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Nano Molding Technology for Optical Storage Media with Large-area Nano-pattern  

Shin Hong-Gue (강원대 기계메카트로닉스공학부 대학원)
Ban Jun-Ho (강원대 기계메카트로닉스공학부 대학원)
Cho Ki-Chul (강원대 기계메카트로닉스공학부 대학원)
Kim Heon-Yong (강원대 기계메카트로닉스공학과)
Kim Byeong-Hee (강원대학교 기계메카트로닉스공학과)
Publication Information
Journal of the Korean Society for Precision Engineering / v.23, no.4, 2006 , pp. 162-167 More about this Journal
Abstract
Hot embossing lithography(HEL) has the production advantage of comparatively few process step, simple operation, a relatively low cost for embossing tools(Si), and high replication accuracy for small features. In this paper, we considered the nano-molding characteristic according to molding parameters(temperature, pressure, times, etc) and induced a optimal molding condition using HEL. High precision nano-patter master with various shapes were designed and manufactured using the DRIE(Deep Reactive ion Etching), LPCVD(Low Pressure Chemical Vapor Deposition) and thermal oxidation process, and we investigated the molding characteristic of DVD and Blu-ray nickel stamp. We induced flow behaviors of polymer, rheology by shapes and sizes of the pattern through various molding experiments. Finally, with achieving nano-structure molding with high aspect ratio, we will secure a basic technology about the molding of large-area nano-pattern media.
Keywords
Blu-ray disc; Hot Embossing; Micro rheology; Nano-molding;
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