Improvement of CVD-TiN diffusion barrier performance in Cu metallization by a thin Al interlayer between Cu and TiN (Cu 배선 공정에서 Al 중간층을 이용한 CVD-TiN 확산 방지막의 성능 향상)
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- Proceedings of the Materials Research Society of Korea Conference
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- 1999.05a
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- pp.104-104
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- 1999