• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.257-258
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• 2002

The surface morphology of oil-lubricated surface for hydraulic piston motor is believed to be extremely effective in contact mechanics. adhesion. friction and wear. In order to describe morphology of various rubbed surface on driving condition, the wear test was carried out under different experimental conditions in oil-lubricated system. And fractal descriptors was applied to rubbed surface of hydraulic members with image processing system. These descriptors to analyze surface structure are fractal dimension. Surface fractal dimension can be determined by sum of intensity difference of surface pixel. Morphology of rubbed surface can be effectively obtained by fractal dimension.

• KSTLE International Journal
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• v.9 no.1_2
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• pp.10-12
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• 2008

Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

• Tribology and Lubricants
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• v.24 no.5
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• pp.241-249
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• 2008

This paper describes the tribological effects on the nonlinear behavior of a spur gear pair with one-way clutch according to the direct contact elastic deformation model over a wide range of speeds, considering the hydrodynamic effects. The effects of various lubrication parameters, such as viscosity, film width, and friction, on the nonlinear dynamic behavior were analyzed. Forces due to the entraining velocity and the hydrodynamic friction were about two orders smaller than normal forces over the whole speed range. While the viscosity has a strong effect on the behavior of gear pair systems, friction has very little effect on torsional behavior. The inclusion of the hydrodynamic effect facilitates nonlinearity by increasing the overlap and damping, as well as decreasing elastic deformation and tooth reaction forces.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1769-1775
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• 2004

In presence of collision between two rigid bodies, they exhibit impulsive behavior to generate physically feasible state. When the frictional impulse is involved, collision resolution can not be easily made based on a simple Newton's law or Poisson's law, mainly due to possible change of collision mode during collision, For example, sliding may change to sticking, and then sliding resumes. We first examine two conventional methods: the method of mode evolution by differential equation, and the other by linear complementarity programming. Then, we propose a new method for mode evolution by solving only algebraic equations defining mode changes. Further, our method attains the original nonlinear impulse cone constraint. The numerical simulation will elucidate the advantage of the proposed method as an alternative to conventional ones.

• Transactions on Electrical and Electronic Materials
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• v.8 no.1
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• pp.11-14
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• 2007

Consumables used in Chemical Mechanical Polishing (CMP) have been played important role to improve quality and productivity. Since the properties of consumables constantly change with various reasons, such as shelf time, manufactured time, lot to lot variation from supplier and so on, CMP results are not constant during the process. Also, CMP process results are affected by multiple sources from wafer, conditioner, pad and slurry. Therefore, multiple sensing systems are required to monitor CMP process variation. In this paper, the authors focus on development of monitoring system for CMP process which consist of force, temperature and displacement sensor to measure the signal from CMP process. With monitoring systems mentioned above, complex CMP phenomena can be investigated more clearly.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.2
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• pp.139-146
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• 2014

Sodium borohydride ($NaBH_4$) is considered as a secure metal hydride for hydrogen storage and supply. In this study, the interfacial friction of two-phase flow in the dehydrogenation of aqueous $NaBH_4$ solution in a microchannel with a hydraulic diameter of $461{\mu}m$ is investigated for designing a dehydrogenation chemical reactor flow passage. Because hydrogen gas is generated by the hydrolysis of $NaBH_4$ in the presence of a ruthenium catalyst, two different flow phases (aqueous $NaBH_4$ solution and hydrogen gas) exist in the channel. For experimental studies, a microchannel was fabricated on a silicon wafer substrate, and 100-nm ruthenium catalyst was deposited on three sides of the channel surface. A bubbly flow pattern was observed. The experimental results indicate that the two-phase multiplier increases linearly with the void fraction, which depends on the initial concentration, reaction rate, and flow residence time.

• KSTLE International Journal
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• v.8 no.2
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• pp.26-28
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• 2007

Si(100) surfaces were topographically modified i.e. the surfaces were patterned at micro-scale using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and microchannels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating a thin DLC film. The surfaces were then evaluated for their friction behavior at micro-scale in comparison with those of bare Si(100) flat, DLC coated Si(100) flat and uncoated patterned surfaces. Experimental results showed that the chemically treated (DLC coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the surfaces. This indicates that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro-Electro-Mechanical-Systems (MEMS).

• Journal of the Korean Society for Precision Engineering
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• v.19 no.7
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• pp.154-162
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• 2002

The effect of nonlinear friction in the low velocity is dominant in precise controlled mechanisms and it is difficult to model. This paper is concerned with the compensation for friction using the variable structure system approach as nonmodel based method. The problem of chattering in the sliding mode controller is suppressed by the implementation of the boundary layer concept. And the estimation for friction using sliding mode observer makes the upper bound of matched uncertainty reduced. Accordingly, the effect of chattering can be more suppressed. And the sliding surface is constructed by adding an integral component to the switching function that is made by using error dynamics. This sliding surface guarantees the good tracking performance. Experimental results for a XY table system show that the proposed method has a good performance especially in the low velocity.

• 제어로봇시스템학회:학술대회논문집
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• 1994.10a
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• pp.512-517
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• 1994

The control system of a precise positioning mechanism with resonance and Coulomb friction has been designed using H$_{\infty}$ control theory, and the control performance has been verified by computer simulation and experimental analysis. The DGKF type H$_{\infty}$ control theory with scalar weighting factors was utilized for designing the control system. The followings have been confirmed from the present study: (1) The system with H$_{\infty}$ control presents better convergence and stability than the system with conventional control (PI-notch filter control). (2) The H$_{\infty}$ control system have good robustness properties for a wide range of operating conditions in the presence of external disturbances such as Coulomb friction and changing mechanical resonant frequency.ncy.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.6
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• pp.45-51
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• 1995

This paper proposes a CMAC-based controller for servo systems with stick-slip friction. Performance of the controller was evaluated from computer simulations and compared with that of a conventional PID controller. Firction model used in the simulations is based upon the one proposed by Tustin. It was shown that the CMAC-based controller settles more quickly, and overshoots less than the PID. It was also shown that the CMAC is less sensitive to the changes of the plant parameters.