• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.877-880
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• 2001

This paper presents the new linear motion device so called "inch-worm" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamics stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Driving input signal is shaped to reduce the residual vibration of inch-worm by LQG controller and cycloid step input. The practical feasibility of inch-worm is also examined by running test.ning test.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 정기총회 및 추계학술대회 논문집 학회본부
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• pp.335-337
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• 1993

Offset voltage and drift characteristics of operational amplifier are critical factor to precision AID conversion System. In this study, a method is suggested to design the programmable A/D conversion system which has high resolution and low drift characteristics. First, hardware was designed to reduce the offset voltage of integrator and comparator, and analog switches are connected to reduce the drift characteristics of operational amplifier. And then, a calibration software technique was performed to obtain the stable data from A/D converter. The main advantage of our method is high precision A/D converter can be constructed with low cost and high confidence. Therefore proposed method is expected to be used in the industrial field where a high precision measurement is required.

• 한국정밀공학회지
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• 제23권4호
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• pp.162-167
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• 2006

Hot embossing lithography(HEL) has the production advantage of comparatively few process step, simple operation, a relatively low cost for embossing tools(Si), and high replication accuracy for small features. In this paper, we considered the nano-molding characteristic according to molding parameters(temperature, pressure, times, etc) and induced a optimal molding condition using HEL. High precision nano-patter master with various shapes were designed and manufactured using the DRIE(Deep Reactive ion Etching), LPCVD(Low Pressure Chemical Vapor Deposition) and thermal oxidation process, and we investigated the molding characteristic of DVD and Blu-ray nickel stamp. We induced flow behaviors of polymer, rheology by shapes and sizes of the pattern through various molding experiments. Finally, with achieving nano-structure molding with high aspect ratio, we will secure a basic technology about the molding of large-area nano-pattern media.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.672-675
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• 2005

To imprint 70-nm wide line-patterns, we used a newly developed ultraviolet nanoimprint lithography (UV-NIL) process in which an elementwise patterned stamp (EPS), a large-area stamp, and pressurized air are used to imprint a wafer in a single step. For a single-step UV-NIL of a 4' wafer, we fabricated two identical $5'\times5'\times0.09'(W{\times}L{\times}H)$ quartz EPSs, except that one is with nanopatterns and the other without nanopatterns. Both of them consist of 16 small-area stamps, called elements, each of which is $10\;mm\;\times\;10\;mm$. UV-curable low-viscosity resin droplets were dispensed directly on each element of the EPSs. The volume and viscosity of each droplet are 3.7 nl and 7 cps. Droplets were dispensed in such a way that no air entrapment between elements and wafer occurs. When the droplets were fully pressed between ESP and wafer, some incompletely filled elements were observed because of the topology mismatch between EPS and wafer. To complete those incomplete fillings, pressurized air of 2 bar was applied to the bottom of the wafer for 2 min. Experimental results have shown that nanopatterns of the EPS were successfully transferred to the resin layer on the wafer.

• Design & Manufacturing
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• 제17권4호
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• pp.14-23
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• 2023

The electric vehicle market is developing rapidly around the world. Also, parts of electric vehicles require precision.In order to produce high-precision motor cores,Press equipment must also have good precision. Drive motor cores are an important technology for electric vehicles. It uses a large high-speed press to mass-produce drive motor cores. Because it's a large high-speed press, there are many reasons why the precision is not good. One of the causes is vibration and noise. Recently, as environmental demands have become stricter, regulations on noise and vibration have been strengthened. It is important for press machines to reduce vibration first for sound insulation and dust proofing. This is because the "breakthrough" phenomenon occurs in the press. Dynamic precision is the precision under the load of the press, Design considering strain and stiffness shall be made. Vibration and noise may occur due to SPM of high-speed press,And vibration and noise can cause structural deformation of the press. Structural deformation of the press can affect the precision of the product.Noise and vibration also cause problems for workers and work environments. Problems with vibration and noise occur during press processing, and vibration and noise lead to damage to the mold or defects in the product. Reliability in high-quality technology must be secured with low noise and low vibration during press processing. Modular shape and deformation energy effects were analyzed through finite element analysis. In this study, a study on vibration and noise countermeasures was conducted through finite element analysis of a large high-speed press.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.143-144
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 추계학술대회 논문집
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• pp.423-424
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.385-386
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.519-520
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• 2007

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2012년도 추계학술대회 논문집
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• pp.131-132
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• 2012