• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1216-1219
• /
• 2003

The position control is very important in semiconductor manufacturing devices, precision machining tools, precision measuring instruments, etc. The accuracy of measurement for the distance in these devices affect on the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel hybrid (digital and analog) type encoder is proposed. It is shown that from several experiments, a high-resolution angular position measurement device can be designed with a low cost incremental encoder and a DSP controller.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2002.05a
• /
• pp.203-206
• /
• 2002

One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state-of-the-art reaches the region of sub-nanometers. We propose a new scheme of phase-measuring electronics that reduces the measurement resolution without further increase in clock speed. Our scheme adopts a super-heterodyne technique that lowers the original beat frequency to a level of 1 MHz by mixing it with electrically generated reference signal. The technique enables us to measure the phase of Doppler shift with a resolution of 1.58 nanometer at a sampling rate of 1 MHz. To avoid the undesirable decrease in the maximum measurable speed caused by the lowered beat frequency, a special from of frequency up-down counting technique is combined with the super-heterodyning. This alloys performing required phase unwrapping simply by using programmable digital gates without 2$\pi$ ambiguities up to the maximum velocity of 2.35 m/s.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.30 no.1 s.244
• /
• pp.41-47
• /
• 2006

High resolution dopant profiling in semiconductor devices has been an intense research topic because of its practical importance in semiconductor industry. Although several techniques have already been developed. it still requires very expensive tools to achieve nanometer scale resolution. In this study we demonstrated a novel dopant profiling technique with nanometer resolution using very simple setup. The newly developed technique measures the thermoelectric voltage generated in the contact point of the SPM probe tip and MOSFET surface instead of electrical signals widely adopted in previous techniques like Scanning Capacitance Microscopy. The spatial resolution of our measurement technique is limited by the size of contact size between SPM probe tip and MOSFET surface and is estimated to be about 10 nm in this experiment.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2012.10a
• /
• pp.636-642
• /
• 2012

Delay-and-sum (DAS) Planar Beamforming has been a widely used Noise Source Identification Technique for the last decade. It is a quick one shot measurement technique being able to map sources that are larger than the array itself. The spatial resolution is proportional to distance between array and source, and inversely proportional to wavelength, thus the resolution is only good at medium to high frequencies. Improved algorithms using iterative de-convolution techniques offers up to ten times better resolution. The principle behind these techniques is described in this paper, as well as measurement examples from the automotive industry are presented.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.11 no.12
• /
• pp.2227-2232
• /
• 2007

In this paper, it is presented a Real FFT for the FMCW radar distance measurement with high resolution. The high distance resolution needs the measurement of the accurate beat frequency. To improve the distance resolution, zoom fft, decimation, digital low pass filter and zero padding method are used. The simulation results using the Matlab show ${\pm}5mm$ of distance resolution and the measuring range is up to 35meter.

• Journal of the Korean Society for Precision Engineering
• /
• v.19 no.9
• /
• pp.172-178
• /
• 2002

One of the ever-increasing demands on the performances of heterodyne interferometers is to improve the measurement resolution, of which current state -of-the-art reaches the region of sub-nanometers. So far, the demand has been met by increasing the clock speed that drives the electronics involved fur the phase measurement of the Doppler shift, but its further advance is being hampered by the technological limit of modem electronics. To cope with the problem, in this investigation, we propose a new scheme of phase -measuring electronics that reduces the measurement resolution without further increase in clock speed. Our scheme adopts a super-heterodyne technique that lowers the original beat frequency to a level of 1 MHz by mixing it with a stable reference signal generated from a special phase- locked-loop. The technique enables us to measure the phase of Doppler shift with a resolution of 1.58 nanometer at a sampling rate of 1 MHz. To avoid the undesirable decrease in the maximum measurable speed caused by the lowered beat frequency, a special form of frequency up-down counting technique is combined with the super-heterodyning. This allows performing required phase unwrapping simply by using programmable digital gates without 2n ambiguities up to the maximum velocity guaranteed by the original beat frequency.

