• Title/Summary/Keyword: mac etching

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Silicon Nanostructures Fabricated by Metal-Assisted Chemical Etching of Silicon (MAC Etch를 이용한 Si 나노 구조 제조)

  • Oh, Ilwhan
    • Journal of the Korean Electrochemical Society
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    • v.16 no.1
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    • pp.1-8
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    • 2013
  • This review article summarizes metal-assisted chemical etching (MAC etch or MACE), an anisotropic etching method for Si, and describes principles, main factors, and recent achievements in literature. In 1990, it was discovered that, with metal catalyst on surface and $H_2O_2$/HF as etchant, Si substrate can be etched anisotropically, in even in solution. In contrast to high-cost vacuum-based dry etching methods, MAC etch enables to fabricate a variety of high aspect ratio nanostructures through wet etching process.

Metal-Assisted Chemical Etching에 의한 InAlP표면 Texture 형성 및 반사율 변화

  • Sin, Hyeon-Uk;O, Si-Deok;Lee, Se-Won;Choe, Jeong-U;Sin, Jae-Cheol;Kim, Hyo-Jin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.08a
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    • pp.304-304
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    • 2012
  • III-V 화합물 태양전지는 실리콘 등 다른 태양전지에 비해 1sun상 30% 이상의 고효율을 갖고 있고 direct bandgap과 높은 이동도 등의 물질특성과 3족과 5족의 비율 조절로 같은 결정구조에서 에너지 bandgap이 다른 물질들을 만들기에 용이하여 태양전지 스펙트럼의 넓은 영역을 흡수할 수 있는 장점이 있다. 그러나 셀 자체의 물질이 실리콘에 비하여 고가여서 고성능이 요구되는 우주 인공위성 등에 적용이 되었지만, 2000년대 이후로 집광에 적용 가능한 태양전지의 연구를 거듭하여 2005년부터는 값싼 프레넬 렌즈를 이용하여 1 sun에 비해 500배 해당하는 빛을 셀에 집광하여 보다 효율을 증가시킴으로써 지상발전용에도 적용 가능한 셀을 형성하게 되었다. 더불어 태양전지의 효율을 증가시키기 위한 다양한 구조적 변화의 시도도 많이 이루어지고 있다. 최근 실리콘 태양전지의 표면에 texture 구조를 주어 높은 흡수율과 낮은 반사율을 갖게 함으로써 효율을 증가시키는 사례가 많아지고, III-V 화합물 태양전지도 texturing에 의해 증가된 효율을 발표한바 있다. 본 연구에서는 III-V 화합물 InGaP 태양전지의 window층으로 사용되는 InAlP 층에 Metal-assisted chemical etching (mac etching) 방법으로 texture 구조를 형성하여 etching 시간에 따른 InAlP층의 표면 변화와 반사율의 변화를 분석하였다.

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Nanotexturing and Post-Etching for Diamond Wire Sawn Multicrystalline Silicon Solar Cell (다이아몬드 와이어에 의해 절단된 다결정 실리콘 태양전지의 나노텍스쳐링 및 후속 식각 연구)

  • Kim, Myeong-Hyun;Song, Jae-Won;Nam, Yoon-Ho;Kim, Dong-Hyung;Yu, Si-Young;Moon, Hwan-Gyun;Yoo, Bong-Young;Lee, Jung-Ho
    • Journal of the Korean institute of surface engineering
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    • v.49 no.3
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    • pp.301-306
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    • 2016
  • The effects of nanotexturing and post-etching on the reflection and quantum efficiency properties of diamond wire sawn (DWS) multicrystalline silicon (mc-Si) solar cell have been investigated. The chemical solutions, which are acidic etching solution (HF-$HNO_3$), metal assisted chemical etching (MAC etch) solutions ($AgNO_3$-HF-DI, HF-$H_2O_2$-DI) and post-etching solution (diluted KOH at $80^{\circ}C$), were used for micro- and nano-texturing at the surface of diamond wire sawn (DWS) mc-Si wafer. Experiments were performed with various post-etching time conditions in order to determine the optimized etching condition for solar cell. The reflectance of mc-Si wafer texturing with acidic etching solution showed a very high reflectance value of about 30% (w/o anti-reflection coating), which indicates the insufficient light absorption for solar cell. The formation of nano-texture on the surface of mc-Si contributed to the enhancement of light absorption. Also, post-etching time condition of 240 s was found adequate to the nano-texturing of mc-Si due to its high external quantum efficiency of about 30% at short wavelengths and high short circuit current density ($J_{sc}$) of $35.4mA/cm^2$.

