• 한국기계가공학회지
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• 제14권5호
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• pp.126-133
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• 2015

Recently, there has been demand for polymeric porous membranes in various fields, such as environmental engineering, pharmaceutics, tissue engineering, drug delivery, biology, and fuel cells. In this study, it is proposed that a polymer particle-based porous membrane can be fabricated using electrospraying and sintering processes. Electrospraying can fabricate polymeric particles with diameters ranging from several micrometers to tens of nanometers without the cumbersome particle aggregation problem. Additionally, the particles can be sintered through thermo-compression under the glass transition temperature. In this study, a polymethyl methacrylate particle-based porous membrane with an average pore size of less than 500 nm is fabricated using the proposed method.

• 한국수소및신에너지학회논문집
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• 제28권3호
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• pp.246-251
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• 2017

To fabricate a hydrocarbon polymer electrolyte composite membrane incorporated with Pt nanoparticle, the polymer electrolyte membrane made of a sulfonated-fluorinated hydrophilic-hydrophobic block copolymer (SFBC) and sulfonated poly (ether ether ketone) (SPEEK) blend in the wight ratio of 1 : 1 was synthesized, and a simple drying process was used in order to incorporate Pt nanoparticle into the SFBC/SPEEK film by reducing platinum (II) bis (acetylacetonate), Pt $(acac)_2$. The distribution of the Pt nanoparticles was observed by transmission electron microscopy (TEM), and mechanical and thermal properties were tested by universal testing machine (UTM) and thermogravimetry analyzer (TGA). Cation conductivity, ion exchange capacity (IEC) and I-V characteristics were estimated.

• 반도체디스플레이기술학회지
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• 제14권3호
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• pp.7-11
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• 2015

In order to protect the patterned mask from contamination during lithography process, pellicle has become a critical component for Extreme Ultraviolet (EUV) lithography technology. According to EUV pellicle requirements, the pellicle should have high EUV transmittance and robust mechanical property. In this study, silicon nitride, which is well-known for its remarkable mechanical property, was used as a pellicle membrane material to achieve high EUV transmittance. Since long silicon wet etching process time aggravates notching effect causing stress concentration on the edge or corner of etched structure, the remaining membrane is prone to fracture at the end of etch process. To overcome this notching effect and attain high transmittance, we began preparing a rather thick (200 nm) $SiN_x$ membrane which can be stably manufactured and was thinned into 43 nm thickness with HF wet etching process. The measured EUV transmittance shows similar values to the simulated result. Therefore, the result shows possibilities of HF thinning processes for $SiN_x$ EUV pellicle fabrication.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.237-240
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• 2005

The demand of micro electrical mechanical system (MEMS) bio/chemical sensor is rapidly increasing. To prevent the contamination of sensing area, a filtration system is required in on-chip total analyzing MEMS bio/chemical sensor. A nano-filter was mainly applied in some application detecting submicron feature size bio/chemical products such as bacteria, fungi and so on. We suggested a simple nano-filter fabrication process based on replication process. The mother pattern was fabricated by holographic lithography and reactive ion etching process, and the replication process was carried out using polymer mold and UV-imprinting process. Finally the nano-filter is obtained after removing the replicated part of metal deposited replica. In this study, as a practical example of the suggested process, a nano-dot array was replicated to fabricate nano-filter fur bacteria sensor application.

• 한국세라믹학회지
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• 제51권4호
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• pp.337-343
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• 2014

A single layer ultrafiltration(UF) ceramic membrane was prepared using boehmite sol. Boehmite was synthesized using a typical sol-gel process with optimization of the viscosity, pH, molar ratio of aluminum isopropoxide(AIP) and $HNO_3$. Boehmite sol was coated on a microfiltration(MF) support using the dip-coating method. MF support was dipped into the boehmite sol with a withdrawal speed of 5 mm/s and was maintained for 10 s in the boehmite sol, resulting in a uniform UF membrane layer of $10{\mu}m$ thickness. The porosity of the obtained membrane was measured and found to be 41.2%; the pore size was found to range from 80~100 nm, corresponding to the pore size of the UF membrane. The flux of the obtained membrane was initially 540 $L/m^2h$ and approximately 85% of the initial flux was recovered using a periodic back-flushing process.

