/nano-particles have been greatly increasing due to their wide applications in various fields such as environmental and medical sciences as well as engineering. In order to obtain a fundamental understanding of the tribological characteristics at particle-surface contact interface, frictional behaviors according to load/pressure and materials were obtained by using atomic force microscope(AFM) cantilevers with different stiffnesses and tips. Lateral contact stiffnesses were observed in various tip-surface contact situations. Experimental results show that stick-slip friction behavior occurs even when the colloidal probes with a particle of a few micrometers in diameter, which have a relatively large contact area and lack a well-shaped apex, were used. This indicates that atomic stick-slip friction may be a more common phenomenon than it is currently thought to be. Also, experimental results were investigated by considering the competition between the stiffness of the interatomic potential across the interface and the elastic stiffnesses of the contacting materials and the force sensor itself.