COMPARISON OF MICROLEAKAGE OF NEW GENERATION DENTIN BONDING SYSTEM (자가부식 전처치제를 이용한 상아질 결합재의 미세 누출에 관한 연구)

  • Kim, Jong-Soo
    • Journal of the korean academy of Pediatric Dentistry
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    • v.26 no.1
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    • pp.53-61
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    • 1999
  • Newley developed dentin bonding system which contains self-etching primer performed the removing of smear layer and etching procedure at once. So, it make possible more simple and shorter working time, the stronger bonding strength than conventional dentin bonding system. Cavities were prepared in the buccal and lingual surface of 30 extracted primary molars, and randomly assigned into three equal groups of 10 each. All cavities were filled with Z-100 composite resin following manufacturer's specifications after priming of three different dentin bonding system. Specimens stored for 7 days in 37 degree C water, thermocycled for 1000 cycles between 5 degree C and 55 degree C, immersed in 50% silvernitrate solution for 24 hours, and embedded in resin before being sectioned longitudinally. Data were analyzed by t-test and ANOVA. Mac-Bond II and Clearfil Linear-Bond II showed less microleakage at the occlusal and gingival margins compared to Scotchbond Multi Purpose. All dentin bonding systems showed significantly less microleakage at the occlusal margins compared to the gingival margins. But, there were no significantley difference between each group.

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Optoacoustic Ultrasound Generator Based on Nanostructured Germanium (광음향효과를 이용한 게르마늄 나노구조 기반의 초음파 발생 소자 연구)

  • Yoon, Sang-Hyuk;Heo, Junseok
    • Korean Journal of Optics and Photonics
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    • v.26 no.5
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    • pp.255-260
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    • 2015
  • We have fabricated an optoacoustic ultrasound generator based on nanostructured germanium (Ge). Ge thin films were deposited via e-beam evaporation and then etched using a metal-assisted chemical (MAC) method to form nanostructured Ge films. The measured intensity of ultrasound from the nanostructured Ge covered with PDMS was about 3 times stronger than that of 100-nm-thick chromium (Cr). When the nanostructured Ge was embedded in the PDMS, the intensity of ultrasound became 8.5 times as strong compared to the 100-nm-thick Cr.

EFFECT OF SELF-ETCHING PRIMER APPLICATION ON THE CHARACTERISTICS & STRENGTH OF DENTIN BONDING IN PRIMARY TOOTH (자가부식 프라이머의 처리가 유치의 상아질과 레진 간의 결합 형태와 강도에 미치는 효과)

  • Lee, Jun-Haeng;Kim, Yong-Kee;Kim, Jong-Soo
    • Journal of the korean academy of Pediatric Dentistry
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    • v.26 no.4
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    • pp.595-607
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    • 1999
  • The purpose of this in vitro study was to evaluate the efficacy of self-etching primer which was developed to simplify the bonding procedures by measuring the shear bond strength and observing the interfacial morphology. 90 flat dentinal surfaces were prepared by grinding the buccal and lingual areas of caries-free human deciduous molars. After bonding of composite resin to sample surfaces according to the manufacturer's direction and thermocycling, shear bond strengths were measured using Universal testing machine(Instron). Another groups of specimens were treated by hydrochloric acid to secure the resin only and those tags were evaluated under SEM for their length and forms and the morphology of the bonding sites were also observed. The result as follows. 1. Group III showed higher shear bond strength than group I and II but no statistically significant difference was founded between group I and II(p>.05). 2. Adhesive failure was predominant in group II whereas dentin detachment was the main failure pattern in group I and III. 3. Relating long resin tags of $100-200{\mu}m$ were observed in samples of all groups under SEM. In group I, homogeneously long resin tags were arranged rather tight whereas rather loosely arranged resin tags of various length were found in group II. Lateral branching of resin tags was the characteristic finding observed in group III.

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