• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.93-93
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• 2016

Large scale integrated circuits (LSIs) has been improved by the shrinkage of the circuit dimensions. The smaller chip sizes and increase in circuit density require the miniaturization of the line-width and space between metal interconnections. Therefore, an extreme precise control of the critical dimension and pattern profile is necessary to fabricate next generation nano-electronics devices. The pattern profile control of plasma etching with an accuracy of sub-nanometer must be achieved. To realize the etching process which achieves the problem, understanding of the etching mechanism and precise control of the process based on the real-time monitoring of internal plasma parameters such as etching species density, surface temperature of substrate, etc. are very important. For instance, it is known that the etched profiles of organic low dielectric (low-k) films are sensitive to the substrate temperature and density ratio of H and N atoms in the H2/N2 plasma [1]. In this study, we introduced a feedback control of actual substrate temperature and radical density ratio monitored in real time. And then the dependence of etch rates and profiles of organic films have been evaluated based on the substrate temperatures. In this study, organic low-k films were etched by a dual frequency capacitively coupled plasma employing the mixture of H2/N2 gases. A 100-MHz power was supplied to an upper electrode for plasma generation. The Si substrate was electrostatically chucked to a lower electrode biased by supplying a 2-MHz power. To investigate the effects of H and N radical on the etching profile of organic low-k films, absolute H and N atom densities were measured by vacuum ultraviolet absorption spectroscopy [2]. Moreover, using the optical fiber-type low-coherence interferometer [3], substrate temperature has been measured in real time during etching process. From the measurement results, the temperature raised rapidly just after plasma ignition and was gradually saturated. The temporal change of substrate temperature is a crucial issue to control of surface reactions of reactive species. Therefore, by the intervals of on-off of the plasma discharge, the substrate temperature was maintained within ${\pm}1.5^{\circ}C$ from the set value. As a result, the temperatures were kept within $3^{\circ}C$ during the etching process. Then, we etched organic films with line-and-space pattern using this system. The cross-sections of the organic films etched for 50 s with the substrate temperatures at $20^{\circ}C$ and $100^{\circ}C$ were observed by SEM. From the results, they were different in the sidewall profile. It suggests that the reactions on the sidewalls changed according to the substrate temperature. The precise substrate temperature control method with real-time temperature monitoring and intermittent plasma generation was suggested to contribute on realization of fine pattern etching.

• Journal of the Korea Institute of Building Construction
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• v.17 no.4
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• pp.321-329
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• 2017

Concrete is a semi-brittle material, so its compressive strength is high but its tensile strength is low. The use of fiber-reinforced concrete to improve the disadvantages of such concrete can be an effective way to toughen effective toughness, and the performance is improved by using steel fiber reinforced concrete for structures that are vulnerable to bending forces. However, alternative materials are required due to corrosion of steel fiber and lowering of workability. The purpose of this study is to evaluate the availability of replacing steel fiber reinforced concrete by evaluating physical properties, mechanical properties and drying shrinkage properties of concrete using macro forta fiber with excellent diffusibility. Experimental results show that the macro forta fiber has better fluidity and mechanical performance than the steel fiber reinforced concrete. It was also confirmed that the crack resistance of concrete using Macro Forta fiber is effective in improving structural cracking and drying shrinkage resistance compared to steel fiber reinforced concrete.

• Journal of Forest and Environmental Science
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• v.23 no.1
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• pp.57-63
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• 2007

Anatomical characteristics of black and white charcoal of Quercus variabilis and Quercus mongolica manufactured by a Korean traditional kiln were investigated by scanning electron microscopy. In both charcoal, the earlywood vessels shrank in tangential direction, whereas the other cells didn't change. However, in the case of latewood vessels, black charcoal did not show tangential direction shrinkage, but white charcoal did. The wood fiber were changed severly in shape due to the excessive shrinkage. Tyloses in early wood vessel were still shown unchanged shape in both charcoals. Cell wall of ray parenchyma was observed and their shapes were severly distorted. Voids between ray parenchyma were observed in white charcoal, which maybe due to high temperature in white charcoal. Moreover, lumen diameters in the uniseriate ray and multiseriate ray were decreased at the high charring temperature. These results showed that the low charcoal yield of the white charcoal compared to the black charcoal was caused by decrease of cell dimensions as well as loss of wood components associated with the carbonization temperature.

• Journal of the Korean Wood Science and Technology
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• v.27 no.2
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• pp.70-77
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• 1999

Objective of this research is to obtain fundamental data of carbonized wood wastes for soil condition, de-ordorization, absorption of water, carrier for microbial activity, and purifying agent for water quality of river. The carbonization technique and the properties of carbonized wood wastes(thinned trees) are analyzed. Proximate analysis shows the thinned wood contains 0.22-0.73% ash, 77-80% volatile matter, and 10-14% fixed carbon. The charcoal yield decreases and the shrinkage rate increases as the carbonization temperature and time increase. The charcoal yields of Larix leptolepis, Pinus rigida and Pinus densiflora are high, whereas those of Pinus koraiensis and Quercus variabilis are low. The shrinkage rate by carbonization has same trend as water removal of wood. The specific gravity after the carbonization decreases about 50% comparing to green wood. The charcoal has 0.89-4.08% ash, 6.31-13.79% volatile matter, and 73.9-83.5% fixed carbon. As the carbonization temperature and time increase, pH of charcoal increases. When the carbonization temperature is $400^{\circ}C$, pH is about 7.5. When the temperature is between 600 to $800^{\circ}C$, pH is about 10 with small difference. The water-retention capacity is not affected by the carbonization temperature and time. The water-retention capacity within 24hr is about 2.5 - 3times of sample weight, and the equivalent moisture content becomes 2-10% after 24 hr.