• Journal of Satellite, Information and Communications
• /
• v.9 no.2
• /
• pp.38-44
• /
• 2014

This paper presents design of a FMCW (Frequency Modulated Continuous Wave) level meter as well as simulation result of the designed system. The system is designed to measure maximum range of 20m since FMCW radar can be used for measuring short range distance. The distance is measured by analyzing the beat signal which is generated as result of mixing transmitting signal with the reflected received signal. The Fast Fourier Transform is applied to analyze the beat signal for calculating the displacement and Zoom FFT technique is used to minimize measurement error as well as increase the resolution of the measurement. The resolution of the measurement of the designed system in this paper is 2.2mm and bandwidth of 1.024GHz is used for simulation. Thus the simulation results are analyzed and compared in various conditions in order to get a comprehensive idea of frequency resolution and displacement resolution.

• Proceedings of the KSME Conference
• /
• 2001.06e
• /
• pp.536-541
• /
• 2001

A high resolution digital cinematic Particle Image Velocimetry(PIV) has been developed. The system consists of a high speed CCD camera, a continuous Ar-ion laser and a computer with camera controller. To improve the spatial resolution, we adopt a Recursive Technique for velocity interrogation. At first, we obtain a velocity vector for a larger interrogation window size based on the conventional two-frame cross-correlation PIV analysis using the FFT algorithm. Based on the knowing velocity information, more spatially resolved velocity vectors are obtained in the next iteration step with smaller interrogation windows. The correct velocity vector at the first step is found to be critical, so we apply a Multiple Correlation Validation(MCV) technique in order to decrease the spurious vectors. The MCV technique turns out to improve SNR(Signal to Noise Ratio) of the correlation table. The developed cinematic PIV method has been applied to the measurement of the unsteady flow characteristics of a Rushton turbine mixer. A total of 3,245 instantaneous velocity vectors were successfully obtained with 4 ms time resolution. The acquired spatial resolution corresponds the performance of the conventional high resolution digital PIV system using a $1K{\times}1K$ CCD camera.

• Communications of the Korean Mathematical Society
• /
• v.16 no.3
• /
• pp.445-458
• /
• 2001

The shape and the distribution of material construction of the scatterer may be obtained from its scattered fields by the iterative inversion in the spectral domain. The illposedness, the resolution, and the uniqueness of the inversion are the key problems in the inversion and inter-related. The illposedness is shown to be caused by the evanescent modes which carries and amplifies exponentially the measurement errors in the back-propagation of the measured scattered fields. By filtering out all the evanescent modes in the cost functional defined as the squared difference between the measured and the calculated spatial spectrum of the scattered fields from the iteratively chosen medium parameters of the scatterer, one may regularize the illposedness of the inversion in the expense of the resolution. There exist many local minima of the cost functional for the inversion of the large and the high-contrast scatterer and the hybrid algorithm combining the genetic algorithm and the Levenberg-Marquardt algorithm is shown to find efficiently its global minimum. The resolution of reconstruction obtained by keeping all the propating modes and filtering out the evanescent modes for the regularization becomes 0.5 wavelength. The super resolution may be obtained by keeping the evanescent modes when the measurement error and instance, respectively, are small and near.

• Journal of the Korean Society of Manufacturing Technology Engineers
• /
• v.8 no.4
• /
• pp.130-135
• /
• 1999

The main scale of linear encoder greatly effects on the precision of displacement measurement. Especially when needing the long range measurement the length of main scale should be increased accordingly. In this paper we propose a linear encoder that uses laser interference pattern as main scale for long range measurement. The linear encoder is similar to Michelson interferometer excepting that the reference mirror is tilted so as to obtain interference fringe pattern and a grating panel is attached on a quadratic photo diodes. Four kinds of grating having phase difference of 0. $\pi$/4, $\pi$/2, 3$\pi$/4 are arranged on the panel. The experimental results show that signals of quadratic photo diode A, B, {{{{ {-}atop {A } }}}} and {{{{ {- } atop {B } }}}} are cosine wavelike and successive signals have phase difference of $\pi$/4 each other. So the proposed method can achieve improved measurement resolution.