• Journal of the Korean Ceramic Society
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• v.39 no.6
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• pp.570-575
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• 2002

The present tendency of electrical and electronics is concentrated on MEMS devices for advantage of miniaturization, intergration, low electric power and low cost. Therefore it is essential that high aspect ratio and high etch rate by HDP technology development, so that silicon deep trench etching reactions was studied by ICP equipment. Deep trench etching of silicon was investigated as function of platen power, etch step time of etch/passivation cycle time and SF$\_$6/:C$_4$F$\_$8/ flow rate. Their effects on etch profile, scallops, etch rate, uniformity and selectivity were also studied.

• Journal of Advanced Navigation Technology
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• v.16 no.5
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• pp.738-743
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• 2012

Kalman filter is generally used in INS/GPS integrated navigation filter. However, the INS with low performance inertia sensor can not find accurate azimuth in initial alignment stage because sensor noise level is too large compare to Earth rotation rate, therefore the performance and stability of Kalman filter can not be guaranteed. In this paper, the extended Kalman filter and particle filter combined filter structure which can be overcome large initial azimuth error is proposed.

• Journal of Advanced Navigation Technology
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• v.15 no.2
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• pp.181-188
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• 2011

A small UAVs(Unmaned Aerial Vehicles) have limited by the payload capacity which requires miniaturization of a navigation system. In this paper, the performance of the lightweight and small sized AHRS(Attitude Heading Reference System), which is self-developed, is evaluated at low acceleration environment. The designed AHRS adopts the commercial low-cost MEMS sensors. A quaternion-based attitude calculation method, which eliminates singularity with relatively simple algebra, is used. In an attitude correction algorithm, the Kalman filter is used with accelerometers and magnetometers combined. The fabricated AHRS is also evaluated with reference to a COTS(Commercial Off-The-Shelf) AHRS which reports a number of successful applications to a small UAVs. The test results show that the measurements from the fabricated AHRS provide proper attitude output data with acceptable amount of differences(horizontal axis 0.5$^{\circ}$, vertical axis 1.5$^{\circ}$) in test environment.

• Smart Structures and Systems
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• v.2 no.2
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• pp.115-126
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• 2006

The Terra-Scope system is an affordable 4-D down-hole seismic monitoring system based on independent, microprocessor-controlled sensor Pods. The Pods are nominally 50 mm in diameter, and about 120 mm long. They are expected to cost approximately $6000 each. An internal 16-bit, extremely low power MCU controls all aspects of instrumentation, eight programmable gain amplifiers, and local signal storage. Each Pod measures 3-D acceleration, tilt, azimuth, temperature, and other parametric variables such as pore water pressure and pH. Each Pod communicates over a standard digital bus (RS-485) through a completely web-based GUI interface, and has a power consumption of less than 400 mW. Three-dimensional acceleration is measured by pure digital force-balance MEMS-based accelerometers. These accelerometers have a dynamic range of more than 115 dB and a frequency response from DC to 1000 Hz with a noise floor of less than $30ng_{rms}/{\surd}Hz$. Accelerations above 0.2 g are measured by a second set of MEMS-based accelerometers, giving a full 160 dB dynamic range. This paper describes the system design and the cooperative shared-time scheduler implemented for this project. Restraints accounted for include multiple data streams, integration of multiple free agents, interaction with the asynchronous world, and hardened time stamping of accelerometer data. The prototype of the device is currently undergoing evaluation. The first array will be installed in the spring of 2006.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.10
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• pp.1002-1009
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• 2009

Precision guidance filter design for a tactical missile with a strapdown seeker aided by low-cost strapdown sensors has been addressed in this paper. The low-cost strapdown sensors consist of an IMU with 3-axis accelerometers and gyroscopes, 3-axis magnetometers, and a barometer. Missile's position, velocity, attitude, and bias error of the barometer are considered as state variables. Since the state and measurement equations are highly nonlinear, we adopt UKF(Unscented Kalman Filter). The proposed guidance filter has a function of a navigation filter if target position error is not considered. In the case that the target position error is introduced, the proposed filter can effectively estimate the relative states of the missile to the true target. For specific engagement scenarios, we can observe that observability problems occur.

• Journal of Advanced Navigation Technology
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• v.23 no.3
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• pp.228-236
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• 2019

Recently, multi-sensor integration techniques have been actively studied to obtain reliable and accurate navigation solution in GPS (Global Positioning System)-denied harsh environments such as urban canyons, tunnels, and underground roads. In this paper, we propose a low-cost ultrasonic-speedometer utilizing the characteristics of the ultrasonic propagation. An efficient integrated INS (inertial navigation system)/ultrasonic-speedometer navigation system is also proposed to improve the accuracy of positioning in GPS-denied environments. To evaluate the proposed system, car experiments with field-collected measurements were performed. By the experiment results, it was confirmed that the proposed INS/ultrasonic-speedometer system bounds the positioning error growth effectively even though GPS signal is blocked more than 10 seconds and a low-cost MEMS IMU (micro electro mechanical systems inertial measurement unit) is utilized.

• Journal of Sensor Science and Technology
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• v.22 no.1
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• pp.89-94
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• 2013

In this paper, we developed a beam of MEMS probe card using a BeCu sheet. Silicon wafer thickness of $400{\mu}m$ was fabricated by using deep reactive ion etching (RIE) process. After forming through silicon via (TSV), the silicon wafer was bonded with BeCu sheet by soldering process. We made BeCu beam stress-free owing to removing internal stress by using joule heating. BeCu beam was fused by using joule heating caused by high current. The fabricated BeCu beam measured length of 1.75 mm and width of 0.44 mm, and thickness of $15{\mu}m$. We measured fusing current as a function of the cutting planes. Maximum current was 5.98 A at cutting plane of $150{\mu}m^2$. The proposed low-cost and simple fabrication process is applicable for producing MEMS probe beam.

• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.29 no.5
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• pp.284-288
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• 2016

Among the various physiological information that could be obtained from human body, heartbeat rate is a commonly used vital sign in the clinical milieu. Photoplethysography (PPG) sensor is incorporated into many wearable healthcare devices because of its advantages such as simplicity of hardware structure and low-cost. However, healthcare device employing PPG sensor has been issued in susceptibility of light and motion artifact. In this paper, to develop the real-time heart rate measurement device that is less sensitive to the external noises, we have fabricated an ultra-small wireless LC resonant pressure sensor by MEMS process. After performance evaluation in linearity and repeatability of the MEMS pressure sensor, heartbeat waveform and rate on radial artery were obtained by using resonant frequency-pressure conversion method. The measured data using the proposed heartbeat rate measurement system was validated by comparing it with the data of an commercialized heart rate measurement device. Result of the proposed device was agreed well to that of the commercialized device. The obtained real time heartbeat wave and rate were displayed on personal mobile system by bluetooth communication.

• Proceedings of the Materials Research Society of Korea Conference
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• 2010.05a
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• pp.20.2-20.2
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• 2010

Recently inkjet printing technology has been developed in the areas of low cost fabrication in environmentally friendly manufacturing processes. Although inkjet printing requires the interdisciplinary researches including development of materials, manufacturing processes and printing equipment and peripherals, manufacturing a printhead is still core of inkjet technology. In this study, a piezoelectric driven DOD (drop on demand) inkjet printhead has been fabricated on three layers of the silicon wafer in MEMS Technology because of its chemical resistance to industrial inks, strong mechanical properties and dimensional accuracy to meet the drop volume uniformity in printed electronics and display industries. The flow passage, filter and nozzles are precisely etched on the layers of the silicon wafers and assembled through silicon fusion bonding without additional adhesives. The piezoelectric is screen-printed on the top the pressure chamber and the nozzle plate surface is treated with non-wetting coating for jetting fluids. Printheads with nozzle number of 16 to 256 have been developed to get the drop volume range from 5 pL to 80 pL in various industrial applications. Currently our printheads are successfully utilized to fabricating color-filters and PI alignment layers in LCD Flat Panel Display and legend marking for PCB in Samsung Electronics.