A novel hybrid type encoder design for the position control with the high-resolution

The position control is very important in semiconductor manufacturing devices, precision machining tools, precision measuring instruments, etc. The accuracy of measurement for the distance in these devices affect on the performance of the whole devices. Therefore, in those precision instruments, a sensing device that can measure the distance of movement with high-precision resolution is required. In this paper, a novel hybrid (digital and analog) type encoder is proposed. It is shown that from several experiments, a high-resolution angular position measurement device can be designed with a low cost incremental encoder and a DSP controller.