• The Journal of Korean Academy of Prosthodontics
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• v.44 no.1
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• pp.112-123
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• 2006

Purpose: The biocompatibility and bio-adhesive property of a dental implant abutment are important for proper soft tissue healing and maintenance of osseointegration of implant. However, studies of soft tissue healing and mucosal attachment of various materials of implant abutment other than titanium are still needed. In this study, cell attachment, proliferation, cytotoxicity of human gingival fibroblast for ceramic, gold alloy, Ni-Cr alloy and, commercially available pure titanium as a control were evaluated, using MTS and scanning electron microscopy. Materials and Methods: Specimen was designed to disc, 4mm diameter and 1mm thickness, made of ceramic, gold alloy, Ni-Cr alloy and commercially available pure titanium. Primary culture of human gingival fibroblasts were grown in Dulbecco's modified Eagle's medium with 10% fetal bovine serum and 1% antibiotics. Cells were inoculated in the multiwell plates placed the specimen disc. Cell Titer 96 AQucous One Solution Cell Proliferation Assay were done after 1hour 3hours, 24hours, 3days, 5days of incubation. The discs were processed for scanning electron micrography to evaluate cell attachment and morphologic change. Results: The results were obtained as fellows. 1. The ceramic showed high cell attachment and proliferation and low cytotoxicity, which is as much bioadhesive and biocompatible as titanium. 2. The gold alloy represented limited proliferation of human gingival fibroblast and the highest cytotoxicity among tested materials (p<0.05). 3. The Ni-Cr alloy limited the proliferaion of the human gingival fibroblast compared to titanium(p<0.05) but cytotoxicity on the bottom of well was not so considerable, compared to titanium. 4. On the scanning electron micrographs , the ceramic showed good attachment and proliferation of human gingival fibroblast, which was similar to titanium. But gold alloy and Ni-Cr alloy showed the shrinkage of gingival fibroblast both after 24 hours and 3 days. On 5th day, small amount of the human gingival fibroblast proliferation was observed on the Ni-Cr alloy, while the shrinkage of gingival fibroblast was still observed on the gold alloy. Conclusions: These results suggest that the ceramic abutment is as biocompatible as titanium to make proper mucosal seal. The gold alloy has a high cytotoxicity to limit proliferation of gingival fibroblast, which suggest limited use on the anterior tooth where soft tissue healing is recommeded.

• Journal of Conservation Science
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• v.31 no.1
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• pp.1-11
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• 2015

Seated Amitabha Triad at Muwisa Temple (Treasure No. 1312) had been known as wooden Buddha statue, but a precise safety inspection revealed that the statue is terracotta Buddha statue made with clay. The clay layer of Amitabha Triad was conserved due to its severe damage. In this study, experiments were conducted to produce the most appropriate filler for the conservation treatment of the seated Amitabha Triad. Mixed clay samples with various ratios were produced and surface hardening state, crack, color change, and shrinkage of the samples during dry process were measured. Loess, fine sand powder, and cotton were used to produce the mixed clay for the filler with six different ratios and then 12 different concentration glues made with glutinous rice glue, Pachymeniopsis Elliptica glue, and animal glue were added as adhesives. Total 72 types of samples were prepared and comparative study was conducted. As a result, when the mixed clay contains 2.5% cotton compared to the weight per cent of loess and fine sand powder and also loess and fine sand in the mixed clay have a 15:1 ratio, the mixed clay had the lowest shrinkage. Animal glue is considered as an appropriate glue since it had small color change, low physical property change and shringkage. Therefore, mixed clay (loess:fine sand=15:1) mixed with 15ml animal glue is likely to be a suitable filler for conservation treatment of the seated amitabha triad at the Muwisa Temple.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.6
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• pp.638-646
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• 2023

Recently, active research has been conducted to enhance the power characteristics and thermal stability of lithium-ion batteries (LiBs) by modifying separators using a ceramic coating method. However, since the thermal properties and surface features of the separator vary depending on the characteristics of the ceramic powders applied to the separator, it is crucial to manufacture ceramic powders optimized for the separator's performance. In this study, we evaluated the characteristics of three types of α-alumina (A-1, A-2, and A-3) produced with varying dispersant contents and milling times, in addition to commercial α-alumina (AES-11). Subsequently, the optimized powders (A-3) were coated onto the separator using an aqueous binder for comparison with the characteristics of an AES-11 coated separator and an uncoated PE separator. The A-3 coated separator improved electrolyte wettability with a low contact angle (44.69°) and increased puncture strength (538 gf). Furthermore, it exhibited excellent thermal stability, with a shrinkage value of 5.64% when exposed to 140℃ for 1 hour, compared to the AES11 coated separator (6.09%) and the bare PE separator (69.64%).