• 한국수소및신에너지학회논문집
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• 제21권4호
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• pp.271-277
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• 2010

$(Ba(Zr_{0.85}Y_{0.15})O_{3-\delta})$ oxide, showing high protonic conductivity at high temperatures and good chemical stability with $CO_2$ are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BZY-Ni layer has to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and may be applicable to the fabrication process of AD integration ceramic layer effectively. XRD, SEM, X-ray mapping measurements were conducted in order to analyze the characteristics of BZY-Ni membrane fabricated by AD process. it is observed that it is homogeneous distribution for BZY-Ni. The result of $H_2$ permeation rate suggests that BZY-Ni composite is higher than BZY.

• 멤브레인
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• 제34권3호
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• pp.172-181
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• 2024

대부분의 국가들은 온실가스 배출량을 줄이고 기후변화에 적응하기 위한 행동계획인 NDC (National Determined Contribution)를 법률화 했다. NDC 목표 달성을 위해 다양한 기술이 개발되고 있으며, 특히 가스상의 온실가스나 에너지원의 정화를 위해 분리막 수요가 증가하고 있다. 따라서, 본 논문은 다양한 재료 중 실현 가능한 제조 공정과 쉬운 스케일업의 장점을 가지고 있는 고분자 막의 기술 동향을 제공할 것이다.

• 한국물환경학회지
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• 제28권5호
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• pp.639-645
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• 2012

The purpose of this study is to identify the possibility of the CMP wastewater treatment from semiconductor fabrication under operating tubular membrane with coagulants. To find suitable coagulants treating CMP wastewater, we conducted Jar-test. After Jar-test experiments suitable coagulants are PAC(17%), $Ca(OH)_2$ and optimum coagulant dosage is PAC(17%) 10mg/L, $Ca(OH)_2$ 110 ~ 120mg/L. Based on these results, the tubular membrane was applied to CMP wastewater, the turbidity removal efficiency is $Ca(OH)_2$ > PAC(17%) > Nothing. The fast cross-flow velocity and backwash process what are operating characteristics of tubular membrane can be stable CMP wastewater treatment. But when the coagulant and tubular membrane are used at the same time, the withdraw and treatment of the CMP wastewater are possibile. However further treatment process needs if treated water will be used for semiconductor fabrications.

• 한국기계가공학회지
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• 제21권5호
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• pp.105-109
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• 2022

In the field of medical and marine industries, antibacterial surfaces have been emerged as one of the most important issues. Recently, many researchers have been studying antibacterial surfaces to kill bacteria or prevent the adhesion of bacteria. In their researches, various materials and structures are suggested to inhibit the adhesion of bacteria or kill the attached bacteria. However, chemical materials such as antibiotics or metal could be toxic. Moreover, frequent use of antibiotics causes super bacteria having resistance to antibiotics. In this study, nano-pillar structured surface was fabricated using polyurethane acrylate (PUA) and the mechanically induced antibacterial function was confirmed based on the fabricated nanostructures. Nanostructures can damage the bacterial membrane of Gram-negative bacteria through stretching of bacterial membrane via interaction with the nanostructures and the bacterial membrane. Consequently, the proposed transparent, flexible and nanostructured PUA films can be one of promising candidates for antifouling and antibacterial surfaces which can be applied in various industries.

• Archives of Metallurgy and Materials
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• 제67권4호
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• pp.1531-1534
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• 2022

In this study, a SUS316L membrane having double layered pore structures was fabricated, and the pore characteristics were analyzed after coating with a spherical powder and a flake-shaped powder on a disk-shaped SUS316L support using a wet powder spraying process. The thickness of the coated layer was checked using an optical microscope, and air permeability was measured using a capillary flow porometer. When the coating amount was similar, the fine porous layer prepared using flake powder was thicker and showed higher porosity. In the case of a similar thickness, the case of using flake powder was half of the amount of spherical powder used. Therefore, it was confirmed that it is possible to manufacture a metal membrane having a high filter efficiency even with a small coating amount when using the flake powder.