Behavior of Solid Phase Crystallization of Amorphous Silicon Films at High Temperatures according to Raman Spectroscopy (라만 분석을 통한 비정질 실리콘 박막의 고온 고상 결정화 거동)
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- Journal of the Korean institute of surface engineering
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- v.43 no.1
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- pp.7-11
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- 2010