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.2
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• pp.689-696
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• 2017

The practical applications of ordinary high-fluidity concrete have been limited due to several drawbacks, such as high hydration heat, high amount of shrinkage, and non-economic strength development. On the other hand, due to its advantages, such as improvement of construction quality, reduction of construction cost and period, the development of high-fluidity concrete is a pressing need. This study examined the properties of high-fluidity concrete, which can be manufactured on the low binders using a viscosity agent to prevent the segregation of materials. The optimal viscosity agent was selected by an evaluation of the mechanical properties of high-fluidity concrete among six viscosity agents. The acrylic type and urethane type viscosity agents showed the best performance within the range where no material separation occurred. The mechanical properties were evaluated to examine the optimal amount of AC and UT viscosity agent added by mixing two viscosity agents according to the adding ratio and blending them together with high performance water reducing agent. When the ratio of the AC : UT viscosity agents was 5:5, it was most suited for high-fluidity concrete with low binders by increasing the workability and effect of the reducing viscosity.

• Journal of Periodontal and Implant Science
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• v.25 no.3
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• pp.539-556
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• 1995

Periodontal therapeutic modalities should be re-establishing and regenerating the periodontal tissue previously lost to the disease. To achieve periodontal regeneration, periodontal ligament cells must selective migrate to the deneded root surface, attached and proliferated it. Local pH concentration is one of the most factors that periodontal regeneration. The aims of this study were to examine on biological effects of pH to the human periodontal ligament cells in vitro, especially on the cell morphology, attachment, activity, vitality and viability. Human periodontal ligament cells were cultured from extracted tooth for non-periodontal reason. Immediately after extraction, any soft tissue adhering to the cervical parts of the roots was carefully removed with a sterile curette. To produce different pH levels in the media, Eagle's MEM was adjusted from pH 6.6 to 8.2 in 0.2 intervals with 1 M NaOH and 1 N HCl. After cultivation, Then, Periodontal ligament cells were cultured at pH ranging from 6.6-8.2. attachment assay was done at 1, 2 day incubation and activity assay was done at 1, 2, 3 day incubation. The experiments were evaluated by scaning electron microscopic techniques (HITACHIX-650 Scaning Electron Microanalyzer, Tokyo, Japan), MTT assay, and the cultured periodontal ligament cells were fixed in neutral formalin for 24 hours and immunohistochemically processed by PCNA for proliferating ability. The surviving cells in the medium showed slightly increased volume and widening intercellular distances at low concentration of pH than control group (pH 7.4), and apparently shrinkage at high concentration of pH than control group (pH 7.4). The results of the statistical analysis from the experiment on attachment, vitality and viability were as follows. Attachment of periodontal ligament cells at 1st and 2nd day, similar attachment rate of low concentration pH compared with control value (pH 7.4). But above pH 8.0, attachment rate were statistically significant decrease from control value(P<0.05). Periodontal ligament cell's activities were maximum at pH 7.6 by MTT assay. Similar with control value at low concentration of pH. But, the activities were statistically significant decrease at high concentraration of pH(P<0.05). Cellular proliferating rate (PCNA index) were statistically significant decrease from control value at low and high concentration of pH(p<0.05). This results suggested that hjgh concentration pH, in other words, alkali pH was cytotoxic effects on human periodontal ligament cells in vitro.

• Journal of Life Science
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• v.29 no.12
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• pp.1351-1357
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• 2019

This study investigated the effect of plant oil emulsion as a replacement for animal fat on the quality characteristics of low-fat pork patties. Pork patties were manufactured using a pork fat control (CON) and olive (OPP), soybean (SPP), and canola (CPP) oil emulsions. Replacing animal fat with the plant oil emulsions increased the moisture content and decreased the fat content of the patties as compared to those with pork fat. The water holding capacity and cooking yield, and the moisture and fat retention of the patties were significantly increased, and the diameter reduction and shrinkage ratio decreased with the plant oil replacements. The color parameters of the samples were affected by the addition of the plant oil emulsions, and higher L^* and a^* values were observed in CON. The b^* value of the raw pork patty was highest in OPP, and palmitic acid was the most abundant saturated fatty acid. In terms of unsaturated fatty acids, oleic acid was highest in CON, OPP, and CPP, and linoleic acid was highest in SPP. Hardness, cohesion, and chewiness were no different among the samples, although higher springiness was observed in the pork patties with added plant oil emulsions. The taste, flavor, and palatability of the OPP and CPP patties were higher than in the CON and SPP groups. Fat replacement with plant oil emulsion therefore had a positive effect on the quality characteristics of the pork patties, and due to reduced saturated fatty acids, the end-product provides the healthy low-fat option desired by consumers.