KSTLE International Journal

Korean Tribology Society (한국트라이볼로지학회)
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Submicron-scale Polymeric Patterns for Tribological Application in MEMS/NEMS

  • Singh R. Arvind (Tribology Research Center, Korea Institute of Science and Technology) ;
  • Yoon Eui-Sung (Tribology Research Center, Korea Institute of Science and Technology) ;
  • Kim Hong Joon (Tribology Research Center, Korea Institute of Science and Technology) ;
  • Kong Hosung (Tribology Research Center, Korea Institute of Science and Technology) ;
  • Jeong Hoon Eui (School of Mechanical and Aerospace Engineering, Seoul National University) ;
  • Suh Kahp Y. (School of Mechanical and Aerospace Engineering, Seoul National University)
  • Published : 2005.12.01
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Abstract

Submicron-scale patterns made of polymethyl methacrylate (PMMA) were fabricated on silicon-wafer using a capillarity-directed soft lithographic technique. Polyurethane acrylate (PUA) stamps (Master molds) were used to fabricate the patterns. Patterns with three different aspect ratios were fabricated by varying the holding time. The patterns fabricated were the negative replica of the master mold. The patterns so obtained were investigated for their adhesion and friction properties at nano-scale using AFM. Friction tests were conducted in the range of 0-80 nN. Glass (Borosilicate) balls of diameter 1.25 mm mounted on cantilever (Contact Mode type NPS) were used as tips. Further, micro-friction tests were performed using a ball-on-flat type micro-tribe tester, under reciprocating motion, using a soda lime ball (1 mm diameter) under a normal load of 3,000 mN. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C$) and relative humidity ($45{\pm}5\%$). Results showed that the patterned samples exhibited superior tribological properties when compared to the silicon wafer and non-patterned sample (PMMA thin film) both at the nano and micro-scales, owing to their increased hydrophobicity and reduced real area of contact. In the case of patterns it was observed that their morphology (shape factor and size factor) was decisive in defining the real area of contact.

Keywords

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