• 제목/요약/키워드: mesoporous surface

검색결과 209건 처리시간 0.029초

저유전물질로의 응용을 휘한 규칙성 메조포러스 실리카 박막에의 HMDS 처리 (HMDS Treatment of Ordered Mesoporous Silica Film for Low Dielectric Application)

  • 하태정;최선규;유병곤;박영호
    • 한국세라믹학회지
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    • 제45권1호
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    • pp.48-53
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    • 2008
  • In order to reduce signal delay in ULSI, an intermetal material of low dielectric constant is required. Ordered mesoporous silica film is proper to intermetal dielectric due to its low dielectric constant and superior mechanical properties. The ordered mesoporous silica film prepared by TEOS (tetraethoxysilane) / MTES (methyltriethoxysilane) mixed silica precursor and Brij-76 surfactant was surface-modified by HMDS (hexamethyldisilazane) treatment to reduce its dielectric constant. HMDS can substitute $-Si(CH_3)_3$ groups for -OH groups on the surface of silica wall. In order to modify interior silica wall, HMDS was treated by two different processes except the conventional spin coating. One process is that film is dipped and stirred in HMDS/n-hexane solution, and the other process is that film is exposed to evaporated HMDS. Through the investigation with different HMDS treatment, it was concluded that surface modification in evaporated HMDS was more effective to modify interior silica wall of nano-sized pores.

The Formation of Metal (M=Co(II), Ni(II), and Cu(II)) Complexes by Aminosilanes Immobilized within Mesoporous Molecular Sieves

  • 박동호;박성수;최상준
    • Bulletin of the Korean Chemical Society
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    • 제20권3호
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    • pp.291-296
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    • 1999
  • The immobilization of APTMS(3-(2-aminoethylamino)propyltrimethoxysilane) and AAPTMS(3-(2-(2-aminoethyl)aminoethylanino)propyltrimethoxysilane) on the surface of high quality mesoporous molecular sieves MCM-41 and MCM-48 have been confirmed by F.T.-IR spectroscopy, Raman spectroscopy, 29Si solid state NMR, and a surface polarity measurement using Reichardt's dye. The formation of metal (Co(Ⅱ), Ni(Ⅱ), and Cu(Ⅱ)) complexes by immobilized aminosilanes have been investigated by photoacoustic spectroscopy(PAS). The assignment of UV-Vis. PAS bands makes it possible to identify the structure of metal complexes within mesoporous molecular sieves. Co(Ⅱ) ion may be coordinated mainly in a tetrahedral symmetry by two APTMS onto MCM-41, and in an octahedral one by two AAPTMS. Both Ni(Ⅱ) and Cu(Ⅱ) coordinated by aminosilanes within MCM-41 form possibly the octahedral complexes such as [Ni(APTMS)2(H20)2]2+, [Ni(AAPTMS)2]2+, [Cu(APTMS)2(H2O)2]2+, and [Cu(AAPTMS)(H2O)3]2+, respectively. The PAS band shapes of complexes onto MCM-48 are similar to those of corresponding MCM-41 with the variation of PAS intensity. Most of metal ion(Ⅱ) within MCM-41 and MCM-48 are coordinated by aminosilanes without the impregnation on the surface.

양자점이 고밀도화된 마이크로 비드의 제조 및 특성 (The Synthesis and Characterization of Mesoporous Microbead Incorporated with CdSe/ZnS QDs)

  • 이지혜;현상일;이종흔;구은회
    • 한국전기전자재료학회논문지
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    • 제25권8호
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    • pp.657-663
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    • 2012
  • The spherical mesoporous silica is synthesized and incorporated with CdSe/ZnS quantum dots(QDs) for preparing micro beads to detect toxic and bio-materials with high sensitivity. The spherical silica beads with the brunauer-emmett-telle(BET) average pore size of 15 nm were prepared with a ratio 1, 3, 5-trimethylbenzen, as a swelling agent, to the block-copolymer template surfactant of over 1 and under vigorous mixing condition. The surface of spherical mesoporous silica is modified using octadecylsilane for incorporating QDs. Based on photoluminescence(PL) spectra, the relative brightness of mesoporous silica beads incorporated with 10 nM of QDs is 79,000 times brighter than that of Rodamine 6 G.

실리카 주형을 이용한 메크로/메조다공성 탄화규소 세라믹의 제조와 비교특성 (Fabrication and Characterization of Macro/Mesoporous SiC Ceramics from SiO2 Templates)

  • 홍난영;;박경훈;김동표
    • 한국세라믹학회지
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    • 제41권7호
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    • pp.528-533
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    • 2004
  • 입자크기가 20∼700nm인 구형 실리카입자의 자연침강 혹은 원심분리법으로 제조한 주형체에 탄화규소 전구체 polymethyl-silane (PMS) 혹은 polycarbosilane (PCS) 고분자 용액을 함침한다음, 가교 및 1000∼140$0^{\circ}C$ 열분해하고 마지막으로 불산 (HF)으로 실리카를 식각하여 84∼658nm 기공이 3차원으로 정렬된 메크로다공성(macroporous) 탄화규소 세라믹과 불규칙적인 15∼65nm 기공을 가진 메조다공성(mesoporous) 탄화규소 세라믹을 제조하였다. 전자는 112nm 실리카 입자 주형체를 사용하여 140$0^{\circ}C$로 처리했을 때, 표면적 584.64$m^2$g$^{-1}$을 나타낸 반면, 후자는 20-30nm 실리카 주형체를 사용하여 100$0^{\circ}C$로 처리하였을때, 최대의 표면적 619.4$m^2$g$^{-1}$를 나타내었다, 이와 같이 사용된 실리카 입자, 고분자 전구체, 그리고 열처리 조건에 따른 기공특성을 SEM. TEM 및 BET으로 분석 설명하였다.

메조포러스 알루미나를 이용한 AlN 분말 제조 및 특성분석 (Preparation of AlN Powder Using Mesoporous Alumina and Its Characterization)

  • 김은비;이윤주;신동근;권우택;김수룡;강미숙;김영희
    • 한국세라믹학회지
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    • 제51권6호
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    • pp.544-548
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    • 2014
  • Aluminum nitride was synthesized using a carbothermal method from mesoporous alumina having a high surface area (> $1,000m^2/g$) as an aluminum source and CNTs (carbon nano tubes) as a carbon source. In this case the mesoporous alumina was used as the starting material instead of ${\alpha}-Al_2O_3$ with the expectation that the mesopores in mesoporous alumina act as channels for N2 gas and elimination of CO generated as by-product. It is also expected that the synthetic temperature should be lower compared to the use of ${\alpha}-Al_2O_3$ as a starting material due to its high surface area. The crystallinity of the produced aluminum nitride was studied by XRD and FT-IR, and the microstructure was investigated by FE-SEM. Also the purity of the aluminum nitride was analyzed through N/O determinator and ICP analysis.

폴리스티렌 구형입자를 주형으로 이용한 할로우 메조포러스 질화탄소 구형입자의 합성 (Synthesis of Hollow Mesoporous Carbon Nitride Spheres Using Polystyrene Spheres as Template)

  • 박성수;하창식
    • 접착 및 계면
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    • 제15권2호
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    • pp.63-68
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    • 2014
  • 주형으로 구형의 폴리스티렌을 사용하고 질소와 탄소원으로 시안아미드를 사용하여 열처리 과정을 거친 후 구형의 할로우 메조포러스 질화탄소 물질을 합성하였다. 이때 할로우 메조포러스 질화탄소 물질을 합성하는 과정에서 실리카와 같은 무기물 주형을 사용하지 않기 때문에 이차적인 실리카 제거 공정이 필요 없고 용매를 전혀 사용하지 않는다. 구형의 폴리스티렌 입자는 약 170 nm 크기였고 그리고 할로우 메조포러스 질화탄소 구형입자의 할로우 직경은 약 82 nm, 벽 두께는 약 13 nm이었다. 또한 할로우 메조포러스 질화탄소 물질의 표면적, 나노세공 크기, 세공부피는 각각 $188m^2g^{-1}$, 3.8 nm, $0.35cm^3g^{-1}$이었다. 한편, 할로우 벽은 흑연구조와 유사한 박막층의 쌓임 구조를 가졌으며 이러한 할로우 메조포러스 질화탄소 물질은 연료전지, 촉매, 광촉매, 전자방출 소자 등과 같은 분야에 매우 높은 응용 가능성을 가질 것으로 기대된다.

Studies on Electrical Double Layer Capacitor Based on Mesoporous Activated Carbon

  • Meigen, Deng;Yihong, Feng;Bangchao, Yang
    • Carbon letters
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    • 제6권2호
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    • pp.86-88
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    • 2005
  • Mesoporous activated carbon (AC) was prepared from aged petroleum coke through chemical activation. The AC has a specific surface area of 1733 $m^2/g$ and a mean pore diameter of 2.37 nm. The volume fraction of 2 to 4nm pores is 56.74%. At a current density of 10 mA/$cm^2$, a specific capacitance of 240 F/g is achieved representing the use factor of the surface area of 69.2%. And the electrical double layer capacitor (EDLC) based on the AC shows an excellent power performance. This result suggests that the presence of high fraction of mesopores can effectively increase the adsorption efficiency of the specific surface area of the AC and enhance the power performance of EDLC based on the efficient surface area of the AC.

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전기 이중층 커패시터를 위한 다공성 탄소나노섬유의 메조 기공 제어 효과 (Mesoporous Control Effect of Porous Carbon Nanofibers for Electrical Double-Layer Capacitors)

  • 조현기;신동요;안효진
    • 한국재료학회지
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    • 제29권3호
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    • pp.167-174
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    • 2019
  • To improve the performance of carbon nanofibers as electrode material in electrical double-layer capacitors (EDLCs), we prepare three types of samples with different pore control by electrospinning. The speciments display different surface structures, melting behavior, and electrochemical performance according to the process. Carbon nanofibers with two complex treatment processes show improved performance over the other samples. The mesoporous carbon nanofibers (sample C), which have the optimal conditions, have a high sepecific surface area of $696m^2g^{-1}$, a high average pore diameter of 6.28 nm, and a high mesopore volume ratio of 87.1%. In addition, the electrochemical properties have a high specific capacitance of $110.1F\;g^{-1}$ at a current density of $0.1A\;g^{-1}$ and an excellent cycling stability of 84.8% after 3,000 cycles at a current density of $0.1A\;g^{-1}$. Thus, we explain the improved electrochemical performance by the higher reaction area due to an increased surface area and a faster diffusion path due to the increased volume fraction of the mesopores. Consequently, the mesoporous carbon nanofibers are demonstrated to be a very promising material for use as electrode materials of high-performance EDLCs.

다공성 산화타이타늄 나노입자 합성과 염료감응형 태양전지 응용 (Synthesis of Mesoporous Titanium Dioxide Nanoparticles and Their Application into Dye Sensitized Solar Cells)

  • 김휘동;안지영;김수형
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 춘계학술대회 초록집
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    • pp.64.2-64.2
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    • 2010
  • In order to improve the overall power conversion efficiency in dye-sensitized solar cells (DSSCs), it is very important to secure the sufficient surface area of photocatalytic nanoparticles layer for absorbing dye molecules. It is because increasing the amount of dye absorbed generally results in increasing the amount of light harvesting. In this work, we proposed a new method for increasing the specific surface area of photocatalytic titanium oxide ($TiO_2$) nanoparticles by using an inorganic templating method. Salt-$TiO_2$ composite nanoparticles were synthesized in this approach by spray pyrolyzing both the titanium butoxide and sodium chloride solution. After aqueous removal of salt from salt-$TiO_2$ composite nanoparticles, mesoporous $TiO_2$ nanoparticles with pore size of 2~50 nm were formed and then the specific surface area of resulting porous $TiO_2$ nanoparticle was measured by Brunauer-Emmett-Teller (BET) method. Generally, commercially available P-25 with the average primary size of ~25 nm $TiO_2$ nanoparticles was used as an active layer for dye-sensitized solarcells, and the specific surface area of P-25 was found to be ~50 $m^2/g$. On the other hand, the specific surface area of mesoporous $TiO_2$ nanoparticles prepared in this approach was found to be ~286 $m^2/g$, which is 5 times higher than that of P-25. The increased specific surface area of $TiO_2$ nanoparticles will absorb relatively more dye molecules, which can increase the short curcuit current (Jsc) in DSSCs. The influence of nanoporous structures of $TiO_2$ on the performance of DSSCs will be discussed in terms of the amount of dye molecules absorbed, the fill factor, the short circuit current, and the power conversion efficiency